{"id":707,"date":"2026-06-01T05:34:46","date_gmt":"2026-06-01T05:34:46","guid":{"rendered":"https:\/\/planetary-gearboxes.com\/?p=707"},"modified":"2026-06-01T05:34:46","modified_gmt":"2026-06-01T05:34:46","slug":"planetary-gearbox-semiconductor-wafer-handling-cleanroom","status":"publish","type":"post","link":"https:\/\/planetary-gearboxes.com\/ko\/planetary-gearbox-semiconductor-wafer-handling-cleanroom\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc6a9 \uc720\uc131 \uae30\uc5b4\ubc15\uc2a4 - \ud074\ub9b0\ub8f8 \ubc0f \uc6e8\uc774\ud37c \ucc98\ub9ac"},"content":{"rendered":"
\n

<\/p>\n

\"\uc720\uc131<\/p>\n
\n
\ubc18\ub3c4\uccb4 \uc751\uc6a9 \uac00\uc774\ub4dc \u00b7 ISO 14644 \u00b7 \uac00\uc2a4 \ubc29\ucd9c \u00b7 \ube44\uc790\uc131 \u00b7 \uc0bc\uc131\/SK \ud558\uc774\ub2c9\uc2a4<\/div>\n

\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc6a9 \uc720\uc131 \uae30\uc5b4\ubc15\uc2a4 \u2014
\n\ud074\ub9b0\ub8f8, \uc6e8\uc774\ud37c \ud578\ub4e4\ub9c1 \ubc0f \uc800\uac00\uc2a4 \ubc29\ucd9c \uc124\uacc4<\/h1>\n

\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc6a9 \uc720\uc131 \uae30\uc5b4\ubc15\uc2a4 \uc120\uc815\uc740 \ud45c\uc900 \uce74\ud0c8\ub85c\uadf8\ub85c\ub294 \ub2f5\ud560 \uc218 \uc5c6\ub294 \ud55c \uac00\uc9c0 \uc9c8\ubb38\uc5d0\uc11c \uc2dc\uc791\ub429\ub2c8\ub2e4. \ud55c\uad6d\uc758 \ud3ec\uc7a5 \ub77c\uc778\uc5d0\uc11c 10\ub144 \ub3d9\uc548 \uc644\ubcbd\ud558\uac8c \uc791\ub3d9\ud558\ub294 \ud45c\uc900 \uc0b0\uc5c5\uc6a9 \uc720\uc131 \uae30\uc5b4\ubc15\uc2a4\ub77c\ub3c4 \uc6e8\uc774\ud37c \uc81c\uc870 \uacf5\uc7a5\uc758 \ud074\ub9b0\ub8f8\uc5d0\uc11c\ub294 \uba87 \uc8fc \ub9cc\uc5d0 \uc624\uc5fc\uc744 \uc720\ubc1c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uc815\ubc00\ub3c4\uac00 \ubd80\uc871\ud574\uc11c\uac00 \uc544\ub2c8\ub77c, \uc724\ud65c\uc720\uc5d0\uc11c 20\u00b0C\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ud718\ubc1c\uc131 \uc720\uae30\ud654\ud569\ubb3c(VOC)\uc774 300mm \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \uce68\ucc29\ub418\uace0, \uac15\ucca0 \ud558\uc6b0\uc9d5\uc5d0\uc11c \ub5a8\uc5b4\uc838 \ub098\uc624\ub294 \uc790\uc131 \uc785\uc790\uac00 \uc774\uc1a1 \uc911\uc5d0 \uc790\ud654\ub418\uba70, \ud45c\uc900 \ud558\uc6b0\uc9d5 \ucf54\ud305\uc5d0\uc11c \ubc29\ucd9c\ub418\ub294 \ubbf8\uc138 \uc785\uc790\uac00 ISO Class 5 \ub18d\ub3c4 \uc81c\ud55c\uc744 \ucd08\uacfc\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \uc774 \uac00\uc774\ub4dc\ub294 \ucd5c\uc801\uc758 \uc720\uc131 \uae30\uc5b4\ubc15\uc2a4\ub97c \uc120\uc815\ud558\ub294 \ub370 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ubaa8\ub4e0 \uc0ac\uc591 \uc694\uc18c\ub97c \ub2e4\ub8f9\ub2c8\ub2e4. \ud074\ub9b0\ub8f8 \ud638\ud658 \uae30\uc5b4\ubc15\uc2a4<\/strong> \ud45c\uc900 \uc0b0\uc5c5 \ub2e8\uc704\uc5d0\uc11c \uc0dd\uc0b0\ub429\ub2c8\ub2e4.<\/p>\n

EP-AFHK \ucd08\uc815\ubc00 \uc2dc\ub9ac\uc988 \ubcf4\uae30 \u2192
\n<\/a><\/p>\n<\/div>\n<\/section>\n

<\/p>\n

\n

\ud55c\uad6d \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc0b0\uc5c5 - \uae30\uc5b4\ubc15\uc2a4 \uc0ac\uc591\uc774 \uc720\ub3c5 \uae4c\ub2e4\ub85c\uc6b4 \uc774\uc720<\/h2>\n

\ud55c\uad6d\uc740 \uc138\uacc4 \ucd5c\uace0 \uc218\uc900\uc758 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc124\ube44\ub97c \ubcf4\uc720\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc0bc\uc131\uc758 \ud3c9\ud0dd \uacf5\uc7a5(P3 \ubc0f P4 \ub2e8\uacc4)\uacfc SK\ud558\uc774\ub2c9\uc2a4\uc758 \uccad\uc8fc M15X \uacf5\uc7a5\uc740 \uc804 \uc138\uacc4 DRAM \ubc0f NAND \ud50c\ub798\uc2dc \uba54\ubaa8\ub9ac \uc0dd\uc0b0\ub7c9\uc758 \ub300\ubd80\ubd84\uc744 \ucc28\uc9c0\ud569\ub2c8\ub2e4. \uc774\ub4e4 \uc2dc\uc124\uc5d0\uc11c\ub294 ISO 3~5\ub4f1\uae09(\uacf5\uae30 1\uc138\uc81c\uacf1\ubbf8\ud130\ub2f9 0.1\u03bcm \uc774\uc0c1 \uc785\uc790 10~100\uac1c)\uc758 \ud074\ub9b0\ub8f8 \ub0b4\uc5d0\uc11c 300mm \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub97c 400~600\ub2e8\uacc4\uc758 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c, \uc99d\ucc29, \uc2dd\uac01 \ubc0f CMP \uacf5\uc815\uc744 \uac70\uccd0 \ucc98\ub9ac\ud569\ub2c8\ub2e4.<\/p>\n

FOUP \uc774\uc1a1 AGV, \uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec \ud68c\uc804\ucd95, \ub85c\ub4dc \ud3ec\ud2b8 \uc815\ub82c \uc2a4\ud14c\uc774\uc9c0, \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \ub808\ud2f0\ud074 \uc2a4\ud14c\uc774\uc9c0, CMP \ud5e4\ub4dc \ud68c\uc804 \uad6c\ub3d9 \uc7a5\uce58 \ub4f1 \uc774 \ud658\uacbd\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uae30\uc5b4\ubc15\uc2a4\ub294 \ub2e4\ub978 \ubaa8\ub4e0 \ubd80\ud488\uacfc \ub9c8\ucc2c\uac00\uc9c0\ub85c \ub3d9\uc77c\ud55c \ud074\ub9b0\ub8f8 \uaddc\uaca9\uc744 \uc900\uc218\ud574\uc57c \ud569\ub2c8\ub2e4. \uc785\uc790\ub97c \ubc29\ucd9c\ud558\uac70\ub098, \ud654\ud559 \ubb3c\uc9c8\uc744 \ubc30\ucd9c\ud558\uac70\ub098, \uc815\ub82c \uc2dc\uc2a4\ud15c\uc5d0 \uac04\uc12d\uc744 \uc77c\uc73c\ud0ac \uc218 \uc788\ub294 \uc790\uae30\uc7a5\uc744 \uc0dd\uc131\ud558\ub294 \uae30\uc5b4\ubc15\uc2a4\ub294 \"\uc800\ud488\uc9c8\" \uae30\uc5b4\ubc15\uc2a4\uac00 \uc544\ub2c8\ub77c, \ub2e8\uc21c\ud788 \ub2e4\ub978 \ud658\uacbd\uc5d0 \ub9de\uac8c \uc124\uacc4\ub41c \uae30\uc5b4\ubc15\uc2a4\ub97c \ubd80\uc801\uc808\ud55c \ud658\uacbd\uc5d0 \uc124\uce58\ud55c \uac83\uc77c \ubfd0\uc785\ub2c8\ub2e4.<\/p>\n

\"\ud3c9\uba74<\/p>\n

\uc720\uc131 \uae30\uc5b4\ubc15\uc2a4 \ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uc0ac\uc591\uc744 \uc774\ud574\ud558\uba74 \ud55c\uad6d\uc758 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uacf5\uae09\uc5c5\uccb4\ub294 \ucc98\uc74c\ubd80\ud130 \uc62c\ubc14\ub978 \uae30\uc5b4\ubc15\uc2a4 \uad6c\uc131\uc744 \uc9c0\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uace0\uac1d \uc778\uc218 \ud14c\uc2a4\ud2b8 \uc911\uc5d0 \ud638\ud658\uc131 \ubb38\uc81c\ub97c \ubc1c\uacac\ud558\ub294 \uac83\uc744 \ubc29\uc9c0\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub418\uba70, \ubd80\ud488 \uc0ac\uc591 \uc624\ub958\ub97c \ud574\uacb0\ud558\ub294 \ub370 \ub4dc\ub294 \uac00\uc7a5 \ud070 \ube44\uc6a9 \ubd80\ub2f4\uc744 \uc904\uc5ec\uc90d\ub2c8\ub2e4.<\/p>\n

<\/p>\n

\n\n\n\n\n\n\n\n\n
\ucf54\ub9ac\uc548 \ud339 \uc874<\/th>\nISO \ub4f1\uae09<\/th>\n\ucd5c\ub300 \uc785\uc790 \ud06c\uae30 \u22650.1\u03bcm\/m\u00b3<\/th>\n\uc628\ub3c4\/\uc2b5\ub3c4<\/th>\n\uae30\uc5b4\ubc15\uc2a4 \uc0ac\uc6a9<\/th>\n<\/tr>\n<\/thead>\n
\ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \ubca0\uc774<\/td>\nISO 3<\/td>\n10<\/td>\n20\u00b0C \u00b10.1\u00b0C \/ 40% RH<\/td>\n\ub808\ud2f0\ud074 \uc2a4\ud14c\uc774\uc9c0, \uc6e8\uc774\ud37c \ub85c\ub354 - \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \ubd80\ud488<\/td>\n<\/tr>\n
\uc99d\ucc29\/\uc2dd\uac01 \ubca0\uc774<\/td>\nISO 4\u20135<\/td>\n100~1,000<\/td>\n20\u201322\u00b0C \/ 40\u201350% RH<\/td>\n\uc7a5\ube44 \uc6b4\ubc18 \uc7a5\uce58, \uc624\ubc84\ud5e4\ub4dc \ud2b8\ub79c\uc2a4\ud3ec\ud2b8<\/td>\n<\/tr>\n
CMP\/\ud3ec\uc7a5 \uc791\uc5c5\uc7a5<\/td>\nISO 6\u20137<\/td>\n10,000~100,000<\/td>\n20\u201323\u00b0C \/ 40\u201360% RH<\/td>\nFOUP \uc6b4\uc1a1, \uc790\uc7ac \ucde8\uae09 AGV<\/td>\n<\/tr>\n
Fab \uc9c0\uc6d0 \ud1b5\ub85c<\/td>\nISO 8<\/td>\n3,520,000<\/td>\n\uc8fc\ubcc0 \uc628\ub3c4 \u00b12\u00b0C<\/td>\n\uc774 \uad6c\uc5ed\uc5d0\uc11c\ub294 \ud45c\uc900 EP-AB\uac00 \ud5c8\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n

ISO 14644-1:2015 \uccad\uc815\ub3c4 \ub4f1\uae09. \uc0bc\uc131\/SK \ud558\uc774\ub2c9\uc2a4 \uc7a5\ube44 \uc0ac\uc591\uc5d0 \ub530\ub978 \ud55c\uad6d \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc124 \uad6c\uc5ed. \ubaa8\ub4e0 \uc81c\uc870 \uc2dc\uc124 \uad6c\uc5ed\uc740 \uc5f0\uc911 \uc57d 20~22\u00b0C\ub97c \uc720\uc9c0\ud569\ub2c8\ub2e4. EP-KF\/KH \ud558\uc774\ud3ec\uc774\ub4dc \uc2dc\ub9ac\uc988\uc758 0\u00b0C \ucd5c\uc800 \uc628\ub3c4\ub294 \uc2e4\ub0b4 \uc81c\uc870 \uc2dc\uc124 \uc124\uce58\uc5d0 \uc788\uc5b4 \ubb38\uc81c\uac00 \ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<\/section>\n

<\/p>\n

\n

\uc77c\ubc18 \uae30\uc5b4\ubc15\uc2a4\uac00 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc124\uc744 \uc624\uc5fc\uc2dc\ud0a4\ub294 \ub124 \uac00\uc9c0 \ubc29\ubc95<\/h2>\n

