{"id":707,"date":"2026-06-01T05:34:46","date_gmt":"2026-06-01T05:34:46","guid":{"rendered":"https:\/\/planetary-gearboxes.com\/?p=707"},"modified":"2026-06-01T05:34:46","modified_gmt":"2026-06-01T05:34:46","slug":"planetary-gearbox-semiconductor-wafer-handling-cleanroom","status":"publish","type":"post","link":"https:\/\/planetary-gearboxes.com\/zh\/planetary-gearbox-semiconductor-wafer-handling-cleanroom\/","title":{"rendered":"\u7528\u4e8e\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u884c\u661f\u9f7f\u8f6e\u7bb1\u2014\u2014\u6d01\u51c0\u5ba4\u548c\u6676\u5706\u5904\u7406"},"content":{"rendered":"
\n

<\/p>\n

\"\u884c\u661f\u9f7f\u8f6e\u7bb1\u534a\u5bfc\u4f53\u8bbe\u5907\u6d01\u51c0\u5ba4\u6676\u5706\u5904\u7406\u4f4e\u653e\u6c14\u97e9\u56fd\u6c38\u529bEP\"<\/p>\n
\n
\u534a\u5bfc\u4f53\u5e94\u7528\u6307\u5357 \u00b7 ISO 14644 \u00b7 \u8131\u6c14 \u00b7 \u975e\u78c1\u6027 \u00b7 \u4e09\u661f\/SK\u6d77\u529b\u58eb<\/div>\n

\u534a\u5bfc\u4f53\u8bbe\u5907\u7528\u884c\u661f\u9f7f\u8f6e\u7bb1 \u2014
\n\u6d01\u51c0\u5ba4\u3001\u6676\u5706\u5904\u7406\u548c\u4f4e\u91ca\u6c14\u8bbe\u8ba1<\/h1>\n

\u6240\u6709\u884c\u661f\u9f7f\u8f6e\u7bb1\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u9009\u578b\u51b3\u7b56\u90fd\u59cb\u4e8e\u4e00\u4e2a\u6807\u51c6\u4ea7\u54c1\u76ee\u5f55\u65e0\u6cd5\u89e3\u7b54\u7684\u95ee\u9898\u3002\u4e00\u53f0\u5728\u97e9\u56fd\u5c01\u88c5\u751f\u4ea7\u7ebf\u4e0a\u5b8c\u7f8e\u8fd0\u884c\u5341\u5e74\u7684\u6807\u51c6\u5de5\u4e1a\u884c\u661f\u9f7f\u8f6e\u7bb1\uff0c\u51e0\u5468\u5185\u5c31\u4f1a\u6c61\u67d3\u6676\u5706\u5382\u7684\u6d01\u51c0\u5ba4\u2014\u2014\u5e76\u975e\u56e0\u4e3a\u5176\u7cbe\u5ea6\u4e0d\u8db3\uff0c\u800c\u662f\u56e0\u4e3a\u5b83\u7684\u6da6\u6ed1\u6cb9\u572820\u00b0C\u4e0b\u4f1a\u91ca\u653e\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\uff08VOC\uff09\uff0c\u8fd9\u4e9b\u5316\u5408\u7269\u4f1a\u6c89\u79ef\u5728300\u6beb\u7c73\u7845\u6676\u5706\u8868\u9762\uff1b\u5b83\u7684\u94a2\u5236\u5916\u58f3\u4f1a\u8131\u843d\u94c1\u78c1\u6027\u9897\u7c92\uff0c\u8fd9\u4e9b\u9897\u7c92\u5728\u8fd0\u8f93\u8fc7\u7a0b\u4e2d\u4f1a\u88ab\u78c1\u5316\uff1b\u800c\u4e14\u5b83\u7684\u6807\u51c6\u5916\u58f3\u6d82\u5c42\u4f1a\u91ca\u653e\u51fa\u8d85\u8fc7ISO 5\u7ea7\u6d53\u5ea6\u9650\u503c\u7684\u5fae\u7c92\u3002\u672c\u6307\u5357\u6db5\u76d6\u4e86\u533a\u5206\u4e0d\u540c\u89c4\u683c\u7684\u6bcf\u4e00\u4e2a\u65b9\u9762\u3002 \u9002\u7528\u4e8e\u6d01\u51c0\u5ba4\u7684\u9f7f\u8f6e\u7bb1<\/strong> \u6765\u81ea\u6807\u51c6\u5de5\u4e1a\u5355\u4f4d\u3002<\/p>\n

\u67e5\u770b EP-AFHK \u8d85\u7cbe\u5bc6\u7cfb\u5217 \u2192
\n<\/a><\/p>\n<\/div>\n<\/section>\n

<\/p>\n

\n

\u97e9\u56fd\u534a\u5bfc\u4f53\u5236\u9020\u4e1a\u2014\u2014\u4e3a\u4f55\u53d8\u901f\u7bb1\u89c4\u683c\u8981\u6c42\u5982\u6b64\u72ec\u7279<\/h2>\n

