{"id":707,"date":"2026-06-01T05:34:46","date_gmt":"2026-06-01T05:34:46","guid":{"rendered":"https:\/\/planetary-gearboxes.com\/?p=707"},"modified":"2026-06-01T05:34:46","modified_gmt":"2026-06-01T05:34:46","slug":"planetary-gearbox-semiconductor-wafer-handling-cleanroom","status":"publish","type":"post","link":"https:\/\/planetary-gearboxes.com\/ar\/planetary-gearbox-semiconductor-wafer-handling-cleanroom\/","title":{"rendered":"\u0639\u0644\u0628\u0629 \u062a\u0631\u0648\u0633 \u0643\u0648\u0643\u0628\u064a\u0629 \u0644\u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a - \u063a\u0631\u0641 \u0646\u0638\u064a\u0641\u0629 \u0648\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0631\u0642\u0627\u0626\u0642"},"content":{"rendered":"
\n

<\/p>\n

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\n<\/a><\/p>\n<\/div>\n<\/section>\n

<\/p>\n

\n

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<\/p>\n

\n\n\n\n\n\n\n\n\n
\u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0643\u0648\u0631\u064a\u0629<\/th>\n\u0641\u0626\u0629 ISO<\/th>\n\u0627\u0644\u062d\u062f \u0627\u0644\u0623\u0642\u0635\u0649 \u0644\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u2265 0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 \u0644\u0643\u0644 \u0645\u062a\u0631 \u0645\u0643\u0639\u0628<\/th>\n\u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \/ \u0627\u0644\u0631\u0637\u0648\u0628\u0629<\/th>\n\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633<\/th>\n<\/tr>\n<\/thead>\n
\u062e\u0644\u064a\u062c \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629<\/td>\nISO 3<\/td>\n10<\/td>\n20 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \u00b10.1 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \/ 40% \u0631\u0637\u0648\u0628\u0629 \u0646\u0633\u0628\u064a\u0629<\/td>\n\u0645\u0631\u062d\u0644\u0629 \u0627\u0644\u0634\u0628\u0643\u0629\u060c \u0645\u062d\u0645\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a - \u0627\u0644\u0623\u0643\u062b\u0631 \u062a\u0637\u0644\u0628\u064b\u0627<\/td>\n<\/tr>\n
\u0623\u062d\u0648\u0627\u0636 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \/ \u0627\u0644\u062d\u0641\u0631<\/td>\nISO 4\u20135<\/td>\n100\u20131000<\/td>\n20-22 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \/ 40-50% \u0631\u0637\u0648\u0628\u0629 \u0646\u0633\u0628\u064a\u0629<\/td>\n\u0639\u0645\u0627\u0644 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0645\u0639\u062f\u0627\u062a\u060c \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0639\u0644\u0648\u064a<\/td>\n<\/tr>\n
\u0623\u062d\u0648\u0627\u0636 \u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0648\u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a<\/td>\nISO 6\u20137<\/td>\n10,000\u2013100,000<\/td>\n20-23 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \/ 40-60% \u0631\u0637\u0648\u0628\u0629 \u0646\u0633\u0628\u064a\u0629<\/td>\n\u0646\u0642\u0644 \u0627\u0644\u0645\u0648\u0627\u062f \u0628\u0648\u0627\u0633\u0637\u0629 \u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0622\u0644\u064a\u0629 (AGV)<\/td>\n<\/tr>\n
\u0645\u0645\u0631 \u062f\u0639\u0645 \u0627\u0644\u0645\u0635\u0646\u0639<\/td>\nISO 8<\/td>\n3,520,000<\/td>\n\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0645\u062d\u064a\u0637\u0629 \u00b12 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629<\/td>\n\u0645\u0639\u064a\u0627\u0631 EP-AB \u0645\u0642\u0628\u0648\u0644 \u0641\u064a \u0647\u0630\u0647 \u0627\u0644\u0645\u0646\u0637\u0642\u0629<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n

\u062a\u0635\u0646\u064a\u0641\u0627\u062a \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0648\u0641\u0642\u064b\u0627 \u0644\u0645\u0639\u064a\u0627\u0631 ISO 14644-1:2015. \u0645\u0646\u0627\u0637\u0642 \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0643\u0648\u0631\u064a\u0629 \u0648\u0641\u0642\u064b\u0627 \u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0645\u0639\u062f\u0627\u062a \u0633\u0627\u0645\u0633\u0648\u0646\u062c\/\u0625\u0633 \u0643\u064a\u0647 \u0647\u0627\u064a\u0646\u0643\u0633. \u062a\u062d\u0627\u0641\u0638 \u062c\u0645\u064a\u0639 \u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0639\u0644\u0649 \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u062a\u062a\u0631\u0627\u0648\u062d \u0628\u064a\u0646 20 \u064822 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \u0639\u0644\u0649 \u0645\u062f\u0627\u0631 \u0627\u0644\u0639\u0627\u0645 \u062a\u0642\u0631\u064a\u0628\u064b\u0627\u060c \u0648\u0644\u0627 \u064a\u064f\u0645\u062b\u0644 \u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0644\u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 0 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \u0644\u0633\u0644\u0633\u0644\u0629 EP-KF\/KH hypoid \u0623\u064a \u0645\u0634\u0643\u0644\u0629 \u0644\u0623\u064a \u0645\u0646\u0634\u0623\u0629 \u062a\u0635\u0646\u064a\u0639 \u062f\u0627\u062e\u0644\u064a\u0629.<\/p>\n<\/section>\n

<\/p>\n

\n

\u0623\u0631\u0628\u0639 \u0637\u0631\u0642 \u062a\u064f\u0644\u0648\u0650\u0651\u062b \u0628\u0647\u0627 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0645\u0635\u0646\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h2>\n

\u062a\u0646\u0634\u0623 \u0645\u0634\u0643\u0644\u0629 \u0639\u062f\u0645 \u0627\u0644\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0641\u064a \u0639\u0644\u0628 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0623\u0631\u0628\u0639 \u0622\u0644\u064a\u0627\u062a \u0645\u0633\u062a\u0642\u0644\u0629. \u064a\u062c\u0628 \u0645\u0639\u0627\u0644\u062c\u0629 \u0643\u0644 \u0622\u0644\u064a\u0629 \u0639\u0644\u0649 \u062d\u062f\u0629 - \u0641\u0625\u0632\u0627\u0644\u0629 \u0625\u062d\u062f\u0627\u0647\u0627 \u0644\u0627 \u062a\u0639\u0627\u0644\u062c \u0627\u0644\u0622\u0644\u064a\u0627\u062a \u0627\u0644\u0623\u062e\u0631\u0649.<\/p>\n

\n
\n
\n
1<\/div>\n
\n
\u0627\u0646\u0628\u0639\u0627\u062b \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u0645\u0646 \u0645\u0648\u0627\u062f \u0627\u0644\u062a\u0634\u062d\u064a\u0645 - \u0627\u0644\u062a\u0644\u0648\u062b \u063a\u064a\u0631 \u0627\u0644\u0645\u0631\u0626\u064a<\/div>\n

\u062a\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0634\u062d\u0648\u0645 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0627\u0644\u0645\u063a\u0644\u0642\u0629 \u0632\u064a\u0648\u062a\u064b\u0627 \u0645\u0639\u062f\u0646\u064a\u0629 \u0623\u0648 \u0632\u064a\u0648\u062a\u064b\u0627 \u0623\u0633\u0627\u0633\u064a\u0629 \u0645\u0646 \u0646\u0648\u0639 PAO (\u0628\u0648\u0644\u064a \u0623\u0644\u0641\u0627 \u0623\u0648\u0644\u064a\u0641\u064a\u0646) \u0645\u0639 \u0645\u0648\u0627\u062f \u0645\u064f\u0643\u062b\u0650\u0651\u0641\u0629 \u0623\u0633\u0627\u0633\u0647\u0627 \u0627\u0644\u0623\u0645\u064a\u0646 \u0623\u0648 \u0627\u0644\u0643\u0627\u0644\u0633\u064a\u0648\u0645. \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 \u062f\u0627\u062e\u0644 \u063a\u0631\u0641\u0629 \u0646\u0638\u064a\u0641\u0629\u060c \u062a\u064f\u0637\u0644\u0642 \u0647\u0630\u0647 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0645\u0631\u0643\u0628\u0627\u062a \u0639\u0636\u0648\u064a\u0629 \u0645\u062a\u0637\u0627\u064a\u0631\u0629 (VOCs) \u0639\u0628\u0631 \u0636\u063a\u0637 \u0627\u0644\u0628\u062e\u0627\u0631 - \u0648\u0647\u064a \u0639\u0645\u0644\u064a\u0629 \u062a\u064f\u0633\u0645\u0649 \u0627\u0644\u062a\u0628\u062e\u0631. \u0647\u0630\u0647 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0639\u0636\u0648\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631\u0629 \u063a\u064a\u0631 \u0645\u0631\u0626\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u062c\u0632\u064a\u0626\u064a\u060c \u0644\u0643\u0646\u0647\u0627 \u062a\u062a\u0631\u0633\u0628 \u0639\u0644\u0649 \u0627\u0644\u0623\u0633\u0637\u062d \u0627\u0644\u0645\u062c\u0627\u0648\u0631\u0629\u060c \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643 \u0623\u0633\u0637\u062d \u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0627\u0644\u0632\u062c\u0627\u062c \u0627\u0644\u0634\u0628\u0643\u064a.<\/p>\n

\u0627\u0644\u0622\u0644\u064a\u0629:<\/strong> \u0639\u0646\u062f \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 20 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629\u060c \u0642\u062f \u064a\u0635\u0644 \u0636\u063a\u0637 \u0628\u062e\u0627\u0631 \u0627\u0644\u0634\u062d\u0645 \u0627\u0644\u0645\u0639\u062f\u0646\u064a \u0627\u0644\u0642\u064a\u0627\u0633\u064a \u0625\u0644\u0649 10\u207b\u2074 \u0625\u0644\u0649 10\u207b\u00b3 \u0628\u0627\u0633\u0643\u0627\u0644. \u0645\u0639\u062f\u0644 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0639\u0644\u0649 \u0627\u0644\u0623\u0633\u0637\u062d \u0627\u0644\u0645\u062c\u0627\u0648\u0631\u0629: \u062d\u0648\u0627\u0644\u064a 0.1-1 \u0646\u0627\u0646\u0648\u063a\u0631\u0627\u0645\/\u0633\u0645\u00b2\/\u0633\u0627\u0639\u0629. \u0639\u0644\u0649 \u0631\u0642\u0627\u0642\u0629 \u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0628\u0642\u0637\u0631 300 \u0645\u0645 \u0645\u0648\u0636\u0648\u0639\u0629 \u0639\u0644\u0649 \u0628\u064f\u0639\u062f 500 \u0645\u0645 \u0645\u0646 \u0639\u0644\u0628\u0629 \u062a\u0631\u0648\u0633 \u0645\u0644\u0648\u062b\u0629\u060c \u0648\u062e\u0644\u0627\u0644 \u0641\u062a\u0631\u0629 \u062a\u0634\u063a\u064a\u0644 \u0645\u062a\u0648\u0627\u0635\u0644\u0629 \u0644\u0645\u062f\u0629 24 \u0633\u0627\u0639\u0629\u060c \u064a\u062a\u0631\u0633\u0628 \u063a\u0634\u0627\u0621 \u0639\u0636\u0648\u064a \u064a\u064f\u063a\u064a\u0631 \u0645\u0646 \u0642\u0627\u0628\u0644\u064a\u0629 \u0633\u0637\u062d \u0627\u0644\u0645\u0642\u0627\u0648\u0645 \u0627\u0644\u0636\u0648\u0626\u064a \u0644\u0644\u062a\u0631\u0637\u064a\u0628 \u0648\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u062a\u0635\u0627\u0642\u0647\u060c \u0645\u0645\u0627 \u064a\u064f\u0633\u0628\u0628 \u0639\u064a\u0648\u0628\u064b\u0627 \u0641\u064a \u062e\u0637\u0648\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0627\u0644\u0644\u0627\u062d\u0642\u0629.<\/p>\n