\ud45c\uc900 \uae30\uc5b4\ubc15\uc2a4\uc758 \ud074\ub9b0\ub8f8 \ud638\ud658\uc131 \ubb38\uc81c\ub294 \ub124 \uac00\uc9c0 \ub3c5\ub9bd\uc801\uc778 \uba54\ucee4\ub2c8\uc998\uc744 \ud1b5\ud574 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uac01\uac01\uc758 \uba54\ucee4\ub2c8\uc998\uc740 \ubcc4\ub3c4\ub85c \ud574\uacb0\ud574\uc57c \ud558\uba70, \ud558\ub098\ub97c \uc81c\uac70\ud55c\ub2e4\uace0 \ud574\uc11c \ub2e4\ub978 \uba54\ucee4\ub2c8\uc998\uc774 \ud574\uacb0\ub418\ub294 \uac83\uc740 \uc544\ub2d9\ub2c8\ub2e4.<\/p>\n

\n
\n
\n
1<\/div>\n
\n
\uc724\ud65c\uc720 \uac00\uc2a4 \ubc29\ucd9c - \ub208\uc5d0 \ubcf4\uc774\uc9c0 \uc54a\ub294 \uc624\uc5fc<\/div>\n

\uc77c\ubc18\uc801\uc778 \ubc00\ubd09 \uadf8\ub9ac\uc2a4\ub294 \ubbf8\ub124\ub784 \uc624\uc77c \ub610\ub294 PAO(\ud3f4\ub9ac\uc54c\ud30c\uc62c\ub808\ud540) \uae30\uc720\uc5d0 \uc544\ubbfc \ub610\ub294 \uce7c\uc298\uacc4 \uc99d\uc810\uc81c\ub97c \ucca8\uac00\ud558\uc5ec \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ud074\ub9b0\ub8f8\uc758 \uc0c1\uc628\uc5d0\uc11c \uc774\ub7ec\ud55c \ud654\ud569\ubb3c\uc740 \uc99d\uae30\uc555\uc5d0 \uc758\ud574 \ud718\ubc1c\uc131 \uc720\uae30 \ud654\ud569\ubb3c(VOC)\uc744 \ubc29\ucd9c\ud558\ub294\ub370, \uc774\ub97c \ud0c8\uae30\ub77c\uace0 \ud569\ub2c8\ub2e4. \ubc29\ucd9c\ub41c VOC\ub294 \ubd84\uc790 \uc218\uc900\uc5d0\uc11c\ub294 \ub208\uc5d0 \ubcf4\uc774\uc9c0 \uc54a\uc9c0\ub9cc, \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ud45c\uba74\uc774\ub098 \ub808\ud2f0\ud074 \uc720\ub9ac \ub4f1 \uc8fc\ubcc0 \ud45c\uba74\uc5d0 \uce68\ucc29\ub429\ub2c8\ub2e4.<\/p>\n

\uae30\uad6c:<\/strong> 20\u00b0C\uc5d0\uc11c \uc77c\ubc18\uc801\uc778 \uad11\ubb3c\uc720 \uadf8\ub9ac\uc2a4\uc758 \uc99d\uae30\uc555\uc740 10\u207b\u2074~10\u207b\u00b3 Pa\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc8fc\ubcc0 \ud45c\uba74\uc758 \uc99d\ucc29 \uc18d\ub3c4\ub294 \uc57d 0.1~1 ng\/cm\u00b2\/\uc2dc\uac04\uc785\ub2c8\ub2e4. \uc624\uc5fc\uc744 \uc720\ubc1c\ud558\ub294 \uae30\uc5b4\ubc15\uc2a4\uc5d0\uc11c 500 mm \ub5a8\uc5b4\uc9c4 \uc704\uce58\uc5d0 \uc788\ub294 300 mm \uc6e8\uc774\ud37c\uc5d0 24\uc2dc\uac04 \uc5f0\uc18d \uc791\ub3d9 \uc2dc, \uc774\ub7ec\ud55c \uadf8\ub9ac\uc2a4\ub294 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \ud45c\uba74 \uc2b5\uc724\uc131 \ubc0f \uc811\ucc29 \ud2b9\uc131\uc744 \ubcc0\ud654\uc2dc\ud0a4\ub294 \uc720\uae30\ub9c9\uc744 \uc99d\ucc29\ud558\uc5ec \ud6c4\uc18d \ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc5d0\uc11c \uacb0\ud568\uc744 \ubc1c\uc0dd\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n

\ud574\uacb0\ucc45:<\/strong> PFPE(\ud37c\ud50c\ub8e8\uc624\ub85c\ud3f4\ub9ac\uc5d0\ud14c\ub974) \uadf8\ub9ac\uc2a4. 20\u00b0C\uc5d0\uc11c\uc758 \uc99d\uae30\uc555: <10\u207b\u00b9\u2070 Pa \u2014 \uad11\ubb3c\uc720\ubcf4\ub2e4 7\ubc30 \uc774\uc0c1 \ub0ae\uc2b5\ub2c8\ub2e4. PFPE \uadf8\ub9ac\uc2a4\ub294 \ud654\ud559\uc801\uc73c\ub85c \ubd88\ud65c\uc131\uc774\uba70, \uacf5\uc815 \uac00\uc2a4\uc640 \ubc18\uc751\ud558\uc9c0 \uc54a\uace0, \uc8fc\ubcc0 \ud45c\uba74\uc5d0 \uc720\uae30\ubb3c \uce68\uc804\ubb3c\uc744 \uac70\uc758 \uc0dd\uc131\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc EP \uc2dc\ub9ac\uc988 \uae30\uc5b4\ubc15\uc2a4\ub294 \ud074\ub9b0\ub8f8 \ub4f1\uae09 PFPE \uadf8\ub9ac\uc2a4\ub97c \uc0ac\uc6a9\ud558\uc5ec \ud2b9\ubcc4 \uc8fc\ubb38\uc73c\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4. \uc8fc\ubb38 \uc2dc "\ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 PFPE \uc724\ud65c\uc720"\ub97c \uba85\uc2dc\ud574 \uc8fc\uc2ed\uc2dc\uc624.<\/div>\n<\/div>\n<\/div>\n<\/div>\n

\n
\n
2<\/div>\n
\n
\uae30\uc5b4 \ub9de\ubb3c\ub9bc \ub9c8\ubaa8 \ud30c\ud3b8\uc73c\ub85c\ubd80\ud130 \uc785\uc790 \uc0dd\uc131<\/div>\n

\ubaa8\ub4e0 \uc720\uc131 \uae30\uc5b4\ubc15\uc2a4\ub294 \uae30\uc5b4 \ub9de\ubb3c\ub9bc \uc601\uc5ed\uc5d0\uc11c \ubbf8\uc138\ud55c \uae08\uc18d \ub9c8\ubaa8 \uc785\uc790\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc774\ub294 \uae30\uc5b4 \uc774\ube68 \uacc4\uba74\uc5d0\uc11c\uc758 \ubbf8\ub044\ub7ec\uc9d0\uacfc \uad6c\ub984 \uc6b4\ub3d9\uc73c\ub85c \uc778\ud574 \ubd88\uac00\ud53c\ud558\uac8c \ubc1c\uc0dd\ud558\ub294 \ud604\uc0c1\uc785\ub2c8\ub2e4. \uc0b0\uc5c5 \ud658\uacbd\uc5d0\uc11c\ub294 \uc774\ub7ec\ud55c \uc785\uc790\ub4e4\uc774 \uadf8\ub9ac\uc2a4 \uad6c\uc870\uc5d0 \uc758\ud574 \ubc00\ud3d0\ub41c \ud558\uc6b0\uc9d5 \ub0b4\ubd80\uc5d0 \ud3ec\uc9d1\ub429\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ud074\ub9b0\ub8f8 \uae30\uc5b4\ubc15\uc2a4\uc5d0\uc11c\ub294 \uc785\uc790\uac00 \ube60\uc838\ub098\uac08 \uc218 \uc788\ub294 \ubaa8\ub4e0 \uacbd\ub85c\ub97c \ucc28\ub2e8\ud574\uc57c \ud569\ub2c8\ub2e4. \uc989, \ucd95 \ubc00\ubd09\uc740 \ucd95 \ud45c\uba74\uc744 \ub530\ub77c \uc785\uc790\uac00 \uc774\ub3d9\ud558\ub294 \uac83\uc744 \ubc29\uc9c0\ud574\uc57c \ud558\uba70, \ud558\uc6b0\uc9d5\uc5d0\ub294 \uae30\uc5b4\ubc15\uc2a4\uc758 \uc5f4 \ud658\uae30 \uc0ac\uc774\ud074\uc5d0 \uc758\ud574 \uc785\uc790\uac00 \ud3ec\ud568\ub41c \uacf5\uae30\uac00 \uc720\uc785\ub420 \uc218 \uc788\ub294 \ubbf8\uc138\ud55c \ud2c8\uc774 \uc5c6\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n

\uae30\uad6c:<\/strong> \uae30\uc5b4\ubc15\uc2a4\uac00 \ub0c9\uac04 \uc2dc\ub3d9\uc5d0\uc11c \uc791\ub3d9 \uc628\ub3c4\uae4c\uc9c0 \uac00\uc5f4\ub418\uba74 \ud558\uc6b0\uc9d5 \ub0b4\ubd80\uc758 \uacf5\uae30\uac00 \ud33d\ucc3d\ud558\uc5ec \uc800\ud56d\uc774 \uac00\uc7a5 \ub0ae\uc740 \uacbd\ub85c, \uc77c\ubc18\uc801\uc73c\ub85c \uc0e4\ud504\ud2b8 \uc530 \ub9bd\uc744 \ud1b5\ud574 \ube60\uc838\ub098\uac00\ub824\uace0 \ud569\ub2c8\ub2e4. \ub0c9\uac01\ub418\uba74 \uc678\ubd80 \uacf5\uae30(\ubc0f \uadf8 \uc548\uc5d0 \ud3ec\ud568\ub41c \ubaa8\ub4e0 \uc785\uc790)\uac00 \ub2e4\uc2dc \uc720\uc785\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \"\ud638\ud761\" \ud6a8\uacfc\ub294 \uc785\uc790\ub97c \uc591\ubc29\ud5a5\uc73c\ub85c \uc774\ub3d9\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud574\uacb0\ucc45:<\/strong> \uc5f4 \uc804\ub2ec \uacbd\ub85c\uac00 \uc5c6\ub294 \uc644\uc804 \ubc00\ud3d0\ud615 \ud558\uc6b0\uc9d5 \u2014 \ud1b5\ud48d\uad6c\ub97c \uc81c\uac70\ud558\uace0 \ud45c\uc900 NBR \ub610\ub294 FKM \uc530\ubcf4\ub2e4 \uc804\uccb4 \uc791\ub3d9 \uc628\ub3c4 \ubc94\uc704\uc5d0\uc11c \ub354 \ubc00\ucc29\ub41c \ub9bd \uc811\ucd09\uc744 \uc720\uc9c0\ud558\ub294 FFKM(\ud37c\ud50c\ub8e8\uc624\ub85c\uc5d8\ub77c\uc2a4\ud1a0\uba38) \uc0e4\ud504\ud2b8 \uc530\uc744 \uc0ac\uc6a9\ud558\uc5ec \uad6c\ud604\ud588\uc2b5\ub2c8\ub2e4.<\/div>\n<\/div>\n<\/div>\n<\/div>\n
\n
\n
3<\/div>\n
\n
\uc8fc\ud0dd \ud45c\uba74 \ucf54\ud305\uc758 \uac00\uc2a4 \ubc29\ucd9c \ubc0f \ubbf8\ub9bd\uc790 \ubc1c\uc0dd<\/div>\n

\uc77c\ubc18\uc801\uc778 \uc0b0\uc5c5\uc6a9 \uae30\uc5b4\ubc15\uc2a4 \ud558\uc6b0\uc9d5\uc5d0\ub294 \uc0c1\uc628\uc5d0\uc11c \uacbd\ud654\ub418\ub294 \uc720\uc131 \ub610\ub294 \uc544\ud06c\ub9b4 \ud398\uc778\ud2b8 \ucf54\ud305\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ucf54\ud305\uc740 \ub3c4\ud3ec \ud6c4 \uc218\uac1c\uc6d4 \ub3d9\uc548 \uc6a9\ub9e4 \uc794\ub958\ubb3c(VOC)\uc744 \uacc4\uc18d \ubc29\ucd9c\ud558\uace0 \ucf54\ud305 \ud45c\uba74\uc774 \ud48d\ud654\ub428\uc5d0 \ub530\ub77c \ubbf8\uc138 \uc785\uc790\ub97c \ub5a8\uc5b4\ub728\ub9bd\ub2c8\ub2e4. ISO 3~5 \ub4f1\uae09\uc758 \ud074\ub9b0\ub8f8\uc5d0\uc11c\ub294 \uc544\uc8fc \uc791\uc740 \uc785\uc790 \ubc1c\uc0dd\uc6d0\uc774\ub77c\ub3c4 \uae30\uc5b4\ubc15\uc2a4 \ubc14\ub85c \uc8fc\ubcc0\uc5d0\uc11c \ud5c8\uc6a9\ub41c \uc785\uc790 \ub18d\ub3c4 \ud55c\ub3c4\ub97c \ucd08\uacfc\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ud574\uacb0\ucc45:<\/strong> \ud558\uc6b0\uc9d5\uc740 \ubb34\ub3c4\uc7a5 \uc591\uadf9\uc0b0\ud654 \ucc98\ub9ac\ub41c \uc54c\ub8e8\ubbf8\ub284(\ud398\uc778\ud2b8 \ucf54\ud305 \uc5c6\uc74c) \ub610\ub294 VOC \ud568\ub7c9\uc774 0\uc774\uace0 \uc785\uc790 \ubc1c\uc0dd\ub960\uc774 \ucd5c\uc18c\ud654\ub41c \ubb34\uc804\ud574 \ub2c8\ucf08 \ub3c4\uae08\uc73c\ub85c \ub9c8\uac10\ub429\ub2c8\ub2e4. \uc77c\ubd80 \ud55c\uad6d \uc81c\uc870 \uc124\ube44 \uacf5\uae09\uc5c5\uccb4\ub294 \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 ISO Class 3 \uc801\uc6a9 \ubd84\uc57c\uc5d0 \uc804\ud574 \uc5f0\ub9c8 \ucc98\ub9ac\ub41c \uc2a4\ud14c\uc778\ub9ac\uc2a4 \uc2a4\ud2f8 \ud558\uc6b0\uc9d5\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \ud074\ub9b0\ub8f8 \uc801\uc6a9 \ubd84\uc57c\uc758 EP \uc2dc\ub9ac\uc988 \uae30\uc5b4\ubc15\uc2a4\uc5d0 \ubb34\ub3c4\uc7a5 \uc591\uadf9\uc0b0\ud654 \ucc98\ub9ac \ud558\uc6b0\uc9d5\uc744 \uc8fc\ubb38 \uc2dc \uc9c0\uc815\ud558\uc5ec \uc81c\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/div>\n<\/div>\n<\/div>\n<\/div>\n
\n
\n
4<\/div>\n
\n
\uac15\uc790\uc131 \ubb3c\uc9c8\uacfc \ub204\uc124 \uc790\uae30\uc7a5<\/div>\n