\u97e9\u56fd\u62e5\u6709\u5168\u7403\u6700\u9ad8\u5bc6\u5ea6\u7684\u534a\u5bfc\u4f53\u5236\u9020\u80fd\u529b\u3002\u4e09\u661f\u5e73\u6cfd\u5de5\u5382\uff08P3\u548cP4\u9636\u6bb5\uff09\u548cSK\u6d77\u529b\u58eb\u6e05\u5ddeM15X\u5de5\u5382\u5171\u540c\u751f\u4ea7\u4e86\u5168\u7403\u5927\u90e8\u5206DRAM\u548cNAND\u95ea\u5b58\u3002\u8fd9\u4e9b\u5de5\u5382\u5728\u7b26\u5408ISO 3-5\u7ea7\uff08\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u542b\u670910-100\u4e2a\u22650.1\u03bcm\u9897\u7c92\uff09\u7684\u6d01\u51c0\u5ba4\u4e2d\uff0c\u5bf9300\u6beb\u7c73\u7845\u6676\u5706\u8fdb\u884c400-600\u9053\u5149\u523b\u3001\u6c89\u79ef\u3001\u8680\u523b\u548cCMP\u5de5\u827a\u5de5\u5e8f\u7684\u5904\u7406\u3002<\/p>\n

\u5728\u8fd9\u79cd\u73af\u5883\u4e0b\u4f7f\u7528\u7684\u9f7f\u8f6e\u7bb1\u2014\u2014\u5305\u62ecFOUP\u8f93\u9001AGV\u3001\u6676\u5706\u642c\u8fd0\u65cb\u8f6c\u8f74\u3001\u88c5\u8f7d\u7aef\u53e3\u5bf9\u51c6\u53f0\u3001\u5149\u523b\u63a9\u6a21\u53f0\u4ee5\u53caCMP\u5934\u65cb\u8f6c\u9a71\u52a8\u88c5\u7f6e\u2014\u2014\u4e0e\u5176\u4ed6\u6240\u6709\u7ec4\u4ef6\u4e00\u6837\uff0c\u90fd\u5fc5\u987b\u7b26\u5408\u76f8\u540c\u7684\u6d01\u51c0\u5ba4\u89c4\u8303\u3002\u5982\u679c\u9f7f\u8f6e\u7bb1\u91ca\u653e\u9897\u7c92\u7269\u3001\u5316\u5b66\u7269\u8d28\u6216\u4ea7\u751f\u53ef\u80fd\u5e72\u6270\u5bf9\u51c6\u7cfb\u7edf\u7684\u78c1\u573a\uff0c\u8fd9\u5e76\u975e\u201c\u4f4e\u8d28\u91cf\u201d\u9f7f\u8f6e\u7bb1\uff0c\u800c\u4ec5\u4ec5\u662f\u8bbe\u8ba1\u7528\u4e8e\u5176\u4ed6\u73af\u5883\u7684\u9f7f\u8f6e\u7bb1\u88ab\u9519\u8bef\u5730\u5b89\u88c5\u5728\u4e86\u8fd9\u91cc\u3002<\/p>\n

\"\u5e73\u9762\u9f7f\u8f6e\u7bb1\"<\/p>\n

\u4e86\u89e3\u884c\u661f\u9f7f\u8f6e\u7bb1\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u89c4\u8303\uff0c\u53ef\u4ee5\u8ba9\u97e9\u56fd\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u8bbe\u5907\u4f9b\u5e94\u5546\u4ece\u4e00\u5f00\u59cb\u5c31\u6307\u5b9a\u6b63\u786e\u7684\u9f7f\u8f6e\u7bb1\u914d\u7f6e\uff0c\u800c\u4e0d\u662f\u5728\u5ba2\u6237\u9a8c\u6536\u6d4b\u8bd5\u671f\u95f4\u53d1\u73b0\u4e0d\u517c\u5bb9\u95ee\u9898\uff0c\u800c\u89e3\u51b3\u7ec4\u4ef6\u89c4\u8303\u9519\u8bef\u7684\u6210\u672c\u6700\u9ad8\u3002<\/p>\n

<\/p>\n

\n\n\n\n\n\n\n\n\n
\u97e9\u56fdFab Zone<\/th>\nISO \u7b49\u7ea7<\/th>\n\u6bcf\u7acb\u65b9\u7c73\u6700\u5927\u9897\u7c92\u7269\u6d53\u5ea6\u22650.1\u03bcm<\/th>\n\u6e29\u5ea6\/\u6e7f\u5ea6<\/th>\n\u53d8\u901f\u7bb1\u4f7f\u7528<\/th>\n<\/tr>\n<\/thead>\n
\u5149\u523b\u5ba4<\/td>\nISO 3<\/td>\n10<\/td>\n20\u00b0C \u00b10.1\u00b0C \/ 40% RH<\/td>\n\u5149\u523b\u80f6\u5e73\u53f0\u3001\u6676\u5706\u88c5\u8f7d\u673a\u2014\u2014\u8981\u6c42\u6700\u9ad8<\/td>\n<\/tr>\n
\u6c89\u79ef\/\u8680\u523b\u5ba4<\/td>\nISO 4-5<\/td>\n100\u20131,000<\/td>\n20\u201322\u00b0C \/ 40\u201350% RH<\/td>\n\u8bbe\u5907\u642c\u8fd0\u5de5\uff0c\u9ad8\u7a7a\u8fd0\u8f93<\/td>\n<\/tr>\n
CMP\/\u5305\u88c5\u533a<\/td>\nISO 6\u20137<\/td>\n10,000\u2013100,000<\/td>\n20\u201323\u00b0C \/ 40\u201360% RH<\/td>\nFOUP\u8fd0\u8f93\uff0c\u7269\u6599\u642c\u8fd0AGV<\/td>\n<\/tr>\n
Fab\u652f\u6301\u8d70\u5eca<\/td>\nISO 8<\/td>\n3,520,000<\/td>\n\u73af\u5883\u6e29\u5ea6\u00b12\u00b0C<\/td>\n\u672c\u533a\u57df\u53ef\u63a5\u53d7\u6807\u51c6EP-AB<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n