\u062d\u0644:<\/strong> \u0634\u062d\u0645 PFPE (\u0628\u064a\u0631\u0641\u0644\u0648\u0631\u0648\u0628\u0648\u0644\u064a \u0625\u064a\u062b\u0631). \u0636\u063a\u0637 \u0627\u0644\u0628\u062e\u0627\u0631 \u0639\u0646\u062f 20 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629: \u0623\u0642\u0644 \u0645\u0646 10\u207b\u00b9\u2070 \u0628\u0627\u0633\u0643\u0627\u0644 - \u0623\u064a \u0623\u0642\u0644 \u0628\u0633\u0628\u0639 \u0645\u0631\u0627\u062a\u0628 \u0623\u0648 \u0623\u0643\u062b\u0631 \u0645\u0646 \u0627\u0644\u0632\u064a\u062a \u0627\u0644\u0645\u0639\u062f\u0646\u064a. \u0634\u062d\u0645 PFPE \u062e\u0627\u0645\u0644 \u0643\u064a\u0645\u064a\u0627\u0626\u064a\u064b\u0627\u060c \u0648\u0644\u0627 \u064a\u062a\u0641\u0627\u0639\u0644 \u0645\u0639 \u063a\u0627\u0632\u0627\u062a \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a\u060c \u0648\u0644\u0627 \u064a\u064f\u0646\u062a\u062c \u0623\u064a \u062a\u0631\u0633\u0628\u0627\u062a \u0639\u0636\u0648\u064a\u0629 \u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u0642\u064a\u0627\u0633 \u0639\u0644\u0649 \u0627\u0644\u0623\u0633\u0637\u062d \u0627\u0644\u0645\u062c\u0627\u0648\u0631\u0629. \u062a\u062a\u0648\u0641\u0631 \u0639\u0644\u0628 \u062a\u0631\u0648\u0633 \u0633\u0644\u0633\u0644\u0629 EP \u0645\u0646 \u0634\u0631\u0643\u0629 Ever-Power \u0627\u0644\u0643\u0648\u0631\u064a\u0629 \u0627\u0644\u0645\u0632\u0648\u062f\u0629 \u0628\u0634\u062d\u0645 PFPE \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645 \u0641\u064a \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u062d\u0633\u0628 \u0627\u0644\u0637\u0644\u0628 \u0627\u0644\u062e\u0627\u0635 - \u064a\u064f\u0631\u062c\u0649 \u062a\u062d\u062f\u064a\u062f \"\u0645\u0627\u062f\u0629 \u062a\u0634\u062d\u064a\u0645 PFPE \u0644\u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0644\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\" \u0639\u0646\u062f \u0627\u0644\u0637\u0644\u0628.<\/div>\n<\/div>\n<\/div>\n<\/div>\n

\n
\n
2<\/div>\n
\n
\u062a\u0648\u0644\u064a\u062f \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0645\u0646 \u062d\u0637\u0627\u0645 \u062a\u0622\u0643\u0644 \u062a\u0631\u0648\u0633 \u0627\u0644\u0634\u0628\u0643\u0629<\/div>\n

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3<\/div>\n
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4<\/div>\n
\n
\u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0627\u0644\u062d\u062f\u064a\u062f\u064a\u0629 \u0648\u0627\u0644\u0645\u062c\u0627\u0644\u0627\u062a \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0627\u0644\u0634\u0627\u0631\u062f\u0629<\/div>\n

\u062a\u064f\u0635\u0646\u0639 \u0645\u0643\u0648\u0646\u0627\u062a \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 (\u0627\u0644\u0647\u064a\u0643\u0644\u060c \u0648\u0627\u0644\u062a\u0631\u0648\u0633\u060c \u0648\u0627\u0644\u0623\u0639\u0645\u062f\u0629\u060c \u0648\u062d\u0648\u0627\u0645\u0644 \u0627\u0644\u0643\u0648\u0627\u0643\u0628) \u0645\u0646 \u0627\u0644\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0643\u0631\u0628\u0648\u0646\u064a \u0623\u0648 \u0627\u0644\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0633\u0628\u0627\u0626\u0643\u064a \u0627\u0644\u0642\u064a\u0627\u0633\u064a - \u0648\u0647\u064a \u0645\u0648\u0627\u062f \u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u062d\u062f\u064a\u062f\u064a\u0629 \u0630\u0627\u062a \u0646\u0641\u0627\u0630\u064a\u0629 \u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0639\u0627\u0644\u064a\u0629. \u0641\u064a \u0645\u0639\u0638\u0645 \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a\u060c \u0644\u0627 \u064a\u064f\u0639\u062f \u0647\u0630\u0627 \u0627\u0644\u0623\u0645\u0631 \u0630\u0627 \u0623\u0647\u0645\u064a\u0629. \u0641\u064a \u0645\u0646\u0627\u0637\u0642 \u062a\u0635\u0646\u064a\u0639 \u0630\u0627\u0643\u0631\u0629 \u0627\u0644\u0648\u0635\u0648\u0644 \u0627\u0644\u0639\u0634\u0648\u0627\u0626\u064a \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 (MRAM) \u0641\u064a \u0643\u0648\u0631\u064a\u0627\u060c \u0648\u0628\u0627\u0644\u0642\u0631\u0628 \u0645\u0646 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0634\u0639\u0627\u0639 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u060c \u062a\u062a\u0633\u0628\u0628 \u0627\u0644\u0645\u062c\u0627\u0644\u0627\u062a \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0627\u0644\u0645\u062a\u0633\u0631\u0628\u0629 \u0645\u0646 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0627\u0644\u062d\u062f\u064a\u062f\u064a\u0629 \u0641\u064a \u062d\u062f\u0648\u062b \u0623\u062e\u0637\u0627\u0621 \u0641\u064a \u0645\u062d\u0627\u0630\u0627\u0629 \u0639\u0645\u0648\u062f \u0634\u0639\u0627\u0639 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u060c \u0648\u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u064f\u063a\u064a\u0631 \u0627\u0644\u062d\u0627\u0644\u0629 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0644\u062e\u0644\u0627\u064a\u0627 MRAM \u0627\u0644\u0645\u0635\u0646\u0639\u0629 \u062c\u0632\u0626\u064a\u064b\u0627.<\/p>\n

\u0627\u0644\u0622\u0644\u064a\u0629:<\/strong> \u064a\u062a\u0645\u062a\u0639 \u063a\u0644\u0627\u0641 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0641\u0648\u0644\u0627\u0630\u064a\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a \u0628\u0646\u0641\u0627\u0630\u064a\u0629 \u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0646\u0633\u0628\u064a\u0629 (\u03bc\u1d63) \u200b\u200b\u062a\u062a\u0631\u0627\u0648\u062d \u0628\u064a\u0646 100 \u06481000 (\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u062d\u062f\u064a\u062f\u064a\u0629). \u0648\u0639\u0644\u0649 \u0645\u0633\u0627\u0641\u0629 300 \u0645\u0645\u060c \u062d\u062a\u0649 \u0627\u0644\u0645\u062c\u0627\u0644 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a \u0627\u0644\u0645\u062d\u064a\u0637 \u0628\u0627\u0644\u0623\u0631\u0636 \u064a\u062a\u0634\u0648\u0647 \u0628\u0641\u0639\u0644 \u0627\u0644\u063a\u0644\u0627\u0641\u060c \u0648\u0623\u064a \u0645\u062c\u0627\u0644 \u0645\u062a\u0633\u0631\u0628 \u0645\u0646 \u0645\u063a\u0646\u0627\u0637\u064a\u0633\u0627\u062a \u0627\u0644\u0645\u062d\u0631\u0643 \u0623\u0648 \u0643\u0627\u0628\u0644\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0645\u062a\u0635\u0644\u0629 \u0628\u0627\u0644\u063a\u0644\u0627\u0641 \u064a\u064f\u0646\u062a\u062c \u0645\u062c\u0627\u0644\u064b\u0627 \u0645\u062a\u063a\u064a\u0631\u064b\u0627 \u0645\u0639 \u0627\u0644\u0632\u0645\u0646 \u0642\u062f \u064a\u062a\u062c\u0627\u0648\u0632 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u0645\u062c\u0627\u0644 \u0627\u0644\u0628\u0627\u0644\u063a\u0629 10 \u0646\u0627\u0646\u0648 \u062a\u0633\u0644\u0627 \u0641\u064a \u0628\u0639\u0636 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0642\u0635\u0648\u0649. \u062d\u0644:<\/strong> \u064a\u064f\u0632\u064a\u0644 \u0647\u064a\u0643\u0644 \u0627\u0644\u0639\u0644\u0628\u0629 \u0627\u0644\u0645\u0635\u0646\u0648\u0639 \u0645\u0646 \u0627\u0644\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0645\u0642\u0627\u0648\u0645 \u0644\u0644\u0635\u062f\u0623 \u0627\u0644\u0623\u0648\u0633\u062a\u0646\u064a\u062a\u064a (SS316L\u060c \u03bc\u1d63 \u2248 1.003) \u0623\u0648 \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 (\u03bc\u1d63 \u2248 1.000006) \u0645\u0634\u0643\u0644\u0629 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0627\u0644\u062d\u062f\u064a\u062f\u064a\u0629. \u0647\u0630\u0627 \u0634\u0631\u0637 \u062e\u0627\u0635 \u0628\u0627\u0644\u0637\u0644\u0628\u0627\u062a\u060c \u0644\u0630\u0627 \u064a\u064f\u0631\u062c\u0649 \u0627\u0644\u062a\u0623\u0643\u062f \u0645\u0646 \u0630\u0644\u0643 \u0645\u0639 \u0642\u0633\u0645 \u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0641\u064a \u0634\u0631\u0643\u0629 \u0625\u064a\u0641\u0631-\u0628\u0627\u0648\u0631 \u0627\u0644\u0643\u0648\u0631\u064a\u0629 \u0644\u0645\u0639\u0631\u0641\u0629 \u062a\u0641\u0627\u0635\u064a\u0644 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0648\u0646\u0648\u0639 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0644\u062f\u064a\u0643\u0645.<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n

<\/p>\n

\n

\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0648\u0641\u0642\u064b\u0627 \u0644\u0645\u0639\u064a\u0627\u0631 ISO 14644 \u0641\u0626\u0629 \u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629<\/h2>\n

\u0644\u0627 \u062a\u062a\u0637\u0644\u0628 \u062c\u0645\u064a\u0639 \u0645\u0646\u0627\u0637\u0642 \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u062d\u0632\u0645\u0629 \u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0643\u0627\u0645\u0644\u0629 \u0644\u0635\u0646\u062f\u0648\u0642 \u062a\u0631\u0648\u0633 \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641. \u062a\u062a\u0646\u0627\u0633\u0628 \u0627\u0644\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0637\u0631\u062f\u064a\u064b\u0627 \u0645\u0639 \u0641\u0626\u0629 \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641\u061b \u0641\u0645\u0645\u0631 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0645\u0646 \u0627\u0644\u0641\u0626\u0629 ISO 7 \u0644\u0647 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0645\u062e\u062a\u0644\u0641\u0629 \u062a\u0645\u0627\u0645\u064b\u0627 \u0639\u0646 \u063a\u0631\u0641\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0645\u0646 \u0627\u0644\u0641\u0626\u0629 ISO 3. \u064a\u0624\u062f\u064a \u0627\u0644\u0625\u0641\u0631\u0627\u0637 \u0641\u064a \u062a\u062d\u062f\u064a\u062f \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0625\u0644\u0649 \u0632\u064a\u0627\u062f\u0629 \u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u062f\u0648\u0646 \u0641\u0627\u0626\u062f\u0629 \u0648\u0638\u064a\u0641\u064a\u0629\u060c \u0628\u064a\u0646\u0645\u0627 \u064a\u0624\u062f\u064a \u0627\u0644\u062a\u0642\u0644\u064a\u0644 \u0645\u0646 \u062a\u062d\u062f\u064a\u062f\u0647\u0627 \u0625\u0644\u0649 \u0645\u062e\u0627\u0637\u0631 \u062a\u0644\u0648\u062b \u0627\u0644\u0645\u0635\u0646\u0639.<\/p>\n