\uc77c\ubc18\uc801\uc778 \uae30\uc5b4\ubc15\uc2a4 \ubd80\ud488(\ud558\uc6b0\uc9d5, \uae30\uc5b4, \uc0e4\ud504\ud2b8, \uc720\uc131 \uce90\ub9ac\uc5b4)\uc740 \ud45c\uc900 \ud0c4\uc18c\uac15 \ub610\ub294 \ud569\uae08\uac15\uc73c\ub85c \ub9cc\ub4e4\uc5b4\uc9c0\ub294\ub370, \uc774\ub294 \uc0c1\ub2f9\ud55c \uc790\uae30 \ud22c\uacfc\uc728\uc744 \uac00\uc9c4 \uac15\uc790\uc131 \uc7ac\ub8cc\uc785\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc774\uac83\uc774 \ubb38\uc81c\uac00 \ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ud55c\uad6d\uc758 MRAM(\uc790\uae30 \ub79c\ub364 \uc561\uc138\uc2a4 \uba54\ubaa8\ub9ac) \uc81c\uc870 \ud604\uc7a5\uacfc \uc804\uc790\ube54 \ub9ac\uc18c\uadf8\ub798\ud53c \uc7a5\ube44 \uc8fc\ubcc0\uc5d0\uc11c\ub294 \uac15\uc790\uc131 \ubd80\ud488\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ub204\uc124 \uc790\uae30\uc7a5\uc774 \uc804\uc790\ube54 \uceec\ub7fc\uc758 \uc815\ub82c \uc624\ub958\ub97c \uc720\ubc1c\ud558\uace0, \ubd80\ubd84\uc801\uc73c\ub85c \uc81c\uc791\ub41c MRAM \uc140\uc758 \uc790\uae30 \uc0c1\ud0dc\ub97c \ubcc0\ud654\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uae30\uad6c:<\/strong> \uc77c\ubc18\uc801\uc778 \uac15\ucca0 \uae30\uc5b4\ubc15\uc2a4 \ud558\uc6b0\uc9d5\uc758 \uc0c1\ub300 \uc790\uae30 \ud22c\uc790\uc728 \u03bc\u1d63\uc740 100~1,000(\uac15\uc790\uc131)\uc785\ub2c8\ub2e4. 300mm \uac70\ub9ac\uc5d0\uc11c\ub294 \uc9c0\uad6c \uc8fc\ubcc0 \uc790\uae30\uc7a5\uc870\ucc28\ub3c4 \ud558\uc6b0\uc9d5\uc5d0 \uc758\ud574 \uc65c\uace1\ub418\uba70, \ubaa8\ud130 \uc790\uc11d\uc774\ub098 \uc804\uc6d0 \ucf00\uc774\ube14\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ubbf8\uc138\ud55c \ub204\uc124 \uc790\uae30\uc7a5\uc774 \ud558\uc6b0\uc9d5\uc5d0 \uc720\uc785\ub418\uba74 \uc77c\ubd80 EUV \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc694\uad6c\ub418\ub294 10nT\uc758 \uc790\uae30\uc7a5 \uc548\uc815\uc131 \uae30\uc900\uc744 \ucd08\uacfc\ud558\ub294 \uc2dc\uac04 \uac00\ubcc0 \uc790\uae30\uc7a5\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud574\uacb0\ucc45:<\/strong> \uc624\uc2a4\ud14c\ub098\uc774\ud2b8 \uc2a4\ud14c\uc778\ub9ac\uc2a4\uac15(SS316L, \u03bc\u1d63 \u2248 1.003) \ub610\ub294 \uc54c\ub8e8\ubbf8\ub284(\u03bc\u1d63 \u2248 1.000006) \ud558\uc6b0\uc9d5 \uad6c\uc870\ub294 \uac15\uc790\uc131 \ubb38\uc81c\ub97c \ud574\uacb0\ud569\ub2c8\ub2e4. \uc774\ub294 \ud2b9\ubcc4 \uc8fc\ubb38 \uc0ac\ud56d\uc774\ubbc0\ub85c, \ud2b9\uc815 \uc81c\uc870 \uad6c\uc5ed \ubc0f \uc7a5\ube44 \uc720\ud615\uc5d0 \ub300\ud574\uc11c\ub294 \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ubd80\uc11c\uc5d0 \ubb38\uc758\ud558\uc2ed\uc2dc\uc624.<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n

<\/p>\n

\n

ISO 14644 \ud074\ub9b0\ub8f8 \ub4f1\uae09 \u2192 \uae30\uc5b4\ubc15\uc2a4 \uc0ac\uc591 \uc694\uad6c\uc0ac\ud56d<\/h2>\n

\ubaa8\ub4e0 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815 \uad6c\uc5ed\uc5d0 \uc644\ubcbd\ud55c \ud074\ub9b0\ub8f8 \uae30\uc5b4\ubc15\uc2a4 \uc0ac\uc591 \ud328\ud0a4\uc9c0\uac00 \ud544\uc694\ud55c \uac83\uc740 \uc544\ub2d9\ub2c8\ub2e4. \uc694\uad6c \uc0ac\ud56d\uc740 \ud074\ub9b0\ub8f8 \ub4f1\uae09\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9c0\ub294\ub370, ISO 7 \ub4f1\uae09 \uc790\uc7ac \ucde8\uae09 \uad6c\uc5ed\uc740 ISO 3 \ub4f1\uae09 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uad6c\uc5ed\uacfc\ub294 \uadfc\ubcf8\uc801\uc73c\ub85c \ub2e4\ub978 \uc694\uad6c \uc0ac\ud56d\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud074\ub9b0\ub8f8 \uae30\ub2a5\uc744 \uacfc\ub3c4\ud558\uac8c \uc0ac\uc591\ud654\ud558\uba74 \uae30\ub2a5\uc801 \uc774\uc810 \uc5c6\uc774 \ube44\uc6a9\ub9cc \uc99d\uac00\uc2dc\ud0a4\uace0, \ubc18\ub300\ub85c \uc0ac\uc591\uc744 \ubd80\uc871\ud558\uac8c \uc124\uc815\ud558\uba74 \uc81c\uc870 \uacf5\uc815 \uc624\uc5fc \uc0ac\uace0\uc758 \uc704\ud5d8\uc774 \ucee4\uc9d1\ub2c8\ub2e4.<\/p>\n

\n\n\n\n\n\n\n\n\n
ISO \ub4f1\uae09<\/th>\n\uc724\ud65c\uc720<\/th>\n\uc0e4\ud504\ud2b8 \uc530<\/th>\n\ud558\uc6b0\uc9d5 \ucf54\ud305<\/th>\n\ube44\uc790\uc131<\/th>\n\ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc \uc8fc\ubb38\uc11c<\/th>\n<\/tr>\n<\/thead>\n
ISO 8 (\uc9c0\uc6d0 \ubc94\uc704)<\/td>\n\ud45c\uc900 \uc724\ud65c\uc720 \u2713<\/td>\n\ud45c\uc900 NBR \u2713<\/td>\n\uae30\ubcf8 \ud398\uc778\ud2b8 \u2713<\/td>\n\ud544\uc218 \uc544\ub2d8<\/td>\n\ud45c\uc900 EP-AB \uc7ac\uace0 - \ud2b9\ubcc4 \uc8fc\ubb38 \ud544\uc694 \uc5c6\uc74c<\/td>\n<\/tr>\n
ISO 6-7 (CMP\/\ud3ec\uc7a5)<\/td>\nPFPE \uc120\ud638<\/td>\nFKM \ub610\ub294 FFKM<\/td>\n\uc800VOC \ub610\ub294 \uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac<\/td>\n\uad6c\uc5ed\ubcc4\ub85c \ud655\uc778\ud558\uc138\uc694<\/td>\n\uc8fc\ubb38 \uc2dc \"\ud074\ub9b0\ub8f8 \uadf8\ub9ac\uc2a4 + FKM \uc530\"\uc744 \uba85\uc2dc\ud574 \uc8fc\uc138\uc694.<\/td>\n<\/tr>\n
ISO 4\u20135 (\uc99d\ucc29\/\uc2dd\uac01)<\/td>\nPFPE \ud544\uc218<\/td>\nFFKM \ud544\uc694<\/td>\n\uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac\ub41c \uc54c\ub8e8\ubbf8\ub284 \ud544\uc694<\/td>\nMRAM\/EB \uc601\uc5ed\uc778 \uacbd\uc6b0: \uc608<\/td>\n\ud074\ub9b0\ub8f8 \uc0ac\uc591 \uc804\uccb4 \uc8fc\ubb38; \ub0a9\uae30 2~3\uc8fc<\/td>\n<\/tr>\n
ISO 3 (EUV \ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815)<\/td>\nPFPE \ud544\uc218<\/td>\nFFKM \ud544\uc694<\/td>\n\uc804\ud574\uc5f0\ub9c8 \ucc98\ub9ac\ub41c SS316L<\/td>\n\ud544\uc218\uc758<\/td>\n\ub9de\ucda4\ud615 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc124\uacc4 \ucd08\uae30 \ub2e8\uacc4\ubd80\ud130 \ud55c\uad6d Ever-Power \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ud300\uacfc \ud611\ub825\ud558\uc2ed\uc2dc\uc624.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n

 <\/p>\n

\uc8fc\ubb38 \uc2dc \uc911\uc694 \uc9c0\uce68: <\/strong>
\n\ud074\ub9b0\ub8f8 \uc804\uc6a9 \uc635\uc158(PFPE \uadf8\ub9ac\uc2a4, FFKM \uc530, \uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac\ub41c \ud558\uc6b0\uc9d5, \ube44\uc790\uc131 \uad6c\uc870)\uc740 \uc8fc\ubb38 \uc2dc \ubc18\ub4dc\uc2dc \uc9c0\uc815\ud574\uc57c \ud569\ub2c8\ub2e4. \ud45c\uc900 EP \uc2dc\ub9ac\uc988 \uae30\uc5b4\ubc15\uc2a4\ub294 \ud45c\uc900 \ubbf8\ub124\ub784\/PAO \uadf8\ub9ac\uc2a4, NBR \uc530, \ub3c4\uc7a5 \ucc98\ub9ac\ub41c \ud558\uc6b0\uc9d5\uc774 \uc7a5\ucc29\ub418\uc5b4 \ucd9c\uace0\ub429\ub2c8\ub2e4. \ud604\uc7a5 \uac1c\uc870\ub294 \ubd88\uac00\ub2a5\ud569\ub2c8\ub2e4. \ud45c\uc900\ud615 \uae30\uc5b4\ubc15\uc2a4\ub97c \uc218\ub839\ud55c \ud6c4 \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c PFPE \uc724\ud65c\uc720\uac00 \ud544\uc694\ud55c \uac83\uc73c\ub85c \ud655\uc778\ub420 \uacbd\uc6b0, \ud574\ub2f9 \uae30\uc5b4\ubc15\uc2a4\ub97c \ubc18\ud488\ud558\uace0 \ud074\ub9b0\ub8f8 \uc804\uc6a9 \uae30\uc5b4\ubc15\uc2a4\ub85c \uad50\uccb4\ud574\uc57c \ud569\ub2c8\ub2e4. \ud074\ub9b0\ub8f8 \uc635\uc158\uc758 \ub0a9\uae30\ub294 2~4\uc8fc\uc774\ubbc0\ub85c \uc7a5\ube44 \uad6c\ub9e4 \uc77c\uc815\uc5d0 \uc774\ub97c \uace0\ub824\ud558\uc5ec \uacc4\ud68d\ud558\uc2ed\uc2dc\uc624.<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec \ud68c\uc804\ucd95 - \uc815\ubc00\ub3c4 \uc694\uad6c \uc0ac\ud56d \ubc0f \uc2dc\ub9ac\uc988 \uc120\ud0dd<\/h2>\n