ISO 14644-1:2015 \u6d01\u51c0\u5ea6\u7b49\u7ea7\u3002\u97e9\u56fd\u534a\u5bfc\u4f53\u5236\u9020\u5382\u533a\u57df\u7b26\u5408\u4e09\u661f\/SK\u6d77\u529b\u58eb\u8bbe\u5907\u89c4\u8303\u3002\u6240\u6709\u5236\u9020\u5382\u533a\u57df\u5168\u5e74\u6e29\u5ea6\u4fdd\u6301\u5728 20\u201322\u00b0C \u5de6\u53f3\u2014\u2014EP-KF\/KH \u7cfb\u5217\u53cc\u66f2\u9762\u51b7\u5374\u5668 0\u00b0C \u7684\u6700\u4f4e\u6e29\u5ea6\u8981\u6c42\u5bf9\u4efb\u4f55\u5ba4\u5185\u5236\u9020\u5382\u5b89\u88c5\u90fd\u4e0d\u662f\u95ee\u9898\u3002<\/p>\n<\/section>\n

<\/p>\n

\n

\u6807\u51c6\u9f7f\u8f6e\u7bb1\u6c61\u67d3\u534a\u5bfc\u4f53\u5236\u9020\u5382\u7684\u56db\u79cd\u65b9\u5f0f<\/h2>\n

\u6807\u51c6\u9f7f\u8f6e\u7bb1\u4e0e\u6d01\u51c0\u5ba4\u4e0d\u517c\u5bb9\u7684\u95ee\u9898\u6e90\u4e8e\u56db\u4e2a\u72ec\u7acb\u7684\u673a\u5236\u3002\u6bcf\u4e2a\u673a\u5236\u90fd\u5fc5\u987b\u5355\u72ec\u89e3\u51b3\u2014\u2014\u6d88\u9664\u5176\u4e2d\u4e00\u4e2a\u5e76\u4e0d\u80fd\u89e3\u51b3\u5176\u4ed6\u673a\u5236\u7684\u95ee\u9898\u3002<\/p>\n

\n
\n
\n
1<\/div>\n
\n
\u6da6\u6ed1\u5242\u6325\u53d1\u2014\u2014\u770b\u4e0d\u89c1\u7684\u6c61\u67d3<\/div>\n

\u6807\u51c6\u5bc6\u5c01\u6da6\u6ed1\u8102\u4f7f\u7528\u77ff\u7269\u6cb9\u6216\u805a\u03b1-\u70ef\u70c3\uff08PAO\uff09\u57fa\u7840\u6cb9\uff0c\u5e76\u6dfb\u52a0\u80fa\u57fa\u6216\u9499\u57fa\u589e\u7a20\u5242\u3002\u5728\u6d01\u51c0\u5ba4\u7684\u5ba4\u6e29\u4e0b\uff0c\u8fd9\u4e9b\u5316\u5408\u7269\u4f1a\u901a\u8fc7\u84b8\u6c7d\u538b\u91ca\u653e\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\uff08VOC\uff09\uff0c\u8fd9\u4e00\u8fc7\u7a0b\u79f0\u4e3a\u8131\u6c14\u3002\u91ca\u653e\u7684VOC\u5728\u5206\u5b50\u5c42\u9762\u4e0a\u4e0d\u53ef\u89c1\uff0c\u4f46\u5b83\u4eec\u4f1a\u6c89\u79ef\u5728\u9644\u8fd1\u7684\u8868\u9762\u4e0a\uff0c\u5305\u62ec\u7845\u7247\u8868\u9762\u548c\u5149\u7f69\u73bb\u7483\u3002<\/p>\n

\u673a\u5236\uff1a<\/strong> \u5728 20\u00b0C \u65f6\uff0c\u6807\u51c6\u77ff\u7269\u6cb9\u6da6\u6ed1\u8102\u7684\u84b8\u6c14\u538b\u7ea6\u4e3a 10\u207b\u2074 \u81f3 10\u207b\u00b3 Pa\u3002\u5728\u9644\u8fd1\u8868\u9762\u4e0a\u7684\u6c89\u79ef\u901f\u7387\u7ea6\u4e3a 0.1\u20131 ng\/cm\u00b2\/\u5c0f\u65f6\u3002\u5728\u8ddd\u79bb\u6c61\u67d3\u9f7f\u8f6e\u7bb1 500 mm \u7684 300 mm \u6676\u5706\u4e0a\uff0c\u7ecf\u8fc7 24 \u5c0f\u65f6\u7684\u8fde\u7eed\u8fd0\u884c\uff0c\u4f1a\u6c89\u79ef\u4e00\u5c42\u6709\u673a\u8584\u819c\uff0c\u4ece\u800c\u6539\u53d8\u5149\u523b\u80f6\u7684\u8868\u9762\u6da6\u6e7f\u6027\u548c\u7c98\u9644\u6027\u80fd\uff0c\u5bfc\u81f4\u540e\u7eed\u5149\u523b\u6b65\u9aa4\u51fa\u73b0\u7f3a\u9677\u3002<\/p>\n