\n\n\n\n\n\n\n\n\n
\u0641\u0626\u0629 ISO<\/th>\n\u0645\u0627\u062f\u0629 \u062a\u0634\u062d\u064a\u0645<\/th>\n\u0645\u0627\u0646\u0639 \u062a\u0633\u0631\u0628 \u0627\u0644\u0639\u0645\u0648\u062f<\/th>\n\u0637\u0644\u0627\u0621 \u0627\u0644\u0647\u064a\u0643\u0644<\/th>\n\u063a\u064a\u0631 \u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a<\/th>\n\u0645\u0630\u0643\u0631\u0629 \u0623\u0645\u0631 \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u062f\u0627\u0626\u0645\u0629 \u0644\u0643\u0648\u0631\u064a\u0627<\/th>\n<\/tr>\n<\/thead>\n
ISO 8 (\u0645\u0645\u0631 \u0627\u0644\u062f\u0639\u0645)<\/td>\n\u0634\u062d\u0645 \u0642\u064a\u0627\u0633\u064a \u2713<\/td>\n\u0645\u0639\u064a\u0627\u0631 NBR \u2713<\/td>\n\u0637\u0644\u0627\u0621 \u0642\u064a\u0627\u0633\u064a \u2713<\/td>\n\u063a\u064a\u0631 \u0645\u0637\u0644\u0648\u0628<\/td>\n\u0645\u062e\u0632\u0648\u0646 EP-AB \u0627\u0644\u0642\u064a\u0627\u0633\u064a - \u0644\u0627 \u062d\u0627\u062c\u0629 \u0644\u0637\u0644\u0628 \u062e\u0627\u0635<\/td>\n<\/tr>\n
ISO 6\u20137 (CMP\/\u0627\u0644\u062a\u063a\u0644\u064a\u0641)<\/td>\n\u064a\u0641\u0636\u0644 PFPE<\/td>\nFKM \u0623\u0648 FFKM<\/td>\n\u0645\u0646\u062e\u0641\u0636 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0639\u0636\u0648\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631\u0629 \u0623\u0648 \u0645\u0624\u0643\u0633\u062f<\/td>\n\u0627\u0644\u062a\u0623\u0643\u064a\u062f \u0644\u0643\u0644 \u0645\u0646\u0637\u0642\u0629<\/td>\n\u062d\u062f\u062f \"\u0634\u062d\u0645 \u063a\u0631\u0641 \u0646\u0638\u064a\u0641\u0629 + \u0645\u0627\u0646\u0639 \u062a\u0633\u0631\u0628 FKM\" \u0639\u0646\u062f \u0627\u0644\u0637\u0644\u0628<\/td>\n<\/tr>\n
ISO 4\u20135 (\u0627\u0644\u062a\u0631\u0633\u064a\u0628\/\u0627\u0644\u062d\u0641\u0631)<\/td>\n\u0645\u0637\u0644\u0648\u0628 PFPE<\/td>\n\u0645\u0637\u0644\u0648\u0628 FFKM<\/td>\n\u0645\u0637\u0644\u0648\u0628 \u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 \u0645\u0624\u0643\u0633\u062f<\/td>\n\u0625\u0630\u0627 \u0643\u0627\u0646\u062a \u0645\u0646\u0637\u0642\u0629 MRAM\/EB: \u0646\u0639\u0645<\/td>\n\u0637\u0644\u0628\u064a\u0629 \u0643\u0627\u0645\u0644\u0629 \u0628\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u063a\u0631\u0641\u0629 \u0646\u0638\u064a\u0641\u0629\u061b \u0645\u062f\u0629 \u0627\u0644\u062a\u0633\u0644\u064a\u0645 \u0645\u0646 \u0623\u0633\u0628\u0648\u0639\u064a\u0646 \u0625\u0644\u0649 \u062b\u0644\u0627\u062b\u0629 \u0623\u0633\u0627\u0628\u064a\u0639<\/td>\n<\/tr>\n
ISO 3 (\u063a\u0631\u0641\u0629 \u0637\u0628\u0627\u0639\u0629 \u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0642\u0635\u0648\u0649)<\/td>\n\u0645\u0637\u0644\u0648\u0628 PFPE<\/td>\n\u0645\u0637\u0644\u0648\u0628 FFKM<\/td>\n\u0627\u0644\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0645\u0642\u0627\u0648\u0645 \u0644\u0644\u0635\u062f\u0623 316L \u0627\u0644\u0645\u0635\u0642\u0648\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0627\u064b<\/td>\n\u0645\u0637\u0644\u0648\u0628<\/td>\n\u064a\u062a\u0637\u0644\u0628 \u0627\u0644\u0623\u0645\u0631 \u0647\u0646\u062f\u0633\u0629 \u0645\u062e\u0635\u0635\u0629 - \u064a\u062c\u0628 \u0625\u0634\u0631\u0627\u0643 \u0641\u0631\u064a\u0642 \u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0625\u064a\u0641\u0631-\u0628\u0627\u0648\u0631 \u0627\u0644\u0643\u0648\u0631\u064a \u0641\u064a \u0648\u0642\u062a \u0645\u0628\u0643\u0631 \u0645\u0646 \u0645\u0631\u062d\u0644\u0629 \u0627\u0644\u062a\u0635\u0645\u064a\u0645.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n

 <\/p>\n

\u062a\u0639\u0644\u064a\u0645\u0627\u062a \u0627\u0644\u0637\u0644\u0628 \u0627\u0644\u0647\u0627\u0645\u0629: <\/strong>
\n\u064a\u062c\u0628 \u062a\u062d\u062f\u064a\u062f \u062c\u0645\u064a\u0639 \u0627\u0644\u062e\u064a\u0627\u0631\u0627\u062a \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 - \u0634\u062d\u0645 PFPE\u060c \u0645\u0627\u0646\u0639 \u062a\u0633\u0631\u0628 FFKM\u060c \u063a\u0644\u0627\u0641 \u0645\u0624\u0643\u0633\u062f\u060c \u0648\u0628\u0646\u064a\u0629 \u063a\u064a\u0631 \u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 - \u0639\u0646\u062f \u0627\u0644\u0637\u0644\u0628. \u062a\u064f\u0634\u062d\u0646 \u0639\u0644\u0628 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0645\u0646 \u0633\u0644\u0633\u0644\u0629 EP \u0645\u0632\u0648\u062f\u0629 \u0628\u0634\u062d\u0645 \u0645\u0639\u062f\u0646\u064a\/PAO \u0642\u064a\u0627\u0633\u064a\u060c \u0648\u0645\u0627\u0646\u0639\u0627\u062a \u062a\u0633\u0631\u0628 NBR\u060c \u0648\u063a\u0644\u0627\u0641 \u0645\u0637\u0644\u064a. \u0644\u0627 \u064a\u0645\u0643\u0646 \u0625\u062c\u0631\u0627\u0621 \u0623\u064a \u062a\u0639\u062f\u064a\u0644 \u0645\u064a\u062f\u0627\u0646\u064a. \u0641\u064a \u062d\u0627\u0644 \u0627\u0633\u062a\u0644\u0627\u0645 \u0648\u062d\u062f\u0629 \u0642\u064a\u0627\u0633\u064a\u0629 \u062b\u0645 \u0627\u0643\u062a\u0634\u0627\u0641 \u0623\u0646 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u062a\u062a\u0637\u0644\u0628 \u0645\u0627\u062f\u0629 \u062a\u0634\u062d\u064a\u0645 PFPE\u060c \u064a\u062c\u0628 \u0625\u0631\u062c\u0627\u0639 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0648\u0627\u0633\u062a\u0628\u062f\u0627\u0644\u0647\u0627 \u0628\u0648\u062d\u062f\u0629 \u0645\u064f\u062e\u0635\u0635\u0629 \u0644\u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641. \u062a\u062a\u0631\u0627\u0648\u062d \u0645\u062f\u0629 \u0627\u0644\u062a\u0633\u0644\u064a\u0645 \u0644\u062e\u064a\u0627\u0631\u0627\u062a \u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0628\u064a\u0646 \u0623\u0633\u0628\u0648\u0639\u064a\u0646 \u0648\u0623\u0631\u0628\u0639\u0629 \u0623\u0633\u0627\u0628\u064a\u0639\u061b \u0644\u0630\u0627 \u064a\u064f\u0631\u062c\u0649 \u0627\u0644\u062a\u062e\u0637\u064a\u0637 \u0648\u0641\u0642\u064b\u0627 \u0644\u0630\u0644\u0643 \u0641\u064a \u062c\u062f\u0648\u0644 \u0634\u0631\u0627\u0621 \u0627\u0644\u0645\u0639\u062f\u0627\u062a.<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\u0645\u062d\u0648\u0631 \u062f\u0648\u0631\u0627\u0646 \u0645\u0639\u0627\u0644\u062c \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a - \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u062e\u062a\u064a\u0627\u0631 \u0627\u0644\u0633\u0644\u0633\u0644\u0629<\/h2>\n

\u062a\u062a\u0637\u0644\u0628 \u0645\u062d\u0631\u0643\u0627\u062a \u0639\u0644\u0628 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0643\u0648\u0643\u0628\u064a\u0629 \u0641\u064a \u0623\u062c\u0647\u0632\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0631\u0642\u0627\u0626\u0642 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u062f\u0642\u0629\u064b \u062a\u0641\u0648\u0642 \u0645\u0639\u0638\u0645 \u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0645\u0624\u0627\u0632\u0631\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629. \u062a\u0633\u062a\u062e\u062f\u0645 \u0623\u062c\u0647\u0632\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0631\u0648\u0628\u0648\u062a\u064a\u0629 - \u0648\u0647\u064a \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u0646\u0642\u0644 \u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0628\u0642\u0637\u0631 300 \u0645\u0645 \u0628\u064a\u0646 \u0648\u062d\u062f\u0627\u062a FOUP \u0648\u063a\u0631\u0641 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0648\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0645\u062d\u0627\u0630\u0627\u0629 - \u0645\u062d\u0648\u0631\u064a \u062f\u0648\u0631\u0627\u0646: \u0645\u062d\u0648\u0631 \u062f\u0648\u0631\u0627\u0646 \u062b\u064a\u062a\u0627 (\u03b8) \u0627\u0644\u0630\u064a \u064a\u064f\u062f\u064a\u0631 \u0645\u062c\u0645\u0648\u0639\u0629 \u0627\u0644\u0630\u0631\u0627\u0639 \u0628\u0623\u0643\u0645\u0644\u0647\u0627 \u0644\u0645\u062d\u0627\u0630\u0627\u062a\u0647\u0627 \u0645\u0639 \u0627\u0644\u0641\u062a\u062d\u0627\u062a \u0627\u0644\u0645\u0633\u062a\u0647\u062f\u0641\u0629\u060c \u0648\u0645\u062d\u0648\u0631 \u062a\u0645\u062f\u064a\u062f \u064a\u064f\u0645\u062f\u062f \u0648\u064a\u064f\u0639\u064a\u062f \u0623\u062f\u0627\u0629 \u0627\u0644\u0646\u0647\u0627\u064a\u0629 \u0634\u0639\u0627\u0639\u064a\u064b\u0627. \u062a\u062d\u062f\u062f \u062f\u0642\u0629 \u062a\u062d\u062f\u064a\u062f \u0645\u0648\u0636\u0639 \u0645\u062d\u0648\u0631 \u062b\u064a\u062a\u0627 \u0645\u0627 \u0625\u0630\u0627 \u0643\u0627\u0646\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0645\u0648\u0636\u0648\u0639\u0629 \u0636\u0645\u0646 \u0646\u0637\u0627\u0642 \u0627\u0644\u062a\u0641\u0627\u0648\u062a \u0627\u0644\u0645\u0633\u0645\u0648\u062d \u0628\u0647 \u0644\u0645\u0631\u0643\u0632 \u0623\u062f\u0627\u0629 \u0627\u0644\u0646\u0647\u0627\u064a\u0629\u061b \u0628\u064a\u0646\u0645\u0627 \u064a\u062d\u062f\u062f \u0645\u062d\u0648\u0631 \u0627\u0644\u062a\u0645\u062f\u064a\u062f \u062f\u0642\u0629 \u0627\u0644\u0645\u0648\u0636\u0639 \u0627\u0644\u0634\u0639\u0627\u0639\u064a.<\/p>\n