\uc720\uc131 \uae30\uc5b4\ubc15\uc2a4\ub97c \uc0ac\uc6a9\ud558\ub294 \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec \uad6c\ub3d9 \uc7a5\uce58\ub294 \ub300\ubd80\ubd84\uc758 \uc0b0\uc5c5\uc6a9 \uc11c\ubcf4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcf4\ub2e4 \ud6e8\uc52c \ub192\uc740 \uc815\ubc00\ub3c4\ub97c \uc694\uad6c\ud569\ub2c8\ub2e4. FOUP(Fluorescence Operation Platform), \uacf5\uc815 \ucc54\ubc84 \ubc0f \uc5bc\ub77c\uc774\ub108 \uc0ac\uc774\uc5d0\uc11c 300mm \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub97c \uc774\uc1a1\ud558\ub294 \ub85c\ubd07 \uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec\ub294 \ub450 \uac1c\uc758 \ud68c\uc804\ucd95\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ud558\ub098\ub294 \uc804\uccb4 \uc554 \uc5b4\uc148\ube14\ub9ac\ub97c \ud68c\uc804\uc2dc\ucf1c \ubaa9\ud45c \uc2ac\ub86f\uc5d0 \uc815\ub82c\ud558\ub294 \uc138\ud0c0(\u03b8) \ud68c\uc804\ucd95\uc774\uace0, \ub2e4\ub978 \ud558\ub098\ub294 \uc5d4\ub4dc \uc774\ud399\ud130\ub97c \ubc18\uacbd \ubc29\ud5a5\uc73c\ub85c \ud655\uc7a5 \ubc0f \uc218\ucd95\uc2dc\ud0a4\ub294 \ud655\uc7a5\ucd95\uc785\ub2c8\ub2e4. \uc138\ud0c0\ucd95\uc758 \uc704\uce58 \uc815\ud655\ub3c4\ub294 \uc6e8\uc774\ud37c\uac00 \uc5d4\ub4dc \uc774\ud399\ud130\uc758 \uc911\uc2ec \ud5c8\uc6a9 \uc624\ucc28 \ub0b4\uc5d0 \uc704\uce58\ud558\ub294\uc9c0 \uc5ec\ubd80\ub97c \uacb0\uc815\ud558\uba70, \ud655\uc7a5\ucd95\uc740 \ubc18\uacbd \ubc29\ud5a5 \uc704\uce58 \uc815\ud655\ub3c4\ub97c \uacb0\uc815\ud569\ub2c8\ub2e4.<\/p>\n

\"pls-\uace0\uc815\ubc00<\/p>\n

\uc138\ud0c0 \ucd95\uc758 \uc704\uce58 \uacb0\uc815\uc5d0 \uc788\uc5b4 \uac00\uc7a5 \uc911\uc694\ud55c \uc694\uad6c \uc0ac\ud56d\uc740 \uc6e8\uc774\ud37c \uc911\uc2ec\uc774 \uacf5\uce6d \uc6e8\uc774\ud37c \ubc18\uacbd 300mm(\uc6e8\uc774\ud37c \uc911\uc2ec\uc5d0\uc11c 150mm)\uc5d0\uc11c \ubaa9\ud45c \uc704\uce58\ub85c\ubd80\ud130 \u00b10.5mm \uc774\ub0b4\uc5d0 \uc704\uce58\ud574\uc57c \ud55c\ub2e4\ub294 \uac83\uc785\ub2c8\ub2e4. \uc774\ub97c \uc704\ud574\uc11c\ub294 \uc138\ud0c0 \ucd95\uc758 \uac01\ub3c4 \uc624\ucc28\uac00 \ub2e4\uc74c\uacfc \uac19\uc544\uc57c \ud569\ub2c8\ub2e4.<\/p>\n

\n

\uc138\ud0c0 \ucd95 \ubc31\ub798\uc2dc \uc694\uad6c \uc0ac\ud56d - \uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec<\/p>\n

\ud544\uc218 \uc870\uac74: \uc554 \ubc18\uacbd r = 300mm\uc5d0\uc11c \uc704\uce58 \uc624\ucc28 \u2264 \u00b10.5mm<\/p>\n

\uac01\ub3c4 \uc624\ucc28 \u03b8_max = \u0394x \/ r = 0.5 \/ 300 = 0.00167 rad
\n= 0.00167 \u00d7 (180 \u00d7 60 \/ \u03c0) = \ucd5c\ub300 5.7 \uc544\ud06c\ubd84<\/span><\/p>\n

\uae30\uc5b4\ubc15\uc2a4 \ubc31\ub798\uc2dc \ud5c8\uc6a9 \uc624\ucc28(\ucd1d \uc624\ucc28 40%):
\n\u03b8_\uae30\uc5b4\ubc15\uc2a4 \u2264 5.7 \u00d7 0.40 = 2.3 arcmin<\/p>\n

\u2192 \ucd9c\ub825\ucd95\uc758 \ubc31\ub798\uc2dc\uac00 2.3 arcmin \uc774\ud558\uc774\uc5b4\uc57c \ud569\ub2c8\ub2e4.
\n\u2192 P1(\u22643\u2032)\uc740 \ud55c\uacc4\uce58\uc774\uba70, \ucd5c\uc545\uc758 \uacbd\uc6b0 \uc608\uc0b0\uc744 \ucd08\uacfc\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.
\n\u2192 P0(\u22641\u2032)\uc740 2.3\ubc30\uc758 \uc5ec\uc720\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4 \u2014 \uc815\ud655\ud55c \uc0ac\uc591
\n\u2192 EP-AFH(\u22641\u2032 \ud45c\uc900)\ub294 \ub4f1\uae09 \uc9c0\uc815 \ub2e8\uacc4\ub97c \uc81c\uac70\ud569\ub2c8\ub2e4.<\/p><\/div>\n<\/div>\n

\ud55c\uad6d \uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec OEM \uc5c5\uccb4\ub4e4\uc5d0\uac8c\ub294, EP-AFH \ucd08\uc815\ubc00 \uc2dc\ub9ac\uc988<\/a> \uc138\ud0c0\ucd95\uc5d0 \ub300\ud55c \ud45c\uc900 \uad8c\uc7a5 \uc0ac\ud56d\uc740 \u22641 arcmin\uc785\ub2c8\ub2e4. \ubaa8\ub4e0 EP-AFH \uc7a5\uce58\ub294 \ud45c\uc900 \uc0ac\uc591\uc73c\ub85c \u22641 arcmin\uc744 \ucda9\uc871\ud558\uba70, \ub4f1\uae09 \ucf54\ub4dc \uc120\ud0dd\uc774\ub098 \ub4f1\uae09 \ubc94\uc704 \ub0b4 \uc7a5\uce58 \uac04 \uce21\uc815 \ubcc0\ub3d9\uc774 \uc5c6\uc2b5\ub2c8\ub2e4. \ub0a9\ud488 \uc99d\uba85\uc11c\uc5d0\ub294 \uac01 \uc7a5\uce58\uc758 \uce21\uc815\uac12\uc774 \uba85\uc2dc\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \ud655\uc7a5(\ubc29\uc0ac\ud615)\ucd95\uc758 \uacbd\uc6b0 \uc815\ubc00\ub3c4 \uc694\uad6c \uc0ac\ud56d\uc774 \ub354 \ub0ae\uc73c\uba70(\uc774\ud399\ud130 \ub05d\ub2e8\uc5d0\uc11c \u00b11 mm \ud5c8\uc6a9 \uc624\ucc28), \uc554 \ud615\uc0c1\uc5d0 \ub530\ub77c P0 \ub610\ub294 P1\uc774 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\uc628\ub3c4 \uc548\uc815\uc131 \ubc0f \uc5f4 \uc704\uce58 \uc624\ucc28: <\/strong>
\n\ud55c\uad6d\uc758 \uc6e8\uc774\ud37c \uc81c\uc870 \uacf5\uc7a5 \ud074\ub9b0\ub8f8\uc740 20\u00b0C \u00b10.1\u00b0C\uc758 \uc628\ub3c4 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc815\ubc00\ud55c \uc628\ub3c4 \uc81c\uc5b4\ub294 \uc7a5\ube44\uc758 \uc5f4\ud33d\ucc3d\uc73c\ub85c \uc778\ud55c \uc704\uce58 \uc624\ucc28 \ubc1c\uc0dd\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \ud2b9\ubcc4\ud788 \uc2dc\ud589\ub429\ub2c8\ub2e4. \uc5f4\uc801\uc73c\ub85c \uc548\uc815\uc801\uc778 \ud658\uacbd\uc758 \ud074\ub9b0\ub8f8 \uae30\uc5b4\ubc15\uc2a4\ub294 \uc5f4\ud33d\ucc3d\uc774 \uc544\ub2cc \ubc31\ub798\uc2dc\uc640 \uc5d4\ucf54\ub354 \ud574\uc0c1\ub3c4\uc5d0 \uc758\ud574 \uc81c\ud55c\ub418\ub294 \uc704\uce58 \ubc18\ubcf5\uc131\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4. \ub9e4\uc6b0 \uc548\uc815\uc801\uc778 \ud074\ub9b0\ub8f8 \uc628\ub3c4\ub294 \uadf8 \uc790\uccb4\ub85c \uc124\uacc4\uc758 \ud575\uc2ec \uc694\uc18c\uc785\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc778 \uc0b0\uc5c5 \ud604\uc7a5\uc5d0\uc11c \uc911\uc694\ud55c \ubb38\uc81c\uc778 \uae30\uc5b4\ubc15\uc2a4\uc758 \uc5f4 \ubcc0\ub3d9\uc740 \uc801\uc808\ud558\uac8c \uc81c\uc5b4\ub418\ub294 \uc81c\uc870 \uacf5\uc7a5 \ud658\uacbd\uc5d0\uc11c\ub294 \uc0ac\uc2e4\uc0c1 \ubc1c\uc0dd\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

FOUP \uc6b4\uc1a1 AGV - \uc81c\uc870 \ud604\uc7a5 \uc791\ub3d9\uc6a9 \uad6c\ub3d9 \ud720 \uc0ac\uc591<\/h2>\n

\ud55c\uad6d\uc758 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc124\uc5d0\uc11c\ub294 \uc804\uba74 \uac1c\ubc29\ud615 \ud1b5\ud569 \ud3ec\ub4dc(FOUP) \uc6b4\uc1a1\uc5d0 \uc8fc\ub85c \ucc9c\uc7a5 \ub808\uc77c \uc704\uc758 \uc624\ubc84\ud5e4\ub4dc \ud638\uc774\uc2a4\ud2b8(OHT) \uc2dc\uc2a4\ud15c\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870 \uc2dc\uc124 \ub0b4 \ubca0\uc774\ub85c FOUP\ub97c \uc774\ub3d9\uc2dc\ud0a4\uace0, \ud1b5\ud589\ub7c9\uc774 \uc801\uc740 \uad6c\uc5ed\uc5d0\uc11c\ub294 \ubc14\ub2e5 \ub808\ubca8 AGV\ub97c \uc0ac\uc6a9\ud558\uc5ec \ubca0\uc774\uc5d0\uc11c \uc7a5\ube44\ub85c \uc774\ub3d9\uc2dc\ud0b5\ub2c8\ub2e4. \ubc14\ub2e5 \ub808\ubca8 AGV\uc758 \uad6c\ub3d9 \ud720 \uae30\uc5b4\ubc15\uc2a4\ub294 \uacf5\uc815 \uc7a5\ube44\uc640 \ub3d9\uc77c\ud55c \ud074\ub9b0\ub8f8 \ud658\uacbd\uc5d0\uc11c \uc791\ub3d9\ud569\ub2c8\ub2e4.<\/p>\n

FOUP \uc6b4\uc1a1 AGV \uae30\uc5b4\ubc15\uc2a4 \uc694\uad6c \uc0ac\ud56d\uc740 \ubaa8\ub4c8 2-3\uc758 \ud074\ub9b0\ub8f8 \uc0ac\uc591\uacfc Art12\uc758 AGV\ubcc4 \uc694\uad6c \uc0ac\ud56d\uc744 \uacb0\ud569\ud569\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ucc28\ub3d9 \uad6c\ub3d9 \uc18d\ub3c4 \ub3d9\uae30\ud654(\ub9e4\uce6d \uc30d, \u22640.01% \ube44\uc728 \ubcc0\ub3d9 \uc778\uc99d\uc11c), \ub0ae\uc740 \uc791\ub3d9 \uc18c\uc74c(\uc778\uc811 \ubca0\uc774\uc758 \ub9ac\uc18c\uadf8\ub798\ud53c \uc815\ub82c\uc744 \ubc29\ud574\ud560 \uc218 \uc788\ub294 \uc74c\ud5a5 \uc9c4\ub3d9\uc740 \ubca0\uc774 \uacbd\uacc4\uc5d0\uc11c 55dB(A) \ubbf8\ub9cc\uc774\uc5b4\uc57c \ud568) \ubc0f \uc720\uc9c0 \ubcf4\uc218\uac00 \ud544\uc694 \uc5c6\ub294 \ubc00\ud3d0\ud615 \uad6c\uc870\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/p>\n