\u89e3\u51b3\u65b9\u6848\uff1a<\/strong> \u5168\u6c1f\u805a\u919a (PFP\u200b\u200bE) \u6da6\u6ed1\u8102\u300220\u00b0C \u65f6\u7684\u84b8\u6c7d\u538b\uff1a<10\u207b\u00b9\u2070 Pa \u2014 \u6bd4\u77ff\u7269\u6cb9\u4f4e\u4e03\u4e2a\u6570\u91cf\u7ea7\u6216\u66f4\u591a\u3002PFPE \u6da6\u6ed1\u8102\u5316\u5b66\u6027\u8d28\u7a33\u5b9a\uff0c\u4e0d\u4e0e\u5de5\u827a\u6c14\u4f53\u53d1\u751f\u53cd\u5e94\uff0c\u4e14\u4e0d\u4f1a\u5728\u9644\u8fd1\u8868\u9762\u4ea7\u751f\u53ef\u6d4b\u91cf\u7684\u6709\u673a\u6c89\u79ef\u7269\u3002\u97e9\u56fd Ever-Power EP \u7cfb\u5217\u9f7f\u8f6e\u7bb1\u53ef\u6309\u9700\u5b9a\u5236\u6d01\u51c0\u5ba4\u7ea7 PFPE \u6da6\u6ed1\u8102\u2014\u2014\u8ba2\u8d2d\u65f6\u8bf7\u6ce8\u660e\u201c\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e13\u7528 PFPE \u6da6\u6ed1\u8102\u201d\u3002<\/div>\n<\/div>\n<\/div>\n<\/div>\n

\n
\n
2<\/div>\n
\n
\u9f7f\u8f6e\u556e\u5408\u78e8\u635f\u788e\u5c51\u4ea7\u751f\u7684\u9897\u7c92<\/div>\n

\u6240\u6709\u884c\u661f\u9f7f\u8f6e\u7bb1\u5728\u9f7f\u8f6e\u556e\u5408\u63a5\u89e6\u533a\u90fd\u4f1a\u4ea7\u751f\u4e9a\u5fae\u7c73\u7ea7\u7684\u91d1\u5c5e\u78e8\u635f\u9897\u7c92\u2014\u2014\u8fd9\u662f\u9f7f\u8f6e\u754c\u9762\u6ed1\u52a8\u548c\u6eda\u52a8\u8fd0\u52a8\u4e0d\u53ef\u907f\u514d\u7684\u7ed3\u679c\u3002\u5728\u5de5\u4e1a\u73af\u5883\u4e2d\uff0c\u8fd9\u4e9b\u9897\u7c92\u4f1a\u88ab\u6da6\u6ed1\u8102\u7ed3\u6784\u622a\u7559\u5728\u5bc6\u5c01\u58f3\u4f53\u5185\u3002\u800c\u5728\u6d01\u51c0\u5ba4\u9f7f\u8f6e\u7bb1\u4e2d\uff0c\u5fc5\u987b\u6d88\u9664\u4efb\u4f55\u9897\u7c92\u9038\u51fa\u7684\u9014\u5f84\uff1a\u8f74\u5c01\u5fc5\u987b\u9632\u6b62\u9897\u7c92\u6cbf\u8f74\u8868\u9762\u8fc1\u79fb\uff0c\u58f3\u4f53\u5fc5\u987b\u6ca1\u6709\u4efb\u4f55\u5fae\u9699\uff0c\u4ee5\u9632\u6b62\u9f7f\u8f6e\u7bb1\u70ed\u5faa\u73af\u8fc7\u7a0b\u4e2d\u542b\u6709\u9897\u7c92\u7684\u7a7a\u6c14\u901a\u8fc7\u8fd9\u4e9b\u5fae\u9699\u8fdb\u5165\u58f3\u4f53\u3002<\/p>\n

\u673a\u5236\uff1a<\/strong> \u5f53\u53d8\u901f\u7bb1\u4ece\u51b7\u542f\u52a8\u5347\u6e29\u81f3\u5de5\u4f5c\u6e29\u5ea6\u65f6\uff0c\u58f3\u4f53\u5185\u7684\u7a7a\u6c14\u81a8\u80c0\u5e76\u8bd5\u56fe\u901a\u8fc7\u963b\u529b\u6700\u5c0f\u7684\u8def\u5f84\uff08\u901a\u5e38\u662f\u6cbf\u7740\u8f74\u5c01\u5507\u53e3\uff09\u6392\u51fa\u3002\u51b7\u5374\u65f6\uff0c\u5916\u90e8\u7a7a\u6c14\uff08\u53ca\u5176\u6240\u542b\u7684\u4efb\u4f55\u9897\u7c92\uff09\u4f1a\u88ab\u5438\u56de\u3002\u8fd9\u79cd\u201c\u547c\u5438\u201d\u6548\u5e94\u53ef\u4ee5\u53cc\u5411\u8f93\u9001\u9897\u7c92\u3002 \u89e3\u51b3\u65b9\u6848\uff1a<\/strong> \u5b8c\u5168\u5bc6\u5c01\u7684\u5916\u58f3\uff0c\u6ca1\u6709\u70ed\u547c\u5438\u8def\u5f84\u2014\u2014\u901a\u8fc7\u53d6\u6d88\u547c\u5438\u5b54\u5e76\u6307\u5b9a\u4f7f\u7528 FFKM\uff08\u5168\u6c1f\u5f39\u6027\u4f53\uff09\u8f74\u5bc6\u5c01\u4ef6\u6765\u5b9e\u73b0\uff0c\u4e0e\u6807\u51c6\u7684 NBR \u6216 FKM \u5bc6\u5c01\u4ef6\u76f8\u6bd4\uff0cFFKM \u5728\u6574\u4e2a\u5de5\u4f5c\u6e29\u5ea6\u8303\u56f4\u5185\u4fdd\u6301\u66f4\u7d27\u5bc6\u7684\u5507\u90e8\u63a5\u89e6\u3002<\/div>\n<\/div>\n<\/div>\n<\/div>\n
\n
\n
3<\/div>\n
\n
\u58f3\u4f53\u8868\u9762\u6d82\u5c42\u9038\u6c14\u548c\u9897\u7c92\u7269<\/div>\n