\"\u062a\u0637\u0628\u064a\u0642<\/p>\n

\u0627\u0644\u0634\u0631\u0637 \u0627\u0644\u062d\u0631\u062c \u0644\u062a\u062d\u062f\u064a\u062f \u0645\u0648\u0636\u0639 \u0627\u0644\u0645\u062d\u0648\u0631 \u062b\u064a\u062a\u0627: \u064a\u062c\u0628 \u0648\u0636\u0639 \u0645\u0631\u0643\u0632 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0636\u0645\u0646 \u0646\u0637\u0627\u0642 \u00b10.5 \u0645\u0645 \u0645\u0646 \u0627\u0644\u0645\u0648\u0636\u0639 \u0627\u0644\u0645\u0633\u062a\u0647\u062f\u0641 \u0639\u0646\u062f \u0646\u0635\u0641 \u0642\u0637\u0631 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0627\u0633\u0645\u064a \u0627\u0644\u0628\u0627\u0644\u063a 300 \u0645\u0645 (150 \u0645\u0645 \u0645\u0646 \u0645\u0631\u0643\u0632 \u0627\u0644\u0631\u0642\u0627\u0642\u0629). \u064a\u062a\u0637\u0644\u0628 \u0630\u0644\u0643 \u0623\u0646 \u064a\u0643\u0648\u0646 \u0627\u0644\u062e\u0637\u0623 \u0627\u0644\u0632\u0627\u0648\u064a \u0644\u0644\u0645\u062d\u0648\u0631 \u062b\u064a\u062a\u0627 \u0643\u0645\u0627 \u064a\u0644\u064a:<\/p>\n

\n

\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0631\u062f \u0627\u0644\u0641\u0639\u0644 \u0627\u0644\u0639\u0643\u0633\u064a \u0644\u0645\u062d\u0648\u0631 \u062b\u064a\u062a\u0627 - \u0645\u0639\u0627\u0644\u062c \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a<\/p>\n

\u0627\u0644\u0645\u0637\u0644\u0648\u0628: \u062e\u0637\u0623 \u0641\u064a \u0627\u0644\u0645\u0648\u0636\u0639 \u2264 \u00b10.5 \u0645\u0645 \u0639\u0646\u062f \u0646\u0635\u0641 \u0642\u0637\u0631 \u0627\u0644\u0630\u0631\u0627\u0639 r = 300 \u0645\u0645<\/p>\n

\u0627\u0644\u062e\u0637\u0623 \u0627\u0644\u0632\u0627\u0648\u064a \u03b8_max = \u0394x \/ r = 0.5 \/ 300 = 0.00167 \u0631\u0627\u062f
\n= 0.00167 \u00d7 (180 \u00d7 60 \/ \u03c0) = 5.7 \u062f\u0642\u064a\u0642\u0629 \u0642\u0648\u0633\u064a\u0629 \u0643\u062d\u062f \u0623\u0642\u0635\u0649<\/span><\/p>\n

\u0645\u064a\u0632\u0627\u0646\u064a\u0629 \u0631\u062f \u0641\u0639\u0644 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 (40% \u0645\u0646 \u0625\u062c\u0645\u0627\u0644\u064a \u0627\u0644\u062e\u0637\u0623):
\n\u03b8_\u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u2265 5.7 \u00d7 0.40 = 2.3 \u062f\u0642\u064a\u0642\u0629 \u0642\u0648\u0633\u064a\u0629<\/p>\n

\u2192 \u064a\u062a\u0637\u0644\u0628 \u062e\u0644\u0648\u0635\u064b\u0627 \u0639\u0643\u0633\u064a\u064b\u0627 \u2264 2.3 \u062f\u0642\u064a\u0642\u0629 \u0642\u0648\u0633\u064a\u0629 \u0639\u0646\u062f \u0639\u0645\u0648\u062f \u0627\u0644\u0625\u062e\u0631\u0627\u062c
\n\u2192 P1 (\u22643\u2032) \u0647\u0627\u0645\u0634\u064a \u2014 \u0642\u062f \u064a\u062a\u062c\u0627\u0648\u0632 \u0627\u0644\u0645\u064a\u0632\u0627\u0646\u064a\u0629 \u0641\u064a \u0623\u0633\u0648\u0623 \u0627\u0644\u0623\u062d\u0648\u0627\u0644
\n\u2192 \u064a\u0648\u0641\u0631 P0 (\u22641\u2032) \u0647\u0627\u0645\u0634\u064b\u0627 \u0642\u062f\u0631\u0647 2.3 \u0636\u0639\u0641 \u2014 \u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0635\u062d\u064a\u062d\u0629
\n\u2192 \u064a\u0644\u063a\u064a \u0645\u0639\u064a\u0627\u0631 EP-AFH (\u22641\u2032) \u062e\u0637\u0648\u0629 \u062a\u062d\u062f\u064a\u062f \u0627\u0644\u062f\u0631\u062c\u0629<\/p><\/div>\n<\/div>\n

\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0645\u0635\u0646\u0639\u064a \u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u0643\u0648\u0631\u064a\u064a\u0646\u060c \u0633\u0644\u0633\u0644\u0629 EP-AFH \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u062f\u0642\u0629<\/a> \u064a\u064f\u0639\u062f \u0647\u0630\u0627 \u0627\u0644\u0645\u0639\u064a\u0627\u0631 \u0647\u0648 \u0627\u0644\u062a\u0648\u0635\u064a\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0644\u0645\u062d\u0648\u0631 \u062b\u064a\u062a\u0627. \u062a\u0623\u062a\u064a \u062c\u0645\u064a\u0639 \u0648\u062d\u062f\u0627\u062a EP-AFH \u0628\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0642\u064a\u0627\u0633\u064a\u0629 \u2264 1 \u062f\u0642\u064a\u0642\u0629 \u0642\u0648\u0633\u064a\u0629 - \u062f\u0648\u0646 \u0627\u0644\u062d\u0627\u062c\u0629 \u0625\u0644\u0649 \u0627\u062e\u062a\u064a\u0627\u0631 \u0631\u0645\u0632 \u0627\u0644\u062f\u0631\u062c\u0629\u060c \u0648\u0644\u0627 \u064a\u0648\u062c\u062f \u062a\u0628\u0627\u064a\u0646 \u0641\u064a \u0627\u0644\u0642\u064a\u0627\u0633 \u0628\u064a\u0646 \u0627\u0644\u0648\u062d\u062f\u0627\u062a \u0636\u0645\u0646 \u0646\u0637\u0627\u0642 \u0627\u0644\u062f\u0631\u062c\u0629. \u062a\u0624\u0643\u062f \u0634\u0647\u0627\u062f\u0629 \u0627\u0644\u062a\u0633\u0644\u064a\u0645 \u0627\u0644\u0642\u064a\u0645\u0629 \u0627\u0644\u0645\u0642\u0627\u0633\u0629 \u0644\u0643\u0644 \u0648\u062d\u062f\u0629. \u0623\u0645\u0627 \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0645\u062d\u0648\u0631 \u0627\u0644\u062a\u0645\u062f\u064a\u062f (\u0627\u0644\u0642\u0637\u0631\u064a)\u060c \u0641\u0625\u0646 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062f\u0642\u0629 \u0623\u0642\u0644 (\u062a\u0641\u0627\u0648\u062a \u00b11 \u0645\u0645 \u0639\u0646\u062f \u0637\u0631\u0641 \u0627\u0644\u0645\u0624\u062b\u0631)\u060c \u0648\u064a\u0643\u0648\u0646 P0 \u0623\u0648 P1 \u0645\u0646\u0627\u0633\u0628\u064b\u0627 \u062d\u0633\u0628 \u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u0630\u0631\u0627\u0639.<\/p>\n

\u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0648\u0627\u0646\u062d\u0631\u0627\u0641 \u062a\u062d\u062f\u064a\u062f \u0627\u0644\u0645\u0648\u0642\u0639 \u0627\u0644\u062d\u0631\u0627\u0631\u064a: <\/strong>
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<\/p>\n

\n

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\u064a\u0633\u062a\u062e\u062f\u0645 \u0646\u0638\u0627\u0645 \u0646\u0642\u0644 \u0627\u0644\u062d\u0627\u0648\u064a\u0627\u062a \u0627\u0644\u0645\u0648\u062d\u062f\u0629 \u0630\u0627\u062a \u0627\u0644\u0641\u062a\u062d\u0629 \u0627\u0644\u0623\u0645\u0627\u0645\u064a\u0629 (FOUP) \u062f\u0627\u062e\u0644 \u0645\u0635\u0627\u0646\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0643\u0648\u0631\u064a\u0629 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0646\u0642\u0644 \u0628\u0627\u0644\u0631\u0641\u0639 \u0627\u0644\u0639\u0644\u0648\u064a (OHT) \u0639\u0644\u0649 \u0642\u0636\u0628\u0627\u0646 \u0627\u0644\u0633\u0642\u0641 \u0643\u0648\u0633\u064a\u0644\u0629 \u0623\u0633\u0627\u0633\u064a\u0629 \u0644\u0646\u0642\u0644 \u0627\u0644\u062d\u0627\u0648\u064a\u0627\u062a \u0645\u0646 \u0627\u0644\u0645\u0635\u0646\u0639 \u0625\u0644\u0649 \u062d\u062c\u0631\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639\u060c \u0628\u064a\u0646\u0645\u0627 \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0645\u0648\u062c\u0647\u0629 \u0622\u0644\u064a\u064b\u0627 (AGVs) \u0639\u0644\u0649 \u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0623\u0631\u0636 \u0644\u0646\u0642\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0645\u0646 \u062d\u062c\u0631\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0625\u0644\u0649 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0623\u0642\u0644 \u0627\u0632\u062f\u062d\u0627\u0645\u064b\u0627. \u0648\u062a\u0639\u0645\u0644 \u0639\u0644\u0628 \u062a\u0631\u0648\u0633 \u0639\u062c\u0644\u0627\u062a \u0627\u0644\u0642\u064a\u0627\u062f\u0629 \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0645\u0648\u062c\u0647\u0629 \u0622\u0644\u064a\u064b\u0627 \u0639\u0644\u0649 \u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0623\u0631\u0636 \u0641\u064a \u0646\u0641\u0633 \u0628\u064a\u0626\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0627\u0644\u062a\u064a \u062a\u0639\u0645\u0644 \u0628\u0647\u0627 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629.<\/p>\n