\uadf8\ub9cc\ud07c EP-KF\/KH \ud558\uc774\ud3ec\uc774\ub4dc \uc2dc\ub9ac\uc988<\/a> \ud55c\uad6d\uc0b0 AGV \uad6c\ub3d9 \ud720\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4. \uc81c\uc870 \ud658\uacbd\uc740 20\u00b0C\ub85c \uc77c\uc815\ud558\uac8c \uc720\uc9c0\ub418\uba70, \uc774\ub294 KF\/KH\uc758 \ucd5c\uc18c \uc791\ub3d9 \uc628\ub3c4\uc778 0\u00b0C\ubcf4\ub2e4 \ud6e8\uc52c \ub192\uc2b5\ub2c8\ub2e4. \ud558\uc774\ud3ec\uc774\ub4dc \uae30\uc5b4 \uc811\ucd09 \ud615\uc0c1\uc740 \ub3d9\uc77c \ud1a0\ud06c\uc5d0\uc11c \ud45c\uc900 \uc720\uc131 \uae30\uc5b4\ubcf4\ub2e4 \uc791\ub3d9 \uc18c\uc74c\uc744 \uc57d 6~8dB(A) \ub0ae\ucdb0\uc8fc\ubbc0\ub85c, \uc74c\ud5a5\uc5d0 \ubbfc\uac10\ud55c \uc81c\uc870 \ud658\uacbd\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. FOUP \uc218\uc1a1 AGV\uc758 \uacbd\uc6b0, \ud074\ub9b0\ub8f8 \uc724\ud65c\uc720 \uc635\uc158(PFPE)\uacfc FFKM \uc0e4\ud504\ud2b8 \uc530 \uc678\uc5d0\ub3c4 \ub9e4\uce6d \ud398\uc5b4 \uc18d\ub3c4 \ub3d9\uae30\ud654 \uc778\uc99d\uc11c\ub97c \uc9c0\uc815\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n

\"\ud55c\uad6d<\/p>\n

\n\n\n\n\n\n\n\n\n\n\n
\ubc18\ub3c4\uccb4 \uc7a5\ube44 \uad6c\ub3d9<\/th>\n\ubc18\ubc1c \uc694\uad6c \uc0ac\ud56d<\/th>\n\ud074\ub9b0\ub8f8 \uc0ac\uc591<\/th>\n\ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc \uc2dc\ub9ac\uc988<\/th>\n<\/tr>\n<\/thead>\n
\uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec \u03b8\ucd95(ISO 4\u20135)<\/td>\n\u22641 \uc544\ud06c\ubd84<\/td>\nPFPE + FFKM + \uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac<\/td>\nEP-AFH<\/a> + \ud074\ub9b0\ub8f8 \uc0ac\uc591<\/td>\n<\/tr>\n
\uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec \ud655\uc7a5 \ucd95(ISO 4\u20135)<\/td>\n\u22643 \uc544\ud06c\ubd84<\/td>\nPFPE + FFKM<\/td>\nEP-AB P0\/P1<\/a> + \ud074\ub9b0\ub8f8 \uc0ac\uc591<\/td>\n<\/tr>\n
FOUP AGV \uad6c\ub3d9 \ud720(ISO 6\u20137)<\/td>\n\ube44\uc728 \uc77c\uce58 \u22640.01%<\/td>\nPFPE + FKM \uc778\uc99d<\/td>\nEP-KF \ub9e4\uce6d \ud398\uc5b4<\/a> + \ud074\ub9b0\ub8f8 \uc0ac\uc591<\/td>\n<\/tr>\n
CMP \ud5e4\ub4dc \ud68c\uc804(ISO 6)<\/td>\n\u22641 \uc544\ud06c\ubd84<\/td>\nPFPE + FFKM + \uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac<\/td>\nEP-AFH + \ud074\ub9b0\ub8f8 \uc0ac\uc591<\/td>\n<\/tr>\n
\uc801\uc7ac \ud3ec\ud2b8 \uc815\ub82c \ub2e8\uacc4(ISO 5)<\/td>\n\u22641 \uc544\ud06c\ubd84<\/td>\nPFPE + FFKM + \uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac<\/td>\nEP-ABR P0<\/a> \ub610\ub294 EP-AFH + \ud074\ub9b0\ub8f8 \uc0ac\uc591<\/td>\n<\/tr>\n
Fab \uc9c0\uc6d0\/\uc720\ud2f8\ub9ac\ud2f0 \ub4dc\ub77c\uc774\ube0c(ISO 8)<\/td>\nP2 \uc801\uc808\ud568<\/td>\n\ud45c\uc900 \uc7ac\uace0<\/td>\nEP-AB P2 \ud45c\uc900 - \ud2b9\ubcc4 \uc8fc\ubb38 \ubd88\ud544\uc694<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n

<\/p>\n

\n

MRAM \uc81c\uc791 \ubc0f EUV \ub9ac\uc18c\uadf8\ub798\ud53c - \ube44\uc790\uc131 \uad6c\uc870 \uc0ac\uc591<\/h2>\n

\uc0bc\uc131\uacfc SK\ud558\uc774\ub2c9\uc2a4\uac00 \uac1c\ubc1c \uc911\uc778 \ucc28\uc138\ub300 \ucca8\ub2e8 \uacf5\uc815 \uae30\uc220\uc778 \uc790\uae30 \ub7a8(MRAM) \ubc0f \uc2a4\ud540 \uc804\ub2ec \ud1a0\ud06c \ub7a8(STT-RAM) \uc81c\uc870\uc5d0\ub294 \uc790\uae30 \ud130\ub110 \uc811\ud569(MTJ) \uce35 \uad6c\uc870\ub97c \ud615\uc131\ud558\ub294 \uc99d\ucc29 \ub2e8\uacc4 \uc804\ubc18\uc5d0 \uac78\uccd0 \uc81c\uc5b4\ub41c \uc790\uae30 \ud658\uacbd\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uce35\uc758 \ubcf4\uc790\ub825\uc740 5~50 \uc624\uc2a4\ud14c\ub4dc \ubc94\uc704\uc774\uba70, \uc99d\ucc29 \ub2e8\uacc4\uc5d0\uc11c \uc8fc\ubcc0 \uc7a5\ube44\ub85c\ubd80\ud130 \ubc1c\uc0dd\ud558\ub294 1 \uc624\uc2a4\ud14c\ub4dc \uc815\ub3c4\uc758 \ubbf8\uc138 \uc790\uae30\uc7a5\uc870\ucc28\ub3c4 MTJ \uce35 \ub0b4 \uc790\uae30 \ubaa8\uba58\ud2b8\uc758 \uc758\ub3c4\ub41c \ubc29\ud5a5\uc744 \ubc14\uafc0 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\"\ud3c9\uba74<\/p>\n

2019\ub144\ubd80\ud130 \uc0bc\uc131\uc758 \ud654\uc131 \ubc0f \ud3c9\ud0dd \uacf5\uc7a5\uc5d0 \uc124\uce58\ub41c EUV(\uadf9\uc790\uc678\uc120) \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc740 \ub098\ub178\ud14c\uc2ac\ub77c \ubbf8\ub9cc\uc758 \ubbf8\uc138 \uc790\uae30\uc7a5\uc5d0 \ubbfc\uac10\ud55c \uc804\uc790\uad11\ud559 \uceec\ub7fc\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc804\uc790 \uad11\ucd95\uc5d0\uc11c 500mm \ub5a8\uc5b4\uc9c4 \uacf3\uc5d0 \uc788\ub294 \ud45c\uc900 \uac15\ucca0 \uae30\uc5b4\ubc15\uc2a4\ub294 \uc57d 100~500nT\uc758 \ubbf8\uc138 \uc790\uae30\uc7a5\uc744 \ubc1c\uc0dd\uc2dc\ud0a4\ub294\ub370, \uc774\ub294 \uc2dc\uc2a4\ud15c\uc758 \uc790\uae30\uc7a5 \uc548\uc815\uc131 \uc694\uad6c \uc870\uac74\ubcf4\ub2e4 2~4\ubc30 \ub192\uc740 \uc218\uce58\uc785\ub2c8\ub2e4.<\/p>\n

\n
\uae30\uc5b4\ubc15\uc2a4 \ud558\uc6b0\uc9d5 \uc7ac\uc9c8\ubcc4 \uc790\uae30 \ud22c\uacfc\uc728 \ube44\uad50<\/div>\n
\n
\n
\ud45c\uc900 \ud0c4\uc18c\uac15(\uac15\uc790\uc131\uccb4)<\/span>
\n\u03bc\u1d63 \u2248 100\u20131,000 \u2014 \uc790\uae30\uc7a5\uc5d0 \ubbfc\uac10\ud55c \uc9c0\uc5ed\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\uc74c<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
\ud569\uae08\uac15(\ubca0\uc5b4\ub9c1\uac15)<\/span>
\n\u03bc\u1d63 \u2248 50\u2013200 \u2014 \uc790\uae30\uc7a5\uc5d0 \ubbfc\uac10\ud55c \uc9c0\uc5ed\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\uc74c<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
\uc624\uc2a4\ud14c\ub098\uc774\ud2b8\uacc4 SS316L(\ube44\uc790\uc131 \uc2a4\ud14c\uc778\ub9ac\uc2a4\uac15)<\/span>
\n\u03bc\u1d63 \u2248 1.003 \u2014 \ub300\ubd80\ubd84\uc758 \uc81c\uc870 \uad6c\uc5ed\uc5d0\uc11c \ud5c8\uc6a9 \uac00\ub2a5\ud55c \uac12<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
6061-T6 \uc54c\ub8e8\ubbf8\ub284<\/span>
\n\u03bc\u1d63 \u2248 1.000006 \u2014 \ubb34\uc2dc\ud560 \uc218 \uc788\ub294 \uc790\uae30 \uc2e0\ud638<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n<\/div>\n

\uc0c1\ub300 \uc790\uae30 \ud22c\uacfc\uc728 \u03bc\u1d63. \uac12\uc774 \ub0ae\uc744\uc218\ub85d \uc790\uae30 \uc2e0\ud638\uac00 \uc57d\ud574\uc9d1\ub2c8\ub2e4. \ud45c\uc900 \uac15\ucca0 \uae30\uc5b4\ubc15\uc2a4\ub294 \ub3d9\uc77c \uac70\ub9ac\uc5d0\uc11c \uc54c\ub8e8\ubbf8\ub284 \ud558\uc6b0\uc9d5 \uae30\uc5b4\ubc15\uc2a4\ubcf4\ub2e4 \uc57d 1,000\ubc30 \ub354 \ub192\uc740 \ub204\uc124 \uc790\uae30\uc7a5\uc744 \ubc1c\uc0dd\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<\/div>\n

MRAM \ubc0f EUV \ubd84\uc57c\uc5d0\uc11c \ud65c\ub3d9\ud558\ub294 \ud55c\uad6d \uc7a5\ube44 \uacf5\uae09\uc5c5\uccb4, \ud2b9\ud788 \uc18c\ud615 \uc2a4\ud14c\uc774\uc9d5 \uc2dc\uc2a4\ud15c\uc744 \uc124\uacc4\ud558\ub294 \uc5c5\uccb4\ub4e4\uc744 \uc704\ud574 EP-ADS \ucef4\ud329\ud2b8 \uc2dc\ub9ac\uc988<\/a>\ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc(Ever-Power) EP \uc2dc\ub9ac\uc988 \uae30\uc5b4\ubc15\uc2a4\ub294 \ud558\uc6b0\uc9d5\uacfc \uc720\uc131\uae30\uc5b4 \uce90\ub9ac\uc5b4 \ubd80\ud488 \ubaa8\ub450 \uc54c\ub8e8\ubbf8\ub284 \ud558\uc6b0\uc9d5 \uc635\uc158\uc744 \uc120\ud0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub2e8, \ub0b4\ubd80\uc758 \uac15\ucca0 \uae30\uc5b4 \uc694\uc18c(\uc720\uc131\uae30\uc5b4, \ub9c1\uae30\uc5b4, \ud0dc\uc591\uae30\uc5b4)\ub294 \uc815\ubc00 \uae30\uc5b4 \uc81c\uc870\uc0c1 \ubd88\uac00\ud53c\ud558\uac8c \uac15\ucca0\ub85c \uc81c\uc791\ub429\ub2c8\ub2e4. \uac15\ucca0 \uae30\uc5b4 \uc694\uc18c\ub294 \uace0\uc18d \ud68c\uc804\ud558\uc5ec \uc815\uc790\uae30\uc7a5 \uae30\uc5ec\ub3c4\ub97c \uc904\uc774\uace0 \uc678\ubd80 \ud558\uc6b0\uc9d5\uc5d0 \uc758\ud574 \uc0c1\ub2f9 \ubd80\ubd84 \ucc28\ud3d0\ub418\ubbc0\ub85c \ud558\uc6b0\uc9d5\ubcf4\ub2e4 \uc790\uae30 \uc2e0\ud638\uac00 \ud6e8\uc52c \uc791\uc2b5\ub2c8\ub2e4. \uc138\ub77c\ubbf9 \ub610\ub294 \ud2f0\ud0c0\ub284 \uae30\uc5b4 \uc694\uc18c\ub97c \ud3ec\ud568\ud55c \uc644\uc804 \ube44\uc790\uc131 \uad6c\uc870\ub294 \uc5b4\ub5a4 \uc81c\uc870\uc5c5\uccb4\uc758 \ud45c\uc900 \uce74\ud0c8\ub85c\uadf8 \uc81c\ud488\uc5d0\uc11c\ub3c4 \uc81c\uacf5\ub418\uc9c0 \uc54a\ub294 \ub9de\ucda4\ud615 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc791\uc5c5\uc785\ub2c8\ub2e4.<\/p>\n<\/section>\n