\u6807\u51c6\u5de5\u4e1a\u9f7f\u8f6e\u7bb1\u58f3\u4f53\u91c7\u7528\u6cb9\u57fa\u6216\u4e19\u70ef\u9178\u6d82\u6599\uff0c\u8fd9\u4e9b\u6d82\u6599\u5728\u5ba4\u6e29\u4e0b\u5373\u53ef\u56fa\u5316\u3002\u8fd9\u4e9b\u6d82\u6599\u5728\u6d82\u8986\u540e\u6570\u6708\u5185\u4ecd\u4f1a\u6301\u7eed\u91ca\u653e\u6eb6\u5242\u6b8b\u7559\u7269\uff08\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\uff0cVOC\uff09\uff0c\u5e76\u4e14\u968f\u7740\u6d82\u5c42\u8868\u9762\u7684\u98ce\u5316\uff0c\u8fd8\u4f1a\u8131\u843d\u5fae\u7c92\u3002\u5728 ISO 3-5 \u7ea7\u6d01\u51c0\u5ba4\u4e2d\uff0c\u5373\u4f7f\u662f\u5fae\u5c0f\u7684\u9897\u7c92\u6e90\uff0c\u4e5f\u53ef\u80fd\u5bfc\u81f4\u9f7f\u8f6e\u7bb1\u9644\u8fd1\u9897\u7c92\u6d53\u5ea6\u8d85\u8fc7\u5141\u8bb8\u9650\u503c\u3002<\/p>\n

\u89e3\u51b3\u65b9\u6848\uff1a<\/strong> \u88f8\u9633\u6781\u6c27\u5316\u94dd\u5916\u58f3\uff08\u65e0\u6d82\u5c42\uff09\u6216\u91c7\u7528\u96f6VOC\u542b\u91cf\u3001\u4f4e\u9897\u7c92\u7387\u7684\u5316\u5b66\u9540\u954d\u5de5\u827a\u3002\u90e8\u5206\u97e9\u56fd\u6676\u5706\u5382\u8bbe\u5907\u4f9b\u5e94\u5546\u4e3a\u8981\u6c42\u6700\u4e25\u82db\u7684ISO 3\u7ea7\u5e94\u7528\u91c7\u7528\u7535\u629b\u5149\u4e0d\u9508\u94a2\u5916\u58f3\u3002\u97e9\u56fdEver-Power\u53ef\u4e3aEP\u7cfb\u5217\u9f7f\u8f6e\u7bb1\u7684\u6d01\u51c0\u5ba4\u5e94\u7528\u6307\u5b9a\u88f8\u9633\u6781\u6c27\u5316\u94dd\u5916\u58f3\u2014\u2014\u8bf7\u5728\u8ba2\u8d2d\u65f6\u63d0\u51fa\u8981\u6c42\u3002<\/div>\n<\/div>\n<\/div>\n<\/div>\n
\n
\n
4<\/div>\n
\n
\u94c1\u78c1\u6750\u6599\u548c\u6742\u6563\u78c1\u573a<\/div>\n

\u6807\u51c6\u53d8\u901f\u7bb1\u90e8\u4ef6\uff08\u58f3\u4f53\u3001\u9f7f\u8f6e\u3001\u8f74\u3001\u884c\u661f\u67b6\uff09\u91c7\u7528\u666e\u901a\u78b3\u94a2\u6216\u5408\u91d1\u94a2\u5236\u6210\u2014\u2014\u8fd9\u4e9b\u90fd\u662f\u5177\u6709\u663e\u8457\u78c1\u5bfc\u7387\u7684\u94c1\u78c1\u6027\u6750\u6599\u3002\u5728\u5927\u591a\u6570\u5e94\u7528\u4e2d\uff0c\u8fd9\u65e0\u5173\u7d27\u8981\u3002\u4f46\u5728\u97e9\u56fd\u7684\u78c1\u968f\u673a\u5b58\u53d6\u5b58\u50a8\u5668\uff08MRAM\uff09\u5236\u9020\u533a\u57df\u4ee5\u53ca\u7535\u5b50\u675f\u5149\u523b\u8bbe\u5907\u9644\u8fd1\uff0c\u94c1\u78c1\u6027\u90e8\u4ef6\u4ea7\u751f\u7684\u6742\u6563\u78c1\u573a\u4f1a\u5bfc\u81f4\u7535\u5b50\u675f\u67f1\u7684\u5bf9\u51c6\u8bef\u5dee\uff0c\u5e76\u53ef\u80fd\u6539\u53d8\u90e8\u5206\u5236\u9020\u7684MRAM\u5355\u5143\u7684\u78c1\u72b6\u6001\u3002<\/p>\n