\u062a\u062c\u0645\u0639 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0639\u0644\u0628\u0629 \u062a\u0631\u0648\u0633 \u0645\u0631\u0643\u0628\u0629 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0622\u0644\u064a\u0629 FOUP \u0628\u064a\u0646 \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0645\u0646 \u0627\u0644\u0648\u062d\u062f\u0627\u062a 2-3 \u0648\u0627\u0644\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u0645\u0631\u0643\u0628\u0629 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0622\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u0645\u0627\u062f\u0629 12: \u0645\u0632\u0627\u0645\u0646\u0629 \u0633\u0631\u0639\u0629 \u0627\u0644\u0642\u064a\u0627\u062f\u0629 \u0627\u0644\u062a\u0641\u0627\u0636\u0644\u064a\u0629 (\u0632\u0648\u062c \u0645\u062a\u0637\u0627\u0628\u0642\u060c \u0634\u0647\u0627\u062f\u0629 \u062a\u0628\u0627\u064a\u0646 \u0646\u0633\u0628\u0629 \u22640.01%)\u060c \u0636\u0648\u0636\u0627\u0621 \u062a\u0634\u063a\u064a\u0644 \u0645\u0646\u062e\u0641\u0636\u0629 (\u064a\u062c\u0628 \u0623\u0646 \u064a\u0643\u0648\u0646 \u0627\u0644\u0627\u0647\u062a\u0632\u0627\u0632 \u0627\u0644\u0635\u0648\u062a\u064a \u0627\u0644\u0630\u064a \u064a\u0645\u0643\u0646 \u0623\u0646 \u064a\u0632\u0639\u062c \u0645\u062d\u0627\u0630\u0627\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0627\u0644\u0642\u0631\u064a\u0628\u0629 \u0641\u064a \u0627\u0644\u062e\u0644\u062c\u0627\u0646 \u0627\u0644\u0645\u062c\u0627\u0648\u0631\u0629 \u0623\u0642\u0644 \u0645\u0646 55 \u062f\u064a\u0633\u064a\u0628\u0644 (A) \u0639\u0646\u062f \u062d\u062f\u0648\u062f \u0627\u0644\u062e\u0644\u062c\u0627\u0646)\u060c \u0648\u0628\u0646\u064a\u0629 \u0645\u062d\u0643\u0645\u0629 \u0627\u0644\u0625\u063a\u0644\u0627\u0642 \u0644\u0627 \u062a\u062d\u062a\u0627\u062c \u0625\u0644\u0649 \u0635\u064a\u0627\u0646\u0629.<\/p>\n

\u0627\u0644 \u0633\u0644\u0633\u0644\u0629 EP-KF\/KH \u062a\u062d\u062a \u0627\u0644\u063a\u0636\u0631\u0648\u0641<\/a> \u064a\u064f\u0639\u062f \u0647\u0630\u0627 \u0627\u0644\u0646\u0638\u0627\u0645 \u0645\u0646\u0627\u0633\u0628\u064b\u0627 \u0644\u0639\u062c\u0644\u0627\u062a \u0642\u064a\u0627\u062f\u0629 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0645\u0648\u062c\u0647\u0629 \u0622\u0644\u064a\u064b\u0627 (AGV) \u0641\u064a \u0645\u0635\u0627\u0646\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0643\u0648\u0631\u064a\u0629\u060c \u062d\u064a\u062b \u062a\u062d\u0627\u0641\u0638 \u0628\u064a\u0626\u0629 \u0627\u0644\u0645\u0635\u0646\u0639 \u0639\u0644\u0649 \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u062b\u0627\u0628\u062a\u0629 \u062a\u0628\u0644\u063a 20 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629\u060c \u0648\u0647\u064a \u0623\u0639\u0644\u0649 \u0628\u0643\u062b\u064a\u0631 \u0645\u0646 \u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0644\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u0627\u0644\u0645\u062d\u062f\u062f\u0629 \u0645\u0646 \u0642\u0628\u0644 KF\/KH (0 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629). \u064a\u064f\u0646\u062a\u062c \u062a\u0635\u0645\u064a\u0645 \u062a\u0644\u0627\u0645\u0633 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u062d\u0644\u0632\u0648\u0646\u064a\u0629 \u0636\u0648\u0636\u0627\u0621 \u062a\u0634\u063a\u064a\u0644 \u0623\u0642\u0644 \u0628\u0645\u0642\u062f\u0627\u0631 6-8 \u062f\u064a\u0633\u064a\u0628\u0644 (A) \u062a\u0642\u0631\u064a\u0628\u064b\u0627 \u0645\u0646 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0643\u0648\u0643\u0628\u064a\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0639\u0646\u062f \u0639\u0632\u0645 \u062f\u0648\u0631\u0627\u0646 \u0645\u0643\u0627\u0641\u0626\u060c \u0648\u0647\u0648 \u0623\u0645\u0631 \u0628\u0627\u0644\u063a \u0627\u0644\u0623\u0647\u0645\u064a\u0629 \u0641\u064a \u0628\u064a\u0626\u0629 \u0627\u0644\u0645\u0635\u0646\u0639 \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u0635\u0648\u062a. \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0645\u0648\u062c\u0647\u0629 \u0622\u0644\u064a\u064b\u0627 (AGV) \u0645\u0646 \u0646\u0648\u0639 FOUP\u060c \u064a\u064f\u0631\u062c\u0649 \u062a\u062d\u062f\u064a\u062f \u062e\u064a\u0627\u0631 \u0645\u064f\u0632\u064a\u0651\u062a \u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 (PFPE) \u0648\u0623\u062e\u062a\u0627\u0645 \u0639\u0645\u0648\u062f \u0627\u0644\u062f\u0648\u0631\u0627\u0646 \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 \u0645\u0627\u062f\u0629 FFKM\u060c \u0628\u0627\u0644\u0625\u0636\u0627\u0641\u0629 \u0625\u0644\u0649 \u0634\u0647\u0627\u062f\u0629 \u0645\u0632\u0627\u0645\u0646\u0629 \u0627\u0644\u0633\u0631\u0639\u0629 \u0644\u0644\u0632\u0648\u062c \u0627\u0644\u0645\u062a\u0637\u0627\u0628\u0642.<\/p>\n

\"\u0643\u0648\u0631\u064a\u0627<\/p>\n

\n\n\n\n\n\n\n\n\n\n\n
\u0645\u062d\u0631\u0643 \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/th>\n\u0631\u062f \u0641\u0639\u0644 \u0639\u0643\u0633\u064a \u0645\u0637\u0644\u0648\u0628.<\/th>\n\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629<\/th>\n\u0633\u0644\u0633\u0644\u0629 \u0643\u0648\u0631\u064a\u0627 \u0625\u064a\u0641\u0631 \u0628\u0627\u0648\u0631<\/th>\n<\/tr>\n<\/thead>\n
\u0645\u0639\u0627\u0644\u062c \u0627\u0644\u0648\u064a\u0641\u0631 \u0627\u0644\u0645\u062d\u0648\u0631 \u03b8 (ISO 4\u20135)<\/td>\n\u22641 \u062f\u0642\u064a\u0642\u0629 \u0642\u0648\u0633\u064a\u0629<\/td>\nPFPE + FFKM + \u0645\u0624\u0643\u0633\u062f<\/td>\nEP-AFH<\/a> + \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u063a\u0631\u0641\u0629 \u0646\u0638\u064a\u0641\u0629<\/td>\n<\/tr>\n
\u0645\u062d\u0648\u0631 \u062a\u0645\u062f\u064a\u062f \u0645\u0639\u0627\u0644\u062c \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a (ISO 4-5)<\/td>\n\u22643 \u062f\u0642\u0627\u0626\u0642 \u0642\u0648\u0633\u064a\u0629<\/td>\nPFPE + FFKM<\/td>\nEP-AB P0\/P1<\/a> + \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u063a\u0631\u0641\u0629 \u0646\u0638\u064a\u0641\u0629<\/td>\n<\/tr>\n
\u0639\u062c\u0644\u0629 \u0642\u064a\u0627\u062f\u0629 \u0645\u0631\u0643\u0628\u0629 FOUP AGV (ISO 6\u20137)<\/td>\n\u0646\u0633\u0628\u0629 \u0627\u0644\u062a\u0637\u0627\u0628\u0642 \u22640.01%<\/td>\n\u062e\u062a\u0645 PFPE + FKM<\/td>\n\u0632\u0648\u062c \u0645\u062a\u0637\u0627\u0628\u0642 EP-KF<\/a> + \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u063a\u0631\u0641\u0629 \u0646\u0638\u064a\u0641\u0629<\/td>\n<\/tr>\n
\u062f\u0648\u0631\u0627\u0646 \u0631\u0623\u0633 \u062c\u0647\u0627\u0632 \u0627\u0644\u062a\u0644\u0645\u064a\u0639 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a (ISO 6)<\/td>\n\u22641 \u062f\u0642\u064a\u0642\u0629 \u0642\u0648\u0633\u064a\u0629<\/td>\nPFPE + FFKM + \u0645\u0624\u0643\u0633\u062f<\/td>\n\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u063a\u0631\u0641\u0629 \u0646\u0638\u064a\u0641\u0629 EP-AFH +<\/td>\n<\/tr>\n
\u0645\u0631\u062d\u0644\u0629 \u0645\u062d\u0627\u0630\u0627\u0629 \u0645\u0646\u0641\u0630 \u0627\u0644\u062a\u062d\u0645\u064a\u0644 (ISO 5)<\/td>\n\u22641 \u062f\u0642\u064a\u0642\u0629 \u0642\u0648\u0633\u064a\u0629<\/td>\nPFPE + FFKM + \u0645\u0624\u0643\u0633\u062f<\/td>\nEP-ABR P0<\/a> \u0623\u0648 EP-AFH + \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u063a\u0631\u0641\u0629 \u0646\u0638\u064a\u0641\u0629<\/td>\n<\/tr>\n
\u062f\u0639\u0645 \u0627\u0644\u0645\u0635\u0646\u0639 \/ \u0645\u062d\u0631\u0643\u0627\u062a \u0627\u0644\u0623\u062f\u0648\u0627\u062a \u0627\u0644\u0645\u0633\u0627\u0639\u062f\u0629 (ISO 8)<\/td>\n\u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u062b\u0627\u0646\u064a \u0643\u0627\u0641\u064d<\/td>\n\u0627\u0644\u0645\u062e\u0632\u0648\u0646 \u0627\u0644\u0642\u064a\u0627\u0633\u064a<\/td>\n\u0645\u0639\u064a\u0627\u0631 EP-AB P2 \u2014 \u0644\u0627 \u064a\u0648\u062c\u062f \u0637\u0644\u0628 \u062e\u0627\u0635<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n

<\/p>\n

\n

\u062a\u0635\u0646\u064a\u0639 \u0630\u0627\u0643\u0631\u0629 \u0627\u0644\u0648\u0635\u0648\u0644 \u0627\u0644\u0639\u0634\u0648\u0627\u0626\u064a \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 (MRAM) \u0648\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0627 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0642\u0635\u0648\u0649 (EUV) - \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0628\u0646\u0627\u0621 \u063a\u064a\u0631 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a<\/h2>\n

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\"\u0631\u0633\u0645<\/p>\n

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\n
\u0645\u0642\u0627\u0631\u0646\u0629 \u0627\u0644\u0646\u0641\u0627\u0630\u064a\u0629 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 - \u0645\u0648\u0627\u062f \u063a\u0644\u0627\u0641 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633<\/div>\n
\n
\n
\u0627\u0644\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0643\u0631\u0628\u0648\u0646\u064a \u0627\u0644\u0642\u064a\u0627\u0633\u064a (\u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a \u0627\u0644\u062d\u062f\u064a\u062f\u064a)<\/span>
\n\u03bc\u1d63 \u2248 100\u20131,000 \u2014 \u063a\u064a\u0631 \u0645\u0646\u0627\u0633\u0628 \u0644\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u0645\u062c\u0627\u0644\u0627\u062a \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
\u0627\u0644\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0633\u0628\u0627\u0626\u0643\u064a (\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0645\u062d\u0627\u0645\u0644)<\/span>
\n\u03bc\u1d63 \u2248 50\u2013200 \u2014 \u063a\u064a\u0631 \u0645\u0646\u0627\u0633\u0628 \u0644\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u0645\u062c\u0627\u0644 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
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\n\u03bc\u1d63 \u2248 1.003 \u2014 \u0645\u0642\u0628\u0648\u0644 \u0644\u0645\u0639\u0638\u0645 \u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u062a\u0635\u0646\u064a\u0639<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 6061-T6<\/span>
\n\u03bc\u1d63 \u2248 1.000006 \u2014 \u0628\u0635\u0645\u0629 \u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a\u0629 \u0636\u0626\u064a\u0644\u0629<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n<\/div>\n