<\/p>\n

\n

\uc0bc\uc131 \ubc0f SK\ud558\uc774\ub2c9\uc2a4 \uacf5\uae09\ub9dd - \uc7a5\ube44 \uc778\uc99d\uc744 \uc704\ud55c \ubb38\uc11c \uc694\uad6c \uc0ac\ud56d<\/h2>\n

\uc0bc\uc131(\ud3c9\ud0dd, \ud654\uc131, \uae30\ud765)\uacfc SK\ud558\uc774\ub2c9\uc2a4(\uccad\uc8fc, \uc774\ucc9c)\uc5d0 \uc785\ucc30\ud558\ub294 \ud55c\uad6d \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uacf5\uae09\uc5c5\uccb4\ub294 \ub2e4\ub2e8\uacc4 \uacf5\uae09\uc5c5\uccb4 \uc2b9\uc778 \uc808\ucc28\ub97c \ud1b5\ud574 \uc7a5\ube44\ub97c \uac80\uc99d\ubc1b\uc544\uc57c \ud569\ub2c8\ub2e4. \uae30\uc5b4\ubc15\uc2a4\ub97c \ud3ec\ud568\ud55c \uad6c\ub3d9 \ubd80\ud488\uc5d0 \ub300\ud55c \ubd80\ud488 \uc218\uc900\uc758 \ubb38\uc11c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c IQ(\uc124\uce58 \uac80\uc99d) \ub2e8\uacc4\uc5d0\uc11c \uc694\uad6c\ub429\ub2c8\ub2e4. \ud544\uc694\ud55c \ubb38\uc11c \ud328\ud0a4\uc9c0\ub294 \uacf5\uc815 \uad6c\uc5ed \ud074\ub9b0\ub8f8 \ub4f1\uae09\uacfc \uc7a5\ube44 \uc720\ud615\uc5d0 \ub530\ub77c \ub2e4\ub974\uc9c0\ub9cc, ISO 4~5 \ub4f1\uae09 \uad6c\uc5ed\uc758 \uc815\ubc00 \uad6c\ub3d9 \ubd80\ud488\uc5d0 \ub300\ud55c \ud45c\uc900 \ud328\ud0a4\uc9c0\uc5d0\ub294 \ub2e4\uc74c \ud56d\ubaa9\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/p>\n

\n
\n
\u2460 \ud074\ub9b0\ub8f8 \uc790\uc7ac \uc778\uc99d<\/div>\n

\uc81c\uc870\uc5c5\uccb4\uac00 \ubaa8\ub4e0 \uc790\uc7ac(\ud558\uc6b0\uc9d5, \uc530, \uc724\ud65c\uc720)\uac00 \uc81c\uc870 \uacf5\uc7a5\uc758 \uc790\uc7ac \uc0ac\uc591\uc744 \ucda9\uc871\ud55c\ub2e4\ub294 \uc11c\uba74 \uc9c4\uc220\uc11c. PFPE \uc724\ud65c\uc720\uc758 \uacbd\uc6b0: PFPE \ub4f1\uae09 \ubc0f \uacf5\uae09\uc5c5\uccb4\uba85 \ud3ec\ud568. FFKM \uc530\uc758 \uacbd\uc6b0: \ubd88\uc18c\uc218\uc9c0 \uc0ac\uc591 \ud655\uc778. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \uc774 \uc9c4\uc220\uc11c\ub97c \ud55c\uad6d\uc5b4\ub85c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n
\u2461 \uac00\uc2a4 \ubc29\ucd9c \uc2dc\ud5d8 \ub370\uc774\ud130<\/div>\n

ASTM E1603 \ub610\ub294 \ub3d9\ub4f1\ud55c \uaddc\uaca9\uc5d0 \ub530\ub978 \uc724\ud65c\uc720 \ubc0f \uc530 \uc7ac\uc9c8\uc758 \uac00\uc2a4 \ubc29\ucd9c \uc2dc\ud5d8 \uacb0\uacfc(20~25\u00b0C). \ucd1d \uc9c8\ub7c9 \uc190\uc2e4(TML) \ubc0f \uc218\uc9d1\ub41c \ud718\ubc1c\uc131 \uc751\ucd95 \ubb3c\uc9c8(CVCM)\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. PFPE \uadf8\ub9ac\uc2a4\uc758 \uacbd\uc6b0, \uc774\ub7ec\ud55c \uac12\uc740 \uc77c\ubc18\uc801\uc73c\ub85c <0.01% TML \ubc0f <0.001% CVCM\uc73c\ub85c, \ud45c\uc900 \uc81c\uc870 \ud55c\ub3c4 \ub0b4\uc5d0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n
\u2462 \ubc31\ub798\uc2dc \uce21\uc815 \uc778\uc99d\uc11c<\/div>\n

\ub2e8\uc704\ubcc4 \uce21\uc815\ub41c \ubc31\ub798\uc2dc \uac12(\ub4f1\uae09 \uc801\ud569\uc131 \ud45c\uc2dc\ubfd0 \uc544\ub2c8\ub77c \uc2e4\uc81c \uac12)\uc744 \uc81c\uacf5\ud574\uc57c \ud569\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \ubaa8\ub4e0 EP-AFH \ubaa8\ub378\uacfc P0 \ubc0f P1 \ub4f1\uae09\uc758 EP-AB\/AF \ubaa8\ub378\uc5d0 \ub300\ud574 \uc774 \uac12\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc704\uce58 \uacb0\uc815\uc5d0 \uc911\uc694\ud55c \uad6c\ub3d9\ucd95\uc758 IQ \ubb38\uc11c\ud654\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n
\u2463 RoHS \ubc0f REACH \uc900\uc218 \uc120\uc5b8<\/div>\n

\uae30\uc5b4\ubc15\uc2a4\uc5d0 EU RoHS 2(2011\/65\/EU \uac1c\uc815\ud310) \ubc0f REACH(EC 1907\/2006) SVHC \ubaa9\ub85d\uc5d0 \uae08\uc9c0\ub41c \ubb3c\uc9c8\uc774 \ud3ec\ud568\ub418\uc5b4 \uc788\uc9c0 \uc54a\uc74c\uc744 \uc11c\uba74\uc73c\ub85c \ud655\uc778\ud558\ub294 \uc11c\ub958\uc785\ub2c8\ub2e4. \ub2e4\uad6d\uc801 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc5c5\uccb4\uc5d0 \ud310\ub9e4\ub418\ub294 \uc7a5\ube44\uc5d0 \ud544\uc218\uc801\uc73c\ub85c \uc694\uad6c\ub418\ub294 \uc11c\ub958\uc785\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \ud074\ub9b0\ub8f8 \uc8fc\ubb38 \uc2dc \uc774 \uc11c\ub958\ub97c \ud45c\uc900\uc73c\ub85c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n
\u2464 \uce58\uc218 \ub3c4\uba74 (PDF, \ud55c\uad6d\uc5b4 + \uc601\uc5b4)<\/div>\n

\uc124\uce58 \uc801\uaca9\uc131 \ud3c9\uac00\ub97c \uc704\ud55c \uacf5\ucc28 \ud3ec\ud568 \uc804\uccb4 \uce58\uc218 \ub3c4\uba74. IQ\/OQ \ud504\ub85c\ud1a0\ucf5c \ubb38\uc11c \uc791\uc131\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \ubaa8\ub4e0 EP \uc2dc\ub9ac\uc988 \ubaa8\ub378\uc5d0 \ub300\ud574 \uc8fc\ubb38 \uc811\uc218 \ud6c4 3\uc601\uc5c5\uc77c \uc774\ub0b4\uc5d0 \uc774 \ub3c4\uba74\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n
\u2465 \ub9e4\uce6d \ud398\uc5b4 \ube44\uc728 \uc778\uc99d\uc11c (AGV \uc804\uc6a9)<\/div>\n

\ucc28\ub3d9 \uad6c\ub3d9 \ubc29\uc2dd\uc758 FOUP AGV\uc758 \uacbd\uc6b0, \ub450 \uad6c\ub3d9 \ud720 \uae30\uc5b4\ubc15\uc2a4 \uac04\uc758 \uae30\uc5b4\ube44 \ucc28\uc774\uac00 \u22640.01%\uc784\uc744 \ud655\uc778\ud558\ub294 \uae30\uc5b4\ube44 \ubcc0\ub3d9 \uc778\uc99d\uc11c\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \ub9e4\uce6d \ud398\uc5b4 AGV \uc8fc\ubb38 \uc2dc \uc774 \uc778\uc99d\uc11c\ub97c \uae30\ubcf8 \uc635\uc158\uc73c\ub85c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<\/div>\n<\/div>\n

\ud55c\uad6d \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc124\ube44 \ud504\ub85c\uc81d\ud2b8\uc758 \uc870\ub2ec \uc2dc\uae30: <\/strong>
\n\uc0bc\uc131\uacfc SK\ud558\uc774\ub2c9\uc2a4\uc758 \uc7a5\ube44 \uc778\uc99d \uc8fc\uae30\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc7a5\ube44 \uc124\uacc4 \ud655\uc815\ubd80\ud130 \uacf5\uc7a5 \ucd9c\ud558 \uc2b9\uc778\uae4c\uc9c0 6~12\uac1c\uc6d4\uc774 \uc18c\uc694\ub429\ub2c8\ub2e4. \uae30\uc5b4\ubc15\uc2a4 \uad00\ub828 \ubb38\uc11c \ud328\ud0a4\uc9c0\ub294 IQ \ub2e8\uacc4, \uc989 \uc778\uc99d \uc8fc\uae30 \uc2dc\uc791 \ud6c4 4~6\uac1c\uc6d4 \uc2dc\uc810\uc5d0 \ud544\uc694\ud569\ub2c8\ub2e4. \ud074\ub9b0\ub8f8\uc6a9 \uae30\uc5b4\ubc15\uc2a4(PFPE + FFKM, \ub0a9\uae30 2~4\uc8fc)\uc758 \uacbd\uc6b0, IQ \ubb38\uc11c \uc81c\ucd9c \uc694\uad6c \uc2dc\uc810\uc73c\ub85c\ubd80\ud130 \ub2a6\uc5b4\ub3c4 10\uc8fc \uc804\uc5d0\ub294 \uc8fc\ubb38\uc744 \uc644\ub8cc\ud574\uc57c \ud569\ub2c8\ub2e4. \ud2b9\uc815 \uacf5\uc7a5 \uad6c\uc5ed \ubc0f \ud074\ub9b0\ub8f8 \ub4f1\uae09\uc5d0 \ub9de\ub294 \ubb38\uc11c\uc758 \uac00\uc6a9\uc131\uacfc \ub0a9\uae30\ub97c \ud655\uc778\ud558\ub824\uba74 \uad6c\ub9e4 \ub2e8\uacc4\uac00 \uc544\ub2cc \uc124\uacc4 \ub2e8\uacc4\uc5d0\uc11c \ud55c\uad6d\uc5d0\ubc84\ud30c\uc6cc\uc5d0 \ubb38\uc758\ud558\uc2ed\uc2dc\uc624.<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\uac00\uc2a4 \ubc29\ucd9c \uc608\uc0b0 \uacc4\uc0b0 - \ud45c\uc900 \uadf8\ub9ac\uc2a4 \ub610\ub294 PFPE \uadf8\ub9ac\uc2a4 \uc911 \uc5b4\ub5a4 \uac83\uc774 \ud544\uc694\ud55c\uc9c0 \ud310\ub2e8\ud558\ub294 \ubc29\ubc95<\/h2>\n

\ud45c\uc900 \ubc00\ubd09 \uadf8\ub9ac\uc2a4\uc640 PFPE \ud074\ub9b0\ub8f8 \uc724\ud65c\uc720 \uc911 \uc5b4\ub5a4 \uac83\uc744 \uc120\ud0dd\ud560\uc9c0\ub294 \uae30\uc5b4\ubc15\uc2a4\uac00 \ud074\ub9b0\ub8f8 \uacf5\uae30\uc5d0 \ubc29\ucd9c\ud558\ub294 \uac00\uc2a4\ub7c9\uacfc \ub178\ucd9c\ub41c \uc6e8\uc774\ud37c \ud45c\uba74\uacfc\uc758 \uadfc\uc811\uc131\uc5d0 \ub530\ub77c \uacb0\uc815\ub429\ub2c8\ub2e4. \ub2e4\uc74c \uacc4\uc0b0 \ubc29\uc2dd\uc744 \ud1b5\ud574 \ud55c\uad6d \uc7a5\ube44 \uacf5\uae09\uc5c5\uccb4\ub294 \ubd88\ud544\uc694\ud55c \ube44\uc6a9 \uc99d\uac00\ub97c \ucd08\ub798\ud560 \uc218 \uc788\ub294 \ubcf4\uc218\uc801\uc778 \uae30\ubcf8\uac12 \ub300\uc2e0 \uc815\ub7c9\uc801\uc73c\ub85c \uacb0\uc815\uc744 \ub0b4\ub9b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\n

\uac00\uc2a4 \ubc29\ucd9c \uc624\uc5fc \uc608\uc0b0 - \ub2e8\uc21c\ud654 \ubaa8\ub378<\/p>\n