\u673a\u5236\uff1a<\/strong> \u6807\u51c6\u94a2\u5236\u9f7f\u8f6e\u7bb1\u5916\u58f3\u7684\u76f8\u5bf9\u78c1\u5bfc\u7387\u03bc\u1d63\u4e3a100\u20131000\uff08\u94c1\u78c1\u6027\uff09\u3002\u5728300\u6beb\u7c73\u7684\u8ddd\u79bb\u5904\uff0c\u5373\u4f7f\u662f\u5730\u7403\u73af\u5883\u78c1\u573a\u4e5f\u4f1a\u53d7\u5230\u5916\u58f3\u7684\u5f71\u54cd\u800c\u53d1\u751f\u7578\u53d8\u2014\u2014\u4efb\u4f55\u6765\u81ea\u7535\u673a\u78c1\u94c1\u6216\u8026\u5408\u5230\u5916\u58f3\u4e2d\u7684\u7535\u6e90\u7ebf\u7684\u6742\u6563\u78c1\u573a\u90fd\u4f1a\u4ea7\u751f\u968f\u65f6\u95f4\u53d8\u5316\u7684\u78c1\u573a\uff0c\u8be5\u78c1\u573a\u5f3a\u5ea6\u53ef\u80fd\u8d85\u8fc7\u67d0\u4e9b\u6781\u7d2b\u5916\u5149\u523b\u7cfb\u7edf\u6240\u9700\u768410 nT\u78c1\u573a\u7a33\u5b9a\u6027\u8981\u6c42\u3002 \u89e3\u51b3\u65b9\u6848\uff1a<\/strong> \u91c7\u7528\u5965\u6c0f\u4f53\u4e0d\u9508\u94a2\uff08SS316L\uff0c\u03bc\u1d63 \u2248 1.003\uff09\u6216\u94dd\uff08\u03bc\u1d63 \u2248 1.000006\uff09\u5916\u58f3\u7ed3\u6784\u53ef\u6d88\u9664\u94c1\u78c1\u6027\u95ee\u9898\u3002\u8fd9\u662f\u4e00\u9879\u7279\u6b8a\u8ba2\u5355\u8981\u6c42\u2014\u2014\u8bf7\u4e0e\u97e9\u56fd\u6c38\u80fd\u7535\u529b\u5e94\u7528\u5de5\u7a0b\u90e8\u95e8\u786e\u8ba4\u60a8\u6240\u5728\u5236\u9020\u533a\u57df\u548c\u8bbe\u5907\u7c7b\u578b\u7684\u5177\u4f53\u8981\u6c42\u3002<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n

<\/p>\n

\n

ISO 14644\u6d01\u51c0\u5ba4\u7b49\u7ea7 \u2192 \u9f7f\u8f6e\u7bb1\u89c4\u683c\u8981\u6c42<\/h2>\n

\u5e76\u975e\u6bcf\u4e2a\u534a\u5bfc\u4f53\u5236\u9020\u5382\u533a\u57df\u90fd\u9700\u8981\u5b8c\u6574\u7684\u6d01\u51c0\u5ba4\u9f7f\u8f6e\u7bb1\u89c4\u683c\u5305\u3002\u5177\u4f53\u8981\u6c42\u4f1a\u968f\u7740\u6d01\u51c0\u5ba4\u7b49\u7ea7\u800c\u53d8\u5316\u2014\u2014ISO 7 \u7ea7\u7269\u6599\u642c\u8fd0\u901a\u9053\u7684\u8981\u6c42\u4e0e ISO 3 \u7ea7\u5149\u523b\u8f66\u95f4\u7684\u8981\u6c42\u622a\u7136\u4e0d\u540c\u3002\u8fc7\u5ea6\u6307\u5b9a\u6d01\u51c0\u5ba4\u529f\u80fd\u4f1a\u589e\u52a0\u6210\u672c\u800c\u6ca1\u6709\u5b9e\u9645\u529f\u80fd\u4e0a\u7684\u63d0\u5347\uff1b\u800c\u6307\u5b9a\u4e0d\u8db3\u5219\u4f1a\u589e\u52a0\u5de5\u5382\u6c61\u67d3\u7684\u98ce\u9669\u3002<\/p>\n

\n\n\n\n\n\n\n\n\n
ISO \u7b49\u7ea7<\/th>\n\u6da6\u6ed1\u5242<\/th>\n\u8f74\u5c01<\/th>\n\u5916\u58f3\u6d82\u5c42<\/th>\n\u975e\u78c1\u6027<\/th>\n\u97e9\u56fd Ever-Power \u8ba2\u5355\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n
ISO 8\uff08\u652f\u6301\u8d70\u5eca\uff09<\/td>\n\u6807\u51c6\u6da6\u6ed1\u8102 \u2713<\/td>\n\u6807\u51c6NBR \u2713<\/td>\n\u6807\u51c6\u6cb9\u6f06 \u2713<\/td>\n\u65e0\u9700<\/td>\n\u6807\u51c6EP-AB\u5e93\u5b58\u2014\u2014\u65e0\u9700\u7279\u6b8a\u8ba2\u8d2d<\/td>\n<\/tr>\n
ISO 6\u20137\uff08CMP\/\u5305\u88c5\uff09<\/td>\n\u9996\u9009 PFPE<\/td>\nFKM \u6216 FFKM<\/td>\n\u4f4e\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\u6216\u9633\u6781\u6c27\u5316<\/td>\n\u6bcf\u4e2a\u533a\u57df\u786e\u8ba4<\/td>\n\u8ba2\u8d2d\u65f6\u8bf7\u6ce8\u660e\u201c\u6d01\u51c0\u5ba4\u6da6\u6ed1\u8102+\u6c1f\u6a61\u80f6\u5bc6\u5c01\u5708\u201d\u3002<\/td>\n<\/tr>\n
ISO 4\u20135\uff08\u6c89\u79ef\/\u8680\u523b\uff09<\/td>\n\u9700\u8981PFPE<\/td>\nFFKM \u8981\u6c42<\/td>\n\u9700\u8981\u9633\u6781\u6c27\u5316\u94dd<\/td>\n\u5982\u679c\u662f MRAM\/EB \u533a\u57df\uff1a\u662f<\/td>\n\u6d01\u51c0\u5ba4\u5b8c\u6574\u89c4\u683c\u8ba2\u5355\uff1b\u4ea4\u8d27\u5468\u671f 2-3 \u5468<\/td>\n<\/tr>\n
ISO 3\uff08EUV\u5149\u523b\u8231\uff09<\/td>\n\u9700\u8981PFPE<\/td>\nFFKM \u8981\u6c42<\/td>\n\u7535\u629b\u5149 SS316L<\/td>\n\u5fc5\u9700\u7684<\/td>\n\u9700\u8981\u5b9a\u5236\u5de5\u7a0b\u8bbe\u8ba1\u2014\u2014\u5728\u8bbe\u8ba1\u9636\u6bb5\u65e9\u671f\u5c31\u4e0e\u97e9\u56fdEver-Power\u5e94\u7528\u56e2\u961f\u63a5\u6d3d<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n