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<\/p>\n

\n

\u0633\u0644\u0633\u0644\u0629 \u0627\u0644\u062a\u0648\u0631\u064a\u062f \u0628\u064a\u0646 \u0633\u0627\u0645\u0633\u0648\u0646\u062c \u0648\u0625\u0633 \u0643\u064a\u0647 \u0647\u0627\u064a\u0646\u0643\u0633 - \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062a\u0648\u062b\u064a\u0642 \u0644\u062a\u0623\u0647\u064a\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a<\/h2>\n

\u064a\u062a\u0639\u064a\u0646 \u0639\u0644\u0649 \u0645\u0648\u0631\u062f\u064a \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0643\u0648\u0631\u064a\u064a\u0646 \u0627\u0644\u0630\u064a\u0646 \u064a\u062a\u0642\u062f\u0645\u0648\u0646 \u0628\u0639\u0637\u0627\u0621\u0627\u062a \u0625\u0644\u0649 \u0633\u0627\u0645\u0633\u0648\u0646\u062c (\u0628\u064a\u0648\u0646\u063a\u062a\u0627\u064a\u0643\u060c \u0647\u0648\u0627\u0633\u0648\u0646\u063a\u060c \u062c\u064a\u0647\u064a\u0648\u0646\u063a) \u0648\u0625\u0633 \u0643\u064a\u0647 \u0647\u0627\u064a\u0646\u0643\u0633 (\u062a\u0634\u064a\u0648\u0646\u063a\u062c\u0648\u060c \u0625\u064a\u062a\u0634\u0648\u0646) \u062a\u0623\u0647\u064a\u0644 \u0645\u0639\u062f\u0627\u062a\u0647\u0645 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0639\u0645\u0644\u064a\u0629 \u0642\u0628\u0648\u0644 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0645\u0631\u0627\u062d\u0644. \u0639\u0627\u062f\u0629\u064b \u0645\u0627 \u064a\u064f\u0637\u0644\u0628 \u062a\u0642\u062f\u064a\u0645 \u0648\u062b\u0627\u0626\u0642 \u062a\u0641\u0635\u064a\u0644\u064a\u0629 \u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0645\u062d\u0631\u0643\u0627\u062a - \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643 \u0639\u0644\u0628 \u0627\u0644\u062a\u0631\u0648\u0633 - \u0641\u064a \u0645\u0631\u062d\u0644\u0629 \u062a\u0623\u0647\u064a\u0644 \u0627\u0644\u062a\u0631\u0643\u064a\u0628 (IQ). \u062a\u062e\u062a\u0644\u0641 \u062d\u0632\u0645\u0629 \u0627\u0644\u0648\u062b\u0627\u0626\u0642 \u0627\u0644\u0645\u0637\u0644\u0648\u0628\u0629 \u0628\u0627\u062e\u062a\u0644\u0627\u0641 \u0641\u0626\u0629 \u063a\u0631\u0641\u0629 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0648\u0646\u0648\u0639 \u0627\u0644\u0645\u0639\u062f\u0627\u062a\u060c \u0648\u0644\u0643\u0646 \u062a\u062a\u0636\u0645\u0646 \u0627\u0644\u062d\u0632\u0645\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0645\u062d\u0631\u0643\u0627\u062a \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0641\u064a \u0645\u0646\u0627\u0637\u0642 ISO \u0645\u0646 \u0627\u0644\u0641\u0626\u0629 4-5 \u0627\u0644\u0639\u0646\u0627\u0635\u0631 \u0627\u0644\u062a\u0627\u0644\u064a\u0629.<\/p>\n

\n
\n
\u2460 \u0634\u0647\u0627\u062f\u0629 \u0645\u0648\u0627\u062f \u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629<\/div>\n

\u0625\u0642\u0631\u0627\u0631 \u0643\u062a\u0627\u0628\u064a \u0645\u0646 \u0627\u0644\u0634\u0631\u0643\u0629 \u0627\u0644\u0645\u0635\u0646\u0639\u0629 \u064a\u0641\u064a\u062f \u0628\u0623\u0646 \u062c\u0645\u064a\u0639 \u0627\u0644\u0645\u0648\u0627\u062f (\u0627\u0644\u0647\u064a\u0643\u0644\u060c \u0648\u0627\u0644\u062d\u0634\u0648\u0627\u062a\u060c \u0648\u0645\u0648\u0627\u062f \u0627\u0644\u062a\u0634\u062d\u064a\u0645) \u0645\u0637\u0627\u0628\u0642\u0629 \u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u0627\u0644\u0645\u0635\u0646\u0639. \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062a\u0634\u062d\u064a\u0645 \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 \u0645\u0627\u062f\u0629 PFPE: \u064a\u064f\u0631\u062c\u0649 \u0630\u0643\u0631 \u062f\u0631\u062c\u0629 PFPE \u0648\u0627\u0633\u0645 \u0627\u0644\u0645\u0648\u0631\u062f. \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u062d\u0634\u0648\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 \u0645\u0627\u062f\u0629 FFKM: \u064a\u064f\u0631\u062c\u0649 \u062a\u0623\u0643\u064a\u062f \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0628\u0648\u0644\u064a\u0645\u0631 \u0627\u0644\u0641\u0644\u0648\u0631\u0648\u0643\u0631\u0628\u0648\u0646. \u062a\u064f\u0642\u062f\u0645 \u0634\u0631\u0643\u0629 Korea Ever-Power \u0647\u0630\u0627 \u0627\u0644\u0625\u0642\u0631\u0627\u0631 \u0643\u062a\u0627\u0628\u064a\u064b\u0627 \u0628\u0627\u0644\u0644\u063a\u0629 \u0627\u0644\u0643\u0648\u0631\u064a\u0629.<\/p>\n<\/div>\n

\n
\u0662- \u0628\u064a\u0627\u0646\u0627\u062a \u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0646\u0628\u0639\u0627\u062b \u0627\u0644\u063a\u0627\u0632\u0627\u062a<\/div>\n

\u0646\u062a\u0627\u0626\u062c \u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0646\u0628\u0639\u0627\u062b \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u0648\u0641\u0642\u064b\u0627 \u0644\u0645\u0639\u064a\u0627\u0631 ASTM E1603 \u0623\u0648 \u0645\u0627 \u064a\u0639\u0627\u062f\u0644\u0647 \u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062a\u0634\u062d\u064a\u0645 \u0648\u0645\u0648\u0627\u062f \u0645\u0646\u0639 \u0627\u0644\u062a\u0633\u0631\u0628 \u0639\u0646\u062f \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 20-25 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629. \u064a\u0648\u0636\u062d \u0647\u0630\u0627 \u0627\u0644\u0627\u062e\u062a\u0628\u0627\u0631 \u0625\u062c\u0645\u0627\u0644\u064a \u0641\u0642\u062f\u0627\u0646 \u0627\u0644\u0643\u062a\u0644\u0629 (TML) \u0648\u0643\u0645\u064a\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631\u0629 \u0627\u0644\u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u062a\u0643\u062b\u064a\u0641 (CVCM). \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0634\u062d\u0645 PFPE\u060c \u062a\u0643\u0648\u0646 \u0647\u0630\u0647 \u0627\u0644\u0642\u064a\u0645 \u0639\u0627\u062f\u0629\u064b \u0623\u0642\u0644 \u0645\u0646 0.01% TML \u0648\u0623\u0642\u0644 \u0645\u0646 0.001% CVCM\u060c \u0648\u0647\u064a \u0636\u0645\u0646 \u0627\u0644\u062d\u062f\u0648\u062f \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0644\u0645\u0635\u0627\u0646\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n<\/div>\n

\n
\u2462 \u0634\u0647\u0627\u062f\u0629 \u0642\u064a\u0627\u0633 \u0631\u062f \u0627\u0644\u0641\u0639\u0644 \u0627\u0644\u0639\u0643\u0633\u064a<\/div>\n

\u0642\u064a\u0645\u0629 \u0627\u0644\u062e\u0644\u0648\u0635 \u0627\u0644\u0645\u0642\u0627\u0633\u0629 \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u0627\u0644\u0648\u062d\u062f\u0629 (\u0648\u0644\u064a\u0633 \u0645\u062c\u0631\u062f \u0628\u064a\u0627\u0646 \u0645\u0637\u0627\u0628\u0642\u0629 \u0644\u0644\u062f\u0631\u062c\u0629). \u062a\u0648\u0641\u0631 \u0634\u0631\u0643\u0629 \u0625\u064a\u0641\u0631-\u0628\u0627\u0648\u0631 \u0627\u0644\u0643\u0648\u0631\u064a\u0629 \u0647\u0630\u0647 \u0627\u0644\u0642\u064a\u0645\u0629 \u0644\u062c\u0645\u064a\u0639 \u0648\u062d\u062f\u0627\u062a EP-AFH \u0648\u0644\u0648\u062d\u062f\u0627\u062a EP-AB\/AF \u0639\u0644\u0649 \u0627\u0644\u062f\u0631\u062c\u062a\u064a\u0646 P0 \u0648P1. \u0648\u0647\u064a \u0645\u0637\u0644\u0648\u0628\u0629 \u0644\u062a\u0648\u062b\u064a\u0642 IQ \u0644\u0645\u062d\u0627\u0648\u0631 \u0627\u0644\u0642\u064a\u0627\u062f\u0629 \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u0645\u0648\u0636\u0639.<\/p>\n<\/div>\n

\n
\u2463 \u0625\u0642\u0631\u0627\u0631 \u0627\u0644\u0627\u0645\u062a\u062b\u0627\u0644 \u0644\u062a\u0648\u062c\u064a\u0647\u0627\u062a RoHS \u0648 REACH<\/div>\n

\u062a\u0623\u0643\u064a\u062f \u0643\u062a\u0627\u0628\u064a \u0628\u0623\u0646 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0644\u0627 \u062a\u062d\u062a\u0648\u064a \u0639\u0644\u0649 \u0645\u0648\u0627\u062f \u0645\u062d\u0638\u0648\u0631\u0629 \u0628\u0645\u0648\u062c\u0628 \u062a\u0648\u062c\u064a\u0647\u0627\u062a \u0627\u0644\u0627\u062a\u062d\u0627\u062f \u0627\u0644\u0623\u0648\u0631\u0648\u0628\u064a RoHS 2 (2011\/65\/EU recast) \u0648 REACH (EC 1907\/2006) \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u0642\u0648\u0627\u0626\u0645 \u0627\u0644\u0645\u0648\u0627\u062f \u0634\u062f\u064a\u062f\u0629 \u0627\u0644\u062e\u0637\u0648\u0631\u0629. \u0647\u0630\u0627 \u0627\u0644\u062a\u0623\u0643\u064a\u062f \u0645\u0637\u0644\u0648\u0628 \u0644\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u0628\u0627\u0639\u0629 \u0644\u0634\u0631\u0643\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u062c\u0646\u0633\u064a\u0627\u062a. \u062a\u0648\u0641\u0631 \u0634\u0631\u0643\u0629 Korea Ever-Power \u0647\u0630\u0627 \u0627\u0644\u062a\u0623\u0643\u064a\u062f \u0643\u0648\u062b\u064a\u0642\u0629 \u0642\u064a\u0627\u0633\u064a\u0629 \u0645\u0639 \u0637\u0644\u0628\u0627\u062a \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0627\u0644\u0646\u0638\u064a\u0641\u0629.<\/p>\n<\/div>\n

\n
\u2464 \u0631\u0633\u0645 \u062b\u0644\u0627\u062b\u064a \u0627\u0644\u0623\u0628\u0639\u0627\u062f (\u0645\u0644\u0641 PDF\u060c \u0628\u0627\u0644\u0644\u063a\u062a\u064a\u0646 \u0627\u0644\u0643\u0648\u0631\u064a\u0629 \u0648\u0627\u0644\u0625\u0646\u062c\u0644\u064a\u0632\u064a\u0629)<\/div>\n