\ub2e8\uc77c \uae30\uc5b4\ubc15\uc2a4\uc5d0\uc11c \uc6e8\uc774\ud37c D\uc5d0 \ub300\ud55c \uc99d\ucc29 \uc18d\ub3c4(ng\/cm\u00b2\/hr):<\/p>\n

D \u2248 P_vap \u00d7 M_grease \u00d7 k_geom \/ (R \u00d7 T)<\/p>\n

\uc5b4\ub514:
\nP_vap = 20\u00b0C\uc5d0\uc11c\uc758 \uc724\ud65c\uc720 \uae30\uc720\uc758 \uc99d\uae30\uc555 (Pa)
\nM_grease = \ub178\ucd9c\ub41c \uadf8\ub9ac\uc2a4 \ud45c\uba74\uc801(cm\u00b2)
\nk_geom = \uae30\ud558\ud559\uc801 \uc778\uc790 (\uac70\ub9ac\uc640 \uac01\ub3c4\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9c0\uba70, \uc57d 10\u207b\u2075 ~ 10\u207b\u00b3)
\nR, T = \uae30\uccb4 \uc0c1\uc218, \uc628\ub3c4<\/p>\n

\ubbf8\ub124\ub784 \uc624\uc77c PAO(\ud45c\uc900): P_vap \u2248 10\u207b\u00b3 Pa
\n\u2192 D \u2252 300mm \uac70\ub9ac\uc5d0\uc11c 0.05\u20130.5 ng\/cm\u00b2\/hr
\n\u2192 24\uc2dc\uac04 \uc774\uc0c1 \uacbd\uacfc \ud6c4: \uc6e8\uc774\ud37c \uc0c1\uc5d0 1.2\u201312 ng\/cm\u00b2 \ucd95\uc801 \u2190 ISO 5 \uae30\uc900 \ubbf8\ub2ec<\/p>\n

PFPE(\ud074\ub9b0\ub8f8 \ub4f1\uae09): P_vap \u2248 10\u207b\u00b9\u2070 Pa
\n\u2192 D < 10\u207b\u2077 ng\/cm\u00b2\/hr \u2014 7\ubc30 \ub354 \ub0ae\uc74c
\n\u2192 \ud45c\uc900 \ubd84\uc11d \ubc29\ubc95\uc73c\ub85c\ub294 \uce21\uc815\ud560 \uc218 \uc5c6\uc74c \u2713<\/p><\/div>\n<\/div>\n

\uc774 \uacc4\uc0b0 \uacb0\uacfc\ub294 \ub178\ucd9c\ub41c \uc6e8\uc774\ud37c\uac00 \uc2dc\uc57c\uc5d0 \ub4e4\uc5b4\uc624\ub294 \ubaa8\ub4e0 \uae30\uc5b4\ubc15\uc2a4\uc5d0 PFPE \uadf8\ub9ac\uc2a4\ub97c \uc0ac\uc6a9\ud558\ub294 \uac83\uc774 \ub2e8\uc21c\ud788 \uc120\ud638 \uc0ac\ud56d\uc774 \uc544\ub2c8\ub77c \ud544\uc218 \uc0ac\ud56d\uc778 \uc774\uc720\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \uc77c\ubc18 \uadf8\ub9ac\uc2a4\uc758 \uc99d\uae30\uc555\uc740 PFPE\ubcf4\ub2e4 7\ubc30\ub098 \ub192\uc2b5\ub2c8\ub2e4. \uc5b4\ub5a4 \uae30\ud558\ud559\uc801 \uc694\uc18c\ub098 \uac70\ub9ac \uc124\uc815\ub3c4 \uc774\ub7ec\ud55c \uadfc\ubcf8\uc801\uc778 \ucc28\uc774\ub97c \uc0c1\uc1c4\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc6e8\uc774\ud37c\uac00 \ub300\uae30\uc5d0 \ub178\ucd9c\ub420 \uc218 \uc788\ub294 ISO 3~6 \ub4f1\uae09 \uad6c\uc5ed\uc758 \ubaa8\ub4e0 \uae30\uc5b4\ubc15\uc2a4\uc5d0\uc11c PFPE \uadf8\ub9ac\uc2a4\ub294 \uc120\ud0dd \uc0ac\ud56d\uc774 \uc544\ub2c8\ub77c \ud544\uc218 \uc694\uad6c \uc0ac\ud56d\uc785\ub2c8\ub2e4.<\/p>\n

\"\uc720\uc131<\/p>\n

\ubc18\ub3c4\uccb4 \uc124\ube44\uc5d0\uc11c \ud45c\uc900 \uc724\ud65c\uc720 \uc0ac\uc6a9\uc774 \ud5c8\uc6a9\ub418\ub294 \uacbd\uc6b0: <\/strong>
\n\uc6e8\uc774\ud37c\uac00 \uc804\ud600 \uc5c6\ub294 ISO Class 8 \uc774\ud558 \uad6c\uc5ed(\ud339 \uc9c0\uc6d0 \ud1b5\ub85c, \uc720\ud2f8\ub9ac\ud2f0\uc2e4, \uc7a5\ube44 \ud558\ubd80 \ubc14\ub2e5)\uc5d0 \uc124\uce58\ub41c \uae30\uc5b4\ubc15\uc2a4\ub294 PFPE \uc724\ud65c\uc720\uac00 \ud544\uc694\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uad6c\uc5ed\uc5d0\ub294 \ud45c\uc900 \uadf8\ub9ac\uc2a4\ub97c \uc0ac\uc6a9\ud558\ub294 \ud45c\uc900 EP-AB \ub610\ub294 EP-BPG \uc2dc\ub9ac\uc988\uac00 \uc801\ud569\ud558\uace0 \ube44\uc6a9 \ud6a8\uc728\uc801\uc778 \uc0ac\uc591\uc785\ub2c8\ub2e4. PFPE \ucd94\uac00 \ube44\uc6a9(\uc77c\ubc18\uc801\uc73c\ub85c \ub2e8\uc704\ub2f9 30~50% \ub354 \ub192\uc74c)\uc740 \uc6e8\uc774\ud37c \ub178\ucd9c \uac00\ub2a5\uc131\uc774 \uc788\ub294 \uad6c\uc5ed\uc5d0 \uc788\ub294 \uae30\uc5b4\ubc15\uc2a4\uc5d0\ub9cc \uc815\ub2f9\ud654\ub429\ub2c8\ub2e4. \uad6c\uc5ed\uacfc \uad00\uacc4\uc5c6\uc774 \ud339 \uc2dc\uc124 \ub0b4 \ubaa8\ub4e0 \uae30\uc5b4\ubc15\uc2a4\uc5d0 \ud074\ub9b0\ub8f8 \uc0ac\uc591\uc744 \uc801\uc6a9\ud558\ub294 \uac83\uc740 \uae30\ub2a5\uc801 \uc774\uc810 \uc5c6\uc774 \ubd88\ud544\uc694\ud558\uac8c BOM \ube44\uc6a9\uc744 \uc99d\uac00\uc2dc\ud0b5\ub2c8\ub2e4.<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\ud55c\uad6d \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc720\uc131 \uae30\uc5b4\ubc15\uc2a4 \uad00\ub828 \uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n
\n
\n

\ud050<\/span>
\n\uc800\ud76c \ud55c\uad6d \uace0\uac1d\uc0ac(\uc0bc\uc131\uc5d0 \ubc18\ub3c4\uccb4 \uc7a5\ube44\ub97c \uacf5\uae09\ud558\ub294 OEM \uc5c5\uccb4)\uc5d0\uc11c \"\uc785\uc790 \uc5c6\ub294\" \uae30\uc5b4\ubc15\uc2a4 \uc0ac\uc591\uc744 \uc694\uad6c\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\uac83\uc774 \uc2e4\uc81c\ub85c \uc815\ud655\ud788 \ubb34\uc5c7\uc744 \uc758\ubbf8\ud558\ub294 \uac74\uac00\uc694?<\/h3>\n

\ud55c\uad6d \uc81c\uc870 \uc870\ub2ec \uc5c5\uacc4\uc5d0\uc11c \"\ubbf8\ub9bd\uc790 \uc5c6\uc74c\"\uc774\ub77c\ub294 \uc6a9\uc5b4\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uae30\uc5b4\ubc15\uc2a4\uac00 \ud074\ub9b0\ub8f8 \ud658\uacbd\uc73c\ub85c \ud2b9\uc815 \ud06c\uae30 \ubc0f \uacc4\uc218\uc728 \uc774\uc0c1\uc758 \ubbf8\ub9bd\uc790\ub97c \ubc29\ucd9c\ud558\uc9c0 \uc54a\uc544\uc57c \ud55c\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud558\uba70, \ub9d0 \uadf8\ub300\ub85c \ubbf8\ub9bd\uc790\uac00 \uc804\ud600 \ubc1c\uc0dd\ud558\uc9c0 \uc54a\ub294\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud558\ub294 \uac83\uc740 \uc544\ub2d9\ub2c8\ub2e4. \uc2e4\uc9c8\uc801\uc778 \uc0ac\uc591\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ud2b9\uc815 \uac70\ub9ac \ubc0f \uacf5\uae30 \ud750\ub984 \uc870\uac74\uc5d0\uc11c\uc758 \ucd5c\ub300 \ubbf8\ub9bd\uc790 \ubc1c\uc0dd\ub960 \ub610\ub294 \ud558\uc6b0\uc9d5\uacfc \uc530\uc774 \ud574\ub2f9 \uc124\uce58 \ud658\uacbd\uc5d0 \ub300\ud55c \ud074\ub9b0\ub8f8\uc758 \ubbf8\ub9bd\uc790 \ub18d\ub3c4 \ud5c8\uc6a9\uce58\ub97c \ucd08\uacfc\ud558\ub294 \uc18d\ub3c4\ub85c 0.1\u03bcm \uc774\uc0c1\uc758 \ubbf8\ub9bd\uc790\ub97c \ubc29\ucd9c\ud558\uc9c0 \uc54a\ub294\ub2e4\ub294 \uc7ac\uc9c8 \uc801\ud569\uc131 \uc9c4\uc220\ub85c \ud45c\ud604\ub429\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 (1) \uadf8\ub9ac\uc2a4 \ubbf8\ub9bd\uc790 \uc774\ub3d9\uc744 \ubc29\uc9c0\ud558\ub294 \ubc00\ud3d0 \uad6c\uc870\uc758 PFPE \uc724\ud65c\uc720, (2) \uc791\ub3d9 \uc628\ub3c4 \ubc94\uc704 \uc804\uccb4\uc5d0\uc11c \ubc00\ud3d0\uc131\uc744 \uc720\uc9c0\ud558\ub294 FFKM \uc0e4\ud504\ud2b8 \uc530, (3) \ud398\uc778\ud2b8 \ubbf8\ub9bd\uc790\uac00 \ubc29\ucd9c\ub418\uc9c0 \uc54a\ub294 \uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac\ub41c \uc54c\ub8e8\ubbf8\ub284 \ud558\uc6b0\uc9d5\uc744 \ud1b5\ud574 \uc774\ub7ec\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4. \uc2dc\uc2a4\ud15c \uc218\uc900(\uc7a5\ube44\uc5d0 \uc124\uce58\ub418\uc5b4 \ud074\ub9b0\ub8f8 \uc870\uac74\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uae30\uc5b4\ubc15\uc2a4)\uc5d0\uc11c\uc758 \uc804\uccb4 \ubbf8\ub9bd\uc790 \ubc1c\uc0dd \ud14c\uc2a4\ud2b8\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uae30\uc5b4\ubc15\uc2a4 \uacf5\uae09\uc5c5\uccb4\uac00 \uc544\ub2cc \ud55c\uad6d \uc7a5\ube44 OEM\uc5d0\uc11c \uc218\ud589\ud569\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n

\ud050<\/span>
\n\uc800\ud76c\ub294 \ud55c\uad6d \uc6e8\uc774\ud37c \uc81c\uc870 \uacf5\uc7a5\uc758 CMP(\ud654\ud559 \uae30\uacc4\uc801 \ud3c9\ud0c4\ud654) \ud5e4\ub4dc \ud68c\uc804 \uad6c\ub3d9 \uc7a5\uce58\ub97c \uc124\uacc4\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uad6c\uccb4\uc801\uc778 \uae30\uc5b4\ubc15\uc2a4 \uad6c\uc131\uc740 \uc5b4\ub5bb\uac8c \ub418\ub098\uc694?<\/h3>\n