 <\/p>\n

\u5173\u952e\u8ba2\u8d2d\u8bf4\u660e\uff1a <\/strong>
\n\u6240\u6709\u6d01\u51c0\u5ba4\u4e13\u7528\u9009\u9879\u2014\u2014\u4f8b\u5982 PFPE \u6da6\u6ed1\u8102\u3001FFKM \u5bc6\u5c01\u4ef6\u3001\u9633\u6781\u6c27\u5316\u5916\u58f3\u3001\u975e\u78c1\u6027\u7ed3\u6784\u2014\u2014\u90fd\u5fc5\u987b\u5728\u8ba2\u8d2d\u65f6\u6307\u5b9a\u3002\u6807\u51c6 EP \u7cfb\u5217\u9f7f\u8f6e\u7bb1\u51fa\u5382\u65f6\u914d\u5907\u6807\u51c6\u77ff\u7269\/PAO \u6da6\u6ed1\u8102\u3001NBR \u5bc6\u5c01\u4ef6\u548c\u55b7\u6f06\u5916\u58f3\u3002\u65e0\u6cd5\u73b0\u573a\u6539\u88c5\u3002\u5982\u679c\u60a8\u6536\u5230\u6807\u51c6\u578b\u53f7\u7684\u9f7f\u8f6e\u7bb1\uff0c\u4e4b\u540e\u53d1\u73b0\u751f\u4ea7\u533a\u57df\u9700\u8981\u4f7f\u7528 PFPE \u6da6\u6ed1\u8102\uff0c\u5219\u5fc5\u987b\u9000\u56de\u8be5\u9f7f\u8f6e\u7bb1\u5e76\u66f4\u6362\u4e3a\u6d01\u51c0\u5ba4\u4e13\u7528\u578b\u53f7\u3002\u6d01\u51c0\u5ba4\u4e13\u7528\u9009\u9879\u7684\u4ea4\u8d27\u5468\u671f\u4e3a 2-4 \u5468\uff1b\u8bf7\u5728\u8bbe\u5907\u91c7\u8d2d\u8ba1\u5212\u4e2d\u76f8\u5e94\u5b89\u6392\u3002<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\u6676\u5706\u5904\u7406\u673a\u65cb\u8f6c\u8f74\u2014\u2014\u7cbe\u5ea6\u8981\u6c42\u548c\u7cfb\u5217\u9009\u62e9<\/h2>\n

\u884c\u661f\u9f7f\u8f6e\u7bb1\u534a\u5bfc\u4f53\u6676\u5706\u642c\u8fd0\u9a71\u52a8\u88c5\u7f6e\u6240\u9700\u7684\u7cbe\u5ea6\u8fdc\u8d85\u5927\u591a\u6570\u5de5\u4e1a\u4f3a\u670d\u5e94\u7528\u3002\u673a\u5668\u4eba\u6676\u5706\u642c\u8fd0\u5668\uff08\u7528\u4e8e\u5728\u5149\u7ea4\u52a0\u5de5\u5355\u5143 (FOUP)\u3001\u5de5\u827a\u8154\u5ba4\u548c\u5bf9\u51c6\u5668\u4e4b\u95f4\u8f6c\u79fb 300 \u6beb\u7c73\u7845\u6676\u5706\uff09\u91c7\u7528\u4e24\u4e2a\u65cb\u8f6c\u8f74\uff1a\u03b8 \u8f74\uff0c\u7528\u4e8e\u65cb\u8f6c\u6574\u4e2a\u673a\u68b0\u81c2\u7ec4\u4ef6\u4ee5\u5bf9\u51c6\u76ee\u6807\u69fd\uff1b\u4ee5\u53ca\u4f38\u7f29\u8f74\uff0c\u7528\u4e8e\u5f84\u5411\u4f38\u7f29\u672b\u7aef\u6267\u884c\u5668\u3002\u03b8 \u8f74\u7684\u5b9a\u4f4d\u7cbe\u5ea6\u51b3\u5b9a\u6676\u5706\u662f\u5426\u4f4d\u4e8e\u672b\u7aef\u6267\u884c\u5668\u7684\u4e2d\u5fc3\u516c\u5dee\u8303\u56f4\u5185\uff1b\u4f38\u7f29\u8f74\u5219\u51b3\u5b9a\u5f84\u5411\u5b9a\u4f4d\u7cbe\u5ea6\u3002<\/p>\n