\u0631\u0633\u0645\u064c \u0643\u0627\u0645\u0644 \u0627\u0644\u0623\u0628\u0639\u0627\u062f \u0645\u0639 \u062a\u062d\u062f\u064a\u062f \u0627\u0644\u062a\u0641\u0627\u0648\u062a\u0627\u062a \u0627\u0644\u0645\u0633\u0645\u0648\u062d \u0628\u0647\u0627 \u0644\u062a\u0623\u0647\u064a\u0644 \u0627\u0644\u062a\u0631\u0643\u064a\u0628. \u0645\u0637\u0644\u0648\u0628\u064c \u0644\u062a\u0648\u062b\u064a\u0642 \u0628\u0631\u0648\u062a\u0648\u0643\u0648\u0644 IQ\/OQ. \u062a\u064f\u0642\u062f\u0651\u0645 \u0634\u0631\u0643\u0629 Korea Ever-Power \u0647\u0630\u0627 \u0627\u0644\u0631\u0633\u0645 \u062e\u0644\u0627\u0644 \u062b\u0644\u0627\u062b\u0629 \u0623\u064a\u0627\u0645 \u0639\u0645\u0644 \u0645\u0646 \u062a\u0627\u0631\u064a\u062e \u062a\u0642\u062f\u064a\u0645 \u0627\u0644\u0637\u0644\u0628 \u0644\u0623\u064a \u0637\u0631\u0627\u0632 \u0645\u0646 \u0633\u0644\u0633\u0644\u0629 EP.<\/p>\n<\/div>\n

\n
\u2465 \u0634\u0647\u0627\u062f\u0629 \u0646\u0633\u0628\u0629 \u0627\u0644\u0632\u0648\u062c \u0627\u0644\u0645\u062a\u0637\u0627\u0628\u0642 (\u062e\u0627\u0635\u0629 \u0628\u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0630\u0627\u062a\u064a\u0629 \u0627\u0644\u0642\u064a\u0627\u062f\u0629)<\/div>\n

\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0645\u0631\u0643\u0628\u0627\u062a FOUP AGV \u0630\u0627\u062a \u0627\u0644\u062f\u0641\u0639 \u0627\u0644\u062a\u0641\u0627\u0636\u0644\u064a: \u0634\u0647\u0627\u062f\u0629 \u062a\u0628\u0627\u064a\u0646 \u0646\u0633\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0644\u0643\u0644\u0627 \u0639\u0644\u0628\u062a\u064a \u062a\u0631\u0648\u0633 \u0627\u0644\u0639\u062c\u0644\u0627\u062a \u0627\u0644\u062f\u0627\u0641\u0639\u0629\u060c \u062a\u0624\u0643\u062f \u0623\u0646 \u0641\u0631\u0642 \u0627\u0644\u0646\u0633\u0628\u0629 \u0628\u064a\u0646\u0647\u0645\u0627 \u0644\u0627 \u064a\u062a\u062c\u0627\u0648\u0632 0.01%. \u062a\u0648\u0641\u0631 \u0634\u0631\u0643\u0629 Korea Ever-Power \u0647\u0630\u0647 \u0627\u0644\u0634\u0647\u0627\u062f\u0629 \u0643\u062e\u064a\u0627\u0631 \u0642\u064a\u0627\u0633\u064a \u0639\u0646\u062f \u0637\u0644\u0628 \u0645\u0631\u0643\u0628\u0627\u062a AGV \u0630\u0627\u062a \u0632\u0648\u062c \u0645\u062a\u0637\u0627\u0628\u0642.<\/p>\n<\/div>\n<\/div>\n

\u062a\u0648\u0642\u064a\u062a \u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0634\u0631\u0627\u0621 \u0644\u0645\u0634\u0627\u0631\u064a\u0639 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u0635\u0627\u0646\u0639 \u0627\u0644\u0643\u0648\u0631\u064a\u0629: <\/strong>
\n\u062a\u0633\u062a\u063a\u0631\u0642 \u062f\u0648\u0631\u0627\u062a \u062a\u0623\u0647\u064a\u0644 \u0645\u0639\u062f\u0627\u062a \u0633\u0627\u0645\u0633\u0648\u0646\u062c \u0648\u0625\u0633 \u0643\u064a\u0647 \u0647\u0627\u064a\u0646\u0643\u0633 \u0639\u0627\u062f\u0629\u064b \u0645\u0646 6 \u0625\u0644\u0649 12 \u0634\u0647\u0631\u064b\u0627\u060c \u0628\u062f\u0621\u064b\u0627 \u0645\u0646 \u0627\u0639\u062a\u0645\u0627\u062f \u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0648\u062d\u062a\u0649 \u0642\u0628\u0648\u0644\u0647\u0627 \u0641\u064a \u0627\u0644\u0645\u0635\u0646\u0639. \u064a\u064f\u0634\u062a\u0631\u0637 \u062a\u0642\u062f\u064a\u0645 \u062d\u0632\u0645\u0629 \u0648\u062b\u0627\u0626\u0642 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0641\u064a \u0645\u0631\u062d\u0644\u0629 \u0627\u0644\u062a\u0623\u0647\u064a\u0644 \u0627\u0644\u0623\u0648\u0644\u064a (IQ)\u060c \u0623\u064a \u0628\u0639\u062f \u0645\u0631\u0648\u0631 4 \u0625\u0644\u0649 6 \u0623\u0634\u0647\u0631 \u0645\u0646 \u0628\u062f\u0621 \u062f\u0648\u0631\u0629 \u0627\u0644\u062a\u0623\u0647\u064a\u0644. \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0639\u0644\u0628 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u0645\u064f\u062e\u0635\u0635\u0629 \u0644\u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 (PFPE + FFKM\u060c \u0641\u062a\u0631\u0629 \u062a\u0648\u0631\u064a\u062f \u0645\u0646 2 \u0625\u0644\u0649 4 \u0623\u0633\u0627\u0628\u064a\u0639)\u060c \u064a\u062c\u0628 \u062a\u0642\u062f\u064a\u0645 \u0627\u0644\u0637\u0644\u0628 \u0642\u0628\u0644 10 \u0623\u0633\u0627\u0628\u064a\u0639 \u0639\u0644\u0649 \u0627\u0644\u0623\u0642\u0644 \u0645\u0646 \u0645\u0648\u0639\u062f \u062a\u0642\u062f\u064a\u0645 \u0648\u062b\u0627\u0626\u0642 \u0627\u0644\u062a\u0623\u0647\u064a\u0644 \u0627\u0644\u0623\u0648\u0644\u064a. \u064a\u064f\u0631\u062c\u0649 \u0627\u0644\u062a\u0648\u0627\u0635\u0644 \u0645\u0639 \u0634\u0631\u0643\u0629 Korea Ever-Power \u0641\u064a \u0645\u0631\u062d\u0644\u0629 \u0627\u0644\u062a\u0635\u0645\u064a\u0645 - \u0648\u0644\u064a\u0633 \u0641\u064a \u0645\u0631\u062d\u0644\u0629 \u0627\u0644\u0634\u0631\u0627\u0621 - \u0644\u0644\u062a\u0623\u0643\u062f \u0645\u0646 \u062a\u0648\u0641\u0631 \u0627\u0644\u0648\u062b\u0627\u0626\u0642 \u0648\u0641\u062a\u0631\u0629 \u0627\u0644\u062a\u0648\u0631\u064a\u062f \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0648\u0641\u0626\u0629 \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0644\u062f\u064a\u0643\u0645.<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\u062d\u0633\u0627\u0628 \u0645\u064a\u0632\u0627\u0646\u064a\u0629 \u0627\u0646\u0628\u0639\u0627\u062b \u0627\u0644\u063a\u0627\u0632\u0627\u062a - \u0643\u064a\u0641\u064a\u0629 \u062a\u062d\u062f\u064a\u062f \u0645\u0627 \u0625\u0630\u0627 \u0643\u0627\u0646 \u0627\u0644\u0634\u062d\u0645 \u0627\u0644\u0642\u064a\u0627\u0633\u064a \u0623\u0648 \u0634\u062d\u0645 PFPE \u0645\u0637\u0644\u0648\u0628\u064b\u0627<\/h2>\n

\u064a\u0639\u062a\u0645\u062f \u0627\u062e\u062a\u064a\u0627\u0631 \u0646\u0648\u0639 \u0627\u0644\u0634\u062d\u0645 \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u060c \u0633\u0648\u0627\u0621\u064b \u0643\u0627\u0646 \u0634\u062d\u0645\u064b\u0627 \u0639\u0627\u062f\u064a\u064b\u0627 \u0645\u063a\u0644\u0642\u064b\u0627 \u0623\u0648 \u0645\u0627\u062f\u0629 \u062a\u0634\u062d\u064a\u0645 PFPE \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0641\u064a \u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641\u060c \u0639\u0644\u0649 \u0643\u0645\u064a\u0629 \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u0627\u0644\u0645\u0646\u0628\u0639\u062b\u0629 \u0645\u0646 \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0625\u0644\u0649 \u0647\u0648\u0627\u0621 \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641\u060c \u0648\u0645\u062f\u0649 \u0642\u0631\u0628\u0647\u0627 \u0645\u0646 \u0623\u0633\u0637\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u0645\u0643\u0634\u0648\u0641\u0629. \u064a\u064f\u0645\u0643\u0651\u0646 \u0623\u0633\u0644\u0648\u0628 \u0627\u0644\u062d\u0633\u0627\u0628 \u0627\u0644\u062a\u0627\u0644\u064a \u0645\u0648\u0631\u062f\u064a \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0643\u0648\u0631\u064a\u064a\u0646 \u0645\u0646 \u0627\u062a\u062e\u0627\u0630 \u0647\u0630\u0627 \u0627\u0644\u0642\u0631\u0627\u0631 \u0643\u0645\u064a\u064b\u0627\u060c \u0628\u062f\u0644\u064b\u0627 \u0645\u0646 \u0627\u0644\u0627\u0639\u062a\u0645\u0627\u062f \u0639\u0644\u0649 \u062e\u064a\u0627\u0631 \u0627\u0641\u062a\u0631\u0627\u0636\u064a \u0645\u062a\u062d\u0641\u0638 \u0642\u062f \u064a\u064f\u0636\u064a\u0641 \u062a\u0643\u0627\u0644\u064a\u0641 \u063a\u064a\u0631 \u0636\u0631\u0648\u0631\u064a\u0629.<\/p>\n

\n

\u0645\u064a\u0632\u0627\u0646\u064a\u0629 \u0627\u0644\u062a\u0644\u0648\u062b \u0627\u0644\u0646\u0627\u062a\u062c \u0639\u0646 \u0627\u0646\u0628\u0639\u0627\u062b \u0627\u0644\u063a\u0627\u0632\u0627\u062a - \u0646\u0645\u0648\u0630\u062c \u0645\u0628\u0633\u0637<\/p>\n

\u0645\u0639\u062f\u0644 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0639\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 D (\u0646\u0627\u0646\u0648\u063a\u0631\u0627\u0645\/\u0633\u0645\u00b2\/\u0633\u0627\u0639\u0629) \u0645\u0646 \u0639\u0644\u0628\u0629 \u062a\u0631\u0648\u0633 \u0648\u0627\u062d\u062f\u0629:<\/p>\n

D \u2248 P_vap \u00d7 M_grease \u00d7 k_geom \/ (R \u00d7 T)<\/p>\n

\u0623\u064a\u0646:
\nP_vap = \u0636\u063a\u0637 \u0628\u062e\u0627\u0631 \u0632\u064a\u062a \u0627\u0644\u062a\u0634\u062d\u064a\u0645 \u0627\u0644\u0623\u0633\u0627\u0633\u064a \u0639\u0646\u062f 20 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 (\u0628\u0627\u0633\u0643\u0627\u0644)
\n\u0645\u0633\u0627\u062d\u0629 \u0633\u0637\u062d \u0627\u0644\u0634\u062d\u0645 \u0627\u0644\u0645\u0639\u0631\u0636\u0629 (\u0633\u0645\u00b2)
\nk_geom = \u0627\u0644\u0639\u0627\u0645\u0644 \u0627\u0644\u0647\u0646\u062f\u0633\u064a (\u064a\u0639\u062a\u0645\u062f \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u0627\u0641\u0629 \u0648\u0627\u0644\u0632\u0627\u0648\u064a\u0629\u060c \u0645\u0646 ~10\u207b\u2075 \u0625\u0644\u0649 10\u207b\u00b3)
\nR\u060c T = \u062b\u0627\u0628\u062a \u0627\u0644\u063a\u0627\u0632\u060c \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629<\/p>\n