CMP \ud5e4\ub4dc \ud68c\uc804 \uad6c\ub3d9 \uc7a5\uce58\ub294 \uc5f0\ub9c8 \ud5e4\ub4dc\ub97c \ud50c\ub798\ud2bc \uc704\uc5d0 \uc704\uce58\uc2dc\ud0a4\uace0 \uc5f0\ub9c8 \uacf5\uc815 \ub3d9\uc548 \ud68c\uc804\uc2dc\ud0b5\ub2c8\ub2e4. \uad6c\ub3d9 \uc7a5\uce58\uc758 \uc694\uad6c \uc0ac\ud56d\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. \uc801\ub2f9\ud55c \uc18d\ub3c4(30~150rpm), \uc801\ub2f9\ud55c \ud1a0\ud06c(\ud5e4\ub4dc \ud06c\uae30 \ubc0f \uc2ac\ub7ec\ub9ac \uc885\ub958\uc5d0 \ub530\ub77c 50~300N\u00b7m), \ud5e4\ub4dc \uc778\ub371\uc2a4 \uc704\uce58 \uc9c0\uc815\uc744 \uc704\ud55c 1 arcmin \uc774\ud558\uc758 \uc815\ubc00\ub3c4, \uadf8\ub9ac\uace0 \ud074\ub9b0\ub8f8 \ud658\uacbd\uacfc\uc758 \ud638\ud658\uc131(\uc5f0\ub9c8 \uc911 \ud5e4\ub4dc\uac00 \ub178\ucd9c\ub41c \uc6e8\uc774\ud37c \ud45c\uba74 \uc704\uc5d0\uc11c \uc791\ub3d9\ud568). EP-AFH \uc2dc\ub9ac\uc988\ub294 1 arcmin \uc774\ud558\uc758 \uc815\ubc00\ub3c4\ub97c \ud45c\uc900\uc73c\ub85c \uc81c\uacf5\ud558\uba70, \ucef4\ud329\ud2b8\ud55c \ubc00\ud3d0\ud615 \uad6c\uc870\ub97c \uac16\ucd94\uace0 \uc788\uace0, ISO Class 5~6 CMP \ubca0\uc774 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uae30 \uc704\ud574 PFPE \uadf8\ub9ac\uc2a4 \ubc0f FFKM \uc530\uc744 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc5b4 \uad8c\uc7a5 \uc0ac\uc591\uc785\ub2c8\ub2e4. \ud2b9\ud788 \ud68c\uc804\ucd95\uc758 \uacbd\uc6b0, EP-AFH \uc778\ub77c\uc778 \uc2dc\ub9ac\uc988\ub294 \uc9c1\uac01 \uad6c\uc131\ubcf4\ub2e4 \uc120\ud638\ub418\ub294\ub370, \uc774\ub294 \ucef4\ud329\ud2b8\ud55c \ucd95 \uae38\uc774\ub85c \uc778\ud574 \ud5e4\ub4dc \ubb34\uac8c\uac00 \uae30\uc5b4\ubc15\uc2a4 \ucd9c\ub825 \ubca0\uc5b4\ub9c1\uc5d0 \uac00\ud558\ub294 \ubaa8\uba58\ud2b8 \uc554\uc774 \uac10\uc18c\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n

\ud050<\/span>
\n\ud604\uc7ac \uc800\ud76c \ubcc0\uc18d\uae30\ub294 \ud45c\uc900 \ubc00\ubd09 \uadf8\ub9ac\uc2a4\ub97c \uc0ac\uc6a9\ud558\uace0 \uc788\uc73c\uba70, \ud55c\uad6d\uc5d0\uc11c \uc81c\uc870\ub41c \uc81c\ud488\uc73c\ub85c 18\uac1c\uc6d4 \ub3d9\uc548 \uc624\uc5fc \uc0ac\ub840 \uc5c6\uc774 \uc798 \uc791\ub3d9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. PFPE \uadf8\ub9ac\uc2a4\ub85c \uad50\uccb4\ud574\uc57c \ud560\uae4c\uc694?<\/h3>\n

\uc624\uc5fc \ubc1c\uc0dd\uc774 \uac10\uc9c0\ub418\uc9c0 \uc54a\uc558\ub2e4\uace0 \ud574\uc11c \uc624\uc5fc\uc774 \uc5c6\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud558\uc9c0\ub294 \uc54a\uc2b5\ub2c8\ub2e4. \uae30\uc5b4\ubc15\uc2a4\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uac00\uc2a4 \ubc29\ucd9c\ub85c \uc778\ud55c \ud074\ub9b0\ub8f8 \ud654\ud559 \uc624\uc5fc\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc624\uc5fc \ubc1c\uc0dd \ud6c4 \uba87 \ub2ec\uc774 \uc9c0\ub098\uc11c\uc57c \uc218\uc728 \ubd84\uc11d\uc744 \ud1b5\ud574 \uac10\uc9c0\ub418\uba70, \uc2e4\uc2dc\uac04\uc73c\ub85c \uac10\uc9c0\ub418\uc9c0\ub294 \uc54a\uc2b5\ub2c8\ub2e4. \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uc218\uc728\uc774 95%\uc5d0 \ub2ec\ud558\ub294 \ud339\uc774\ub77c\ub3c4 \ud2b9\uc815 \uc624\uc5fc\uc6d0\uc744 \ucd94\uc801\ud558\uc9c0 \ubabb\ud55c \ucc44 \uc720\uae30 \ud45c\uba74 \uc624\uc5fc\uc73c\ub85c \uc778\ud574 2~3%\uc758 \uc218\uc728 \uc190\uc2e4\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uc5b4\ubc15\uc2a4\uac00 \ub178\ucd9c\ub41c \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0\uc11c 1~2\ubbf8\ud130 \uc774\ub0b4\uc758 ISO Class 5 \uc774\uc0c1 \uad6c\uc5ed\uc5d0 \uc704\uce58\ud55c \uacbd\uc6b0, \ubaa8\ub4c8 8\uc758 \uac00\uc2a4 \ubc29\ucd9c \uacc4\uc0b0\uc774 \uc801\uc6a9\ub429\ub2c8\ub2e4. \ud45c\uc900 \uad11\ubb3c\uc720 \uadf8\ub9ac\uc2a4\uc758 \uc99d\ucc29 \uc18d\ub3c4\ub294 \ubb3c\ub9ac\uc801\uc73c\ub85c \uce21\uc815 \uac00\ub2a5\ud558\uba70 \ud074\ub9b0\ub8f8 \ud55c\uacc4\ub97c \ucd08\uacfc\ud569\ub2c8\ub2e4. \ud2b9\uc815 \uc124\uce58 \ud658\uacbd\uc5d0\uc11c \uc774\ub7ec\ud55c \uc99d\ucc29 \uc18d\ub3c4\ub97c \ucd94\uc801\ud560 \uc218 \uc788\ub294\uc9c0 \uc5ec\ubd80\ub294 \ud339\uc758 \uc218\uc728 \ucd94\uc801 \uc2dc\uc2a4\ud15c\uc5d0 \ub530\ub77c \ub2e4\ub985\ub2c8\ub2e4. \ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \uc624\uc5fc \ubc1c\uc0dd \uc5ec\ubd80\uc640 \uad00\uacc4\uc5c6\uc774 \ub178\ucd9c\ub41c \uc6e8\uc774\ud37c \uadfc\ucc98\uc758 ISO Class 5 \uc774\uc0c1 \uad6c\uc5ed\uc5d0 \uc788\ub294 \ubaa8\ub4e0 \uae30\uc5b4\ubc15\uc2a4\uc5d0 PFPE \uc724\ud65c\uc720 \uc0ac\uc6a9\uc744 \uac15\ub825\ud788 \uad8c\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<\/div>\n

\n

\ud050<\/span>
\n\ubc18\ub3c4\uccb4 \uc9c0\uc6d0 \uad6c\uc5ed\uacfc \uc2dc\uc124\uc744 \uacf5\uc720\ud558\ub294 \ud55c\uad6d\uc0b0 \ub18d\uc5c5 \uc790\ub3d9\ud654 \uc7a5\ube44\uc5d0 \ub300\ud574 \ud074\ub9b0\ub8f8 \uae30\uc5b4\ubc15\uc2a4 \uaddc\uaca9\uc774 \uc801\uc6a9\ub418\ub098\uc694?<\/h3>\n

\uc544\ub2c8\uc694, \ub18d\uc5c5 \uc790\ub3d9\ud654 \uc7a5\ube44\uc640 \ubc18\ub3c4\uccb4 \uc124\ube44 \uc790\ub3d9\ud654\ub294 \uc644\uc804\ud788 \ubcc4\uac1c\uc758 \uc801\uc6a9 \ubd84\uc57c\uc785\ub2c8\ub2e4. \ud55c\uad6d\uc758 \ub18d\uc0b0\ubb3c \uac00\uacf5 \uc2dc\uc124(\uace1\ubb3c, \ucc44\uc18c, \uc2dd\ud488 \uac00\uacf5)\uc740 ISO 14644 \ud074\ub9b0\ub8f8 \uc694\uac74\uc744 \ucda9\uc871\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ud55c\uad6d \ub18d\uc5c5 \uc790\ub3d9\ud654 \uc7a5\ube44\uc758 \uae30\uc5b4\ubc15\uc2a4 \uc0ac\uc591\uc740 \ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uc0ac\uc591\uc774 \uc544\ub2cc, \uc81c9\uc870\uc5d0 \uba85\uc2dc\ub41c \uc2dd\ud488 \uac00\uacf5 \uc704\uc0dd \uc694\uac74(IP67, \uc2dd\ud488\uc758\uc57d\ud488\uc548\uc804\ucc98(KFDA) \uae30\uc900 \uc900\uc218, \ubc00\ubd09 \uadf8\ub9ac\uc2a4)\uc744 \ub530\ub985\ub2c8\ub2e4. \ub9cc\uc57d \ud55c\uad6d \uc2dc\uc124\uc5d0\uc11c \ub18d\uc0b0\ubb3c \uac00\uacf5\uacfc \ubc18\ub3c4\uccb4 \ud328\ud0a4\uc9d5\uc744 \ud568\uaed8 \uc6b4\uc601\ud558\ub294 \uacbd\uc6b0(\uc608: \ubc18\ub3c4\uccb4 \uacf5\uc7a5\uc5d0 \ud2b9\uc218 \ud544\ub984\uc774\ub098 \ud328\ud0a4\uc9d5\uc744 \uacf5\uae09\ud558\ub294 \uc5c5\uccb4), \uac01 \uad6c\uc5ed\uc5d0 \uc801\uc6a9\ub418\ub294 \uc0ac\uc591\uc740 \ud574\ub2f9 \uad6c\uc5ed\uc758 \uc2e4\uc81c \uc694\uad6c \uc0ac\ud56d\uc744 \ub530\ub985\ub2c8\ub2e4. \ub18d\uc0b0\ubb3c \uac00\uacf5 \uad6c\uc5ed\uc5d0\ub294 \uc2dd\ud488 \uc548\uc804 \ub4f1\uae09\uc758 \uae30\uc5b4\ubc15\uc2a4\uac00 \uc0ac\uc6a9\ub418\uba70, \uc2dc\uc124 \ub0b4 \ud2b9\uc815 \uad6c\uc5ed\uc774 \ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uae30\uc900\uc744 \ucda9\uc871\ud574\uc57c \ud558\ub294 \uacbd\uc6b0, \ud574\ub2f9 \uad6c\uc5ed\uc758 \uae30\uc5b4\ubc15\uc2a4\ub294 ISO 14644 \uc694\uac74\uc744 \uc900\uc218\ud574\uc57c \ud569\ub2c8\ub2e4. \ub18d\uc0b0\ubb3c \uac00\uacf5 \ud5e4\ub4dc\uc5d0 \ub2e4\uc911 \ucd9c\ub825 \uc804\ub825\uc744 \ubd84\ubc30\ud558\ub294 \uacbd\uc6b0, \ub18d\uc5c5\uc6a9 \ubca0\ubca8 \uae30\uc5b4\ubc15\uc2a4<\/a> EP \ud589\uc131\ud615 \ucd9c\ub825\uc5d0\uc11c \u200b\u200b\uac1c\ubcc4 \ucc98\ub9ac \ud5e4\ub4dc\ub85c \ubd84\ubc30\ud558\ub294 \ubc29\uc2dd\uc740 \uc774\ub7ec\ud55c \uc2dc\uc124\uc758 \ube44\ud074\ub9b0\ub8f8 \uad6c\uc5ed\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<\/div>\n<\/div>\n<\/section>\n

<\/p>\n

\n

\ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\uc5d0\uc11c \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc6a9 \uae30\uc5b4\ubc15\uc2a4\ub97c \uc120\ud0dd\ud558\uc138\uc694.<\/h2>\n

\ud55c\uad6d \uc5d0\ubc84\ud30c\uc6cc\ub294 \ud074\ub9b0\ub8f8 \uaddc\uaca9\uc758 EP \uc2dc\ub9ac\uc988 \uae30\uc5b4\ubc15\uc2a4\ub97c PFPE \uc724\ud65c\uc720, FFKM \uc530, \uc591\uadf9 \uc0b0\ud654 \ucc98\ub9ac\ub41c \ud558\uc6b0\uc9d5, \uadf8\ub9ac\uace0 \uc0bc\uc131\/SK \ud558\uc774\ub2c9\uc2a4 IQ\uc758 \ubaa8\ub4e0 \ubb38\uc11c \ud328\ud0a4\uc9c0\ub97c \ud55c\uad6d\uc5b4\ub85c \uc81c\uacf5\ud558\uba70, \ub0a9\uae30\ub294 2~4\uc8fc\uc785\ub2c8\ub2e4. \ucd5c\uc0c1\uc758 \uacb0\uacfc\ub97c \uc5bb\uc73c\ub824\uba74 \uc124\uacc4 \ub2e8\uacc4\ubd80\ud130 \ud611\ub825\ud558\uc2ed\uc2dc\uc624.<\/p>\n

EP-AFH \ucd08\uc815\ubc00(\uc6e8\uc774\ud37c \ud578\ub4e4\ub7ec) \u2192
\n<\/a>
\nEP-KF\/KH \uc800\uc18c\uc74c(Fab AGV) \u2192
\n<\/a><\/div>\n<\/section>\n<\/div>","protected":false},"excerpt":{"rendered":"

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