\u0632\u064a\u062a \u0645\u0639\u062f\u0646\u064a PAO (\u0642\u064a\u0627\u0633\u064a): \u0636\u063a\u0637 \u0627\u0644\u0628\u062e\u0627\u0631 \u2248 10\u207b\u00b3 \u0628\u0627\u0633\u0643\u0627\u0644
\n\u2192 D \u2248 0.05\u20130.5 \u0646\u0627\u0646\u0648\u063a\u0631\u0627\u0645 \/ \u0633\u0645\u00b2 \/ \u0633\u0627\u0639\u0629 \u0639\u0644\u0649 \u0645\u0633\u0627\u0641\u0629 300 \u0645\u0645
\n\u2192 \u062e\u0644\u0627\u0644 24 \u0633\u0627\u0639\u0629: \u062a\u0631\u0627\u0643\u0645 \u0645\u0646 1.2 \u0625\u0644\u0649 12 \u0646\u0627\u0646\u0648\u063a\u0631\u0627\u0645\/\u0633\u0645\u00b2 \u0639\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u2190 \u064a\u0641\u0634\u0644 \u0641\u064a \u0627\u062e\u062a\u0628\u0627\u0631 ISO 5<\/p>\n

PFPE (\u062f\u0631\u062c\u0629 \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0627\u0644\u0646\u0638\u064a\u0641\u0629): \u0636\u063a\u0637 \u0627\u0644\u0628\u062e\u0627\u0631 \u2248 10\u207b\u00b9\u2070 \u0628\u0627\u0633\u0643\u0627\u0644
\n\u2192 D < 10\u207b\u2077 \u0646\u0627\u0646\u0648\u063a\u0631\u0627\u0645\/\u0633\u0645\u00b2\/\u0633\u0627\u0639\u0629 \u2014 \u0623\u0642\u0644 \u0628\u0633\u0628\u0639 \u0645\u0631\u0627\u062a\u0628 \u0645\u0646 \u062d\u064a\u062b \u0627\u0644\u062d\u062c\u0645
\n\u2192 \u063a\u064a\u0631 \u0642\u0627\u0628\u0644 \u0644\u0644\u0642\u064a\u0627\u0633 \u0628\u0627\u0644\u0637\u0631\u0642 \u0627\u0644\u062a\u062d\u0644\u064a\u0644\u064a\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u2713<\/p><\/div>\n<\/div>\n

\u062a\u064f\u0638\u0647\u0631 \u0627\u0644\u062d\u0633\u0627\u0628\u0627\u062a \u0633\u0628\u0628 \u0636\u0631\u0648\u0631\u0629 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0634\u062d\u0645 PFPE\u060c \u0648\u0644\u064a\u0633 \u0645\u062c\u0631\u062f \u062a\u0641\u0636\u064a\u0644\u0647\u060c \u0641\u064a \u0623\u064a \u0639\u0644\u0628\u0629 \u062a\u0631\u0648\u0633 \u062a\u0642\u0639 \u0636\u0645\u0646 \u0645\u062c\u0627\u0644 \u0631\u0624\u064a\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u0645\u0643\u0634\u0648\u0641\u0629: \u0625\u0630 \u0623\u0646 \u0636\u063a\u0637 \u0628\u062e\u0627\u0631 \u0627\u0644\u0634\u062d\u0645 \u0627\u0644\u0642\u064a\u0627\u0633\u064a \u0623\u0639\u0644\u0649 \u0628\u0633\u0628\u0639\u0629 \u0645\u0631\u0627\u062a\u0628 \u0645\u0646 \u0636\u063a\u0637 \u0628\u062e\u0627\u0631 \u0634\u062d\u0645 PFPE. \u0648\u0644\u0627 \u064a\u064f\u0645\u0643\u0646 \u0644\u0623\u064a \u0639\u0627\u0645\u0644 \u0647\u0646\u062f\u0633\u064a \u0623\u0648 \u062a\u0631\u062a\u064a\u0628 \u0644\u0644\u0645\u0633\u0627\u0641\u0629 \u0623\u0646 \u064a\u064f\u0639\u0648\u0636 \u0647\u0630\u0627 \u0627\u0644\u0641\u0631\u0642 \u0627\u0644\u062c\u0648\u0647\u0631\u064a. \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0623\u064a \u0639\u0644\u0628\u0629 \u062a\u0631\u0648\u0633 \u0641\u064a \u0645\u0646\u0627\u0637\u0642 ISO \u0645\u0646 \u0627\u0644\u0641\u0626\u0629 3 \u0625\u0644\u0649 6 \u062d\u064a\u062b \u0642\u062f \u062a\u062a\u0639\u0631\u0636 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0644\u0644\u0647\u0648\u0627\u0621 \u0627\u0644\u062c\u0648\u064a\u060c \u064a\u064f\u0639\u062f \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0634\u062d\u0645 PFPE \u0634\u0631\u0637\u064b\u0627 \u0623\u0633\u0627\u0633\u064a\u064b\u0627\u060c \u0648\u0644\u064a\u0633 \u0645\u062c\u0631\u062f \u062a\u0641\u0636\u064a\u0644.<\/p>\n

\"\u062a\u0641\u0627\u0635\u064a\u0644<\/p>\n

\u062d\u064a\u062b \u064a\u0643\u0648\u0646 \u0627\u0644\u0634\u062d\u0645 \u0627\u0644\u0642\u064a\u0627\u0633\u064a \u0645\u0642\u0628\u0648\u0644\u0627\u064b \u0641\u064a \u0645\u0646\u0634\u0623\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a: <\/strong>
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<\/p>\n

\n

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\n
\n

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\n

\u0633\u0624\u0627\u0644<\/span>
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\n

\u0633\u0624\u0627\u0644<\/span>
\n\u064a\u0633\u062a\u062e\u062f\u0645 \u0635\u0646\u062f\u0648\u0642 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u062d\u0627\u0644\u064a \u0644\u062f\u064a\u0646\u0627 \u0634\u062d\u0645\u064b\u0627 \u0642\u064a\u0627\u0633\u064a\u064b\u0627 \u0645\u062d\u0643\u0645 \u0627\u0644\u0625\u063a\u0644\u0627\u0642\u060c \u0648\u0642\u062f \u0638\u0644 \u0641\u064a \u0645\u0635\u0646\u0639 \u0643\u0648\u0631\u064a \u0644\u0645\u062f\u0629 18 \u0634\u0647\u0631\u064b\u0627 \u062f\u0648\u0646 \u062a\u0633\u062c\u064a\u0644 \u0623\u064a \u062d\u0627\u0644\u0629 \u062a\u0644\u0648\u062b. \u0647\u0644 \u0646\u062d\u062a\u0627\u062c \u0625\u0644\u0649 \u0627\u0644\u062a\u062d\u0648\u0644 \u0625\u0644\u0649 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0634\u062d\u0645 PFPE\u061f<\/h3>\n

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\n

\u0633\u0624\u0627\u0644<\/span>
\n\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u062a\u0645\u062a\u0629 \u0627\u0644\u0632\u0631\u0627\u0639\u064a\u0629 \u0627\u0644\u0643\u0648\u0631\u064a\u0629 \u0627\u0644\u062a\u064a \u062a\u0634\u062a\u0631\u0643 \u0641\u064a \u0645\u0646\u0634\u0623\u0629 \u0645\u0639 \u0645\u0646\u0637\u0642\u0629 \u062f\u0639\u0645 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0647\u0644 \u062a\u0646\u0637\u0628\u0642 \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0639\u0644\u0628\u0629 \u0627\u0644\u062a\u0631\u0648\u0633 \u0627\u0644\u062e\u0627\u0635\u0629 \u0628\u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629\u061f<\/h3>\n

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<\/p>\n

\n

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\u062a\u064f\u0642\u062f\u0651\u0645 \u0634\u0631\u0643\u0629 Korea Ever-Power \u0639\u0644\u0628 \u062a\u0631\u0648\u0633 \u0645\u0646 \u0633\u0644\u0633\u0644\u0629 EP \u0645\u064f\u0635\u0645\u0645\u0629 \u062e\u0635\u064a\u0635\u064b\u0627 \u0644\u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0627\u0644\u0646\u0638\u064a\u0641\u0629\u060c \u0645\u0632\u0648\u062f\u0629 \u0628\u0632\u064a\u062a \u062a\u0634\u062d\u064a\u0645 PFPE\u060c \u0648\u0623\u062e\u062a\u0627\u0645 FFKM\u060c \u0648\u0647\u064a\u0643\u0644 \u0645\u0624\u0643\u0633\u062f\u060c \u0628\u0627\u0644\u0625\u0636\u0627\u0641\u0629 \u0625\u0644\u0649 \u062d\u0632\u0645\u0629 \u0648\u062b\u0627\u0626\u0642 Samsung\/SK Hynix IQ \u0627\u0644\u0643\u0627\u0645\u0644\u0629 - \u0628\u0627\u0644\u0644\u063a\u0629 \u0627\u0644\u0643\u0648\u0631\u064a\u0629\u060c \u0645\u0639 \u0641\u062a\u0631\u0629 \u062a\u0633\u0644\u064a\u0645 \u062a\u062a\u0631\u0627\u0648\u062d \u0628\u064a\u0646 \u0623\u0633\u0628\u0648\u0639\u064a\u0646 \u0648\u0623\u0631\u0628\u0639\u0629 \u0623\u0633\u0627\u0628\u064a\u0639. \u0644\u0644\u062d\u0635\u0648\u0644 \u0639\u0644\u0649 \u0623\u0641\u0636\u0644 \u0627\u0644\u0646\u062a\u0627\u0626\u062c\u060c \u064a\u064f\u0631\u062c\u0649 \u0627\u0644\u062a\u0648\u0627\u0635\u0644 \u0645\u0639\u0646\u0627 \u0641\u064a \u0645\u0631\u062d\u0644\u0629 \u0627\u0644\u062a\u0635\u0645\u064a\u0645.<\/p>\n

EP-AFH \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u062f\u0642\u0629 (\u0645\u0639\u0627\u0644\u062c \u0627\u0644\u0648\u064a\u0641\u0631) \u2192
\n<\/a>
\nEP-KF\/KH \u0645\u0646\u062e\u0641\u0636 \u0627\u0644\u0636\u0648\u0636\u0627\u0621 (\u0645\u0631\u0643\u0628\u0629 \u0646\u0642\u0644 \u0622\u0644\u064a\u0629 \u0644\u0644\u0645\u0635\u0646\u0639) \u2192
\n<\/a><\/div>\n<\/section>\n<\/div>","protected":false},"excerpt":{"rendered":"

Semiconductor Application Guide \u00b7 ISO 14644 \u00b7 Outgassing \u00b7 Non-Magnetic \u00b7 Samsung \/ SK Hynix Planetary Gearbox for Semiconductor Equipment \u2014 Cleanroom, Wafer Handling, and Low-Outgassing Design Every planetary gearbox semiconductor equipment selection decision starts with one question standard catalogues cannot answer. A standard industrial planetary gearbox that performs flawlessly for ten years on a […]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[965],"tags":[],"class_list":["post-707","post","type-post","status-publish","format-standard","hentry","category-application-and-technical-guid"],"_links":{"self":[{"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/posts\/707","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/comments?post=707"}],"version-history":[{"count":1,"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/posts\/707\/revisions"}],"predecessor-version":[{"id":708,"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/posts\/707\/revisions\/708"}],"wp:attachment":[{"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/media?parent=707"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/categories?post=707"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/planetary-gearboxes.com\/ar\/wp-json\/wp\/v2\/tags?post=707"}],"curies":[{"name":"\u0648\u0648\u0631\u062f\u0628\u0631\u064a\u0633","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}