\"\u9ad8\u7cbe\u5ea6\u884c\u661f\u9f7f\u8f6e\u7bb1\u5e94\u7528\"<\/p>\n

\u03b8 \u8f74\u7684\u5173\u952e\u5b9a\u4f4d\u8981\u6c42\uff1a\u6676\u5706\u4e2d\u5fc3\u5fc5\u987b\u4f4d\u4e8e\u6807\u79f0 300 mm \u6676\u5706\u534a\u5f84\uff08\u8ddd\u6676\u5706\u4e2d\u5fc3 150 mm\uff09\u5904\u76ee\u6807\u4f4d\u7f6e\u7684 \u00b10.5 mm \u8303\u56f4\u5185\u3002\u8fd9\u8981\u6c42 \u03b8 \u8f74\u7684\u89d2\u5ea6\u8bef\u5dee\u4e3a\uff1a<\/p>\n

\n

THETA \u8f74\u53cd\u51b2\u8981\u6c42 \u2014 \u6676\u5706\u5904\u7406\u673a<\/p>\n

\u8981\u6c42\uff1a\u5728\u534a\u5f84 r = 300mm \u5904\uff0c\u4f4d\u7f6e\u8bef\u5dee \u2264 \u00b10.5mm<\/p>\n

\u89d2\u5ea6\u8bef\u5dee \u03b8_max = \u0394x \/ r = 0.5 \/ 300 = 0.00167 rad
\n= 0.00167 \u00d7 (180 \u00d7 60 \/ \u03c0) = \u6700\u5927 5.7 \u89d2\u5206<\/span><\/p>\n

\u53d8\u901f\u7bb1\u9f7f\u9699\u9884\u7b97\uff08\u603b\u8bef\u5dee\u4e3a 40%\uff09\uff1a
\n\u03b8_\u9f7f\u8f6e\u7bb1 \u2264 5.7 \u00d7 0.40 = 2.3 \u5f27\u5206<\/p>\n

\u2192 \u8981\u6c42\u8f93\u51fa\u8f74\u53cd\u51b2\u22642.3\u5f27\u5206
\n\u2192 P1 (\u22643\u2032) \u5c5e\u4e8e\u8fb9\u9645\u6210\u672c\u2014\u2014\u6700\u574f\u60c5\u51b5\u4e0b\u53ef\u80fd\u8d85\u51fa\u9884\u7b97
\n\u2192 P0 (\u22641\u2032) \u63d0\u4f9b 2.3 \u500d\u88d5\u5ea6 \u2014 \u6b63\u786e\u89c4\u683c
\n\u2192 EP-AFH\uff08\u22641\u2032 \u6807\u51c6\uff09\u7701\u53bb\u4e86\u7b49\u7ea7\u89c4\u683c\u6b65\u9aa4<\/p><\/div>\n<\/div>\n

\u5bf9\u4e8e\u97e9\u56fd\u6676\u5706\u5904\u7406\u8bbe\u5907OEM\u5382\u5546\u800c\u8a00\uff0c EP-AFH \u8d85\u7cbe\u5bc6\u7cfb\u5217<\/a> \u8fd9\u662f\u03b8\u8f74\u7684\u6807\u51c6\u63a8\u8350\u503c\u3002\u6bcf\u53f0EP-AFH\u8bbe\u5907\u51fa\u5382\u65f6\u7684\u6807\u51c6\u89c4\u683c\u5747\u4e3a\u22641\u5f27\u5206\u2014\u2014\u65e0\u9700\u9009\u62e9\u7b49\u7ea7\u4ee3\u7801\uff0c\u7b49\u7ea7\u8303\u56f4\u5185\u4e0d\u5b58\u5728\u5355\u5143\u95f4\u6d4b\u91cf\u5dee\u5f02\u3002\u4ea4\u4ed8\u8bc1\u4e66\u786e\u8ba4\u6bcf\u53f0\u8bbe\u5907\u7684\u6d4b\u91cf\u503c\u3002\u5bf9\u4e8e\u5ef6\u4f38\uff08\u5f84\u5411\uff09\u8f74\uff0c\u7cbe\u5ea6\u8981\u6c42\u8f83\u4f4e\uff08\u672b\u7aef\u6267\u884c\u5668\u5c16\u7aef\u516c\u5dee\u4e3a\u00b11\u6beb\u7c73\uff09\uff0c\u6839\u636e\u673a\u68b0\u81c2\u51e0\u4f55\u5f62\u72b6\uff0cP0\u6216P1\u5747\u53ef\u9002\u7528\u3002<\/p>\n

\u6e29\u5ea6\u7a33\u5b9a\u6027\u548c\u70ed\u5b9a\u4f4d\u6f02\u79fb\uff1a <\/strong>
\n\u97e9\u56fd\u6676\u5706\u5382\u6d01\u51c0\u5ba4\u7684\u6e29\u5ea6\u7a33\u5b9a\u6027\u53ef\u8fbe 20\u00b0C \u00b10.1\u00b0C\u3002\u8fd9\u79cd\u9ad8\u7cbe\u5ea6\u7684\u6e29\u5ea6\u63a7\u5236\u65e8\u5728\u9632\u6b62\u8bbe\u5907\u70ed\u81a8\u80c0\u5bfc\u81f4\u5b9a\u4f4d\u6f02\u79fb\u3002\u5728\u70ed\u7a33\u5b9a\u6027\u826f\u597d\u7684\u6d01\u51c0\u5ba4\u73af\u5883\u4e2d\uff0c\u9f7f\u8f6e\u7bb1\u7684\u5b9a\u4f4d\u91cd\u590d\u6027\u4ec5\u53d7\u9f7f\u9699\u548c\u7f16\u7801\u5668\u5206\u8fa8\u7387\u7684\u9650\u5236\uff0c\u800c\u975e\u70ed\u81a8\u80c0\u7684\u9650\u5236\u3002\u9ad8\u5ea6\u7a33\u5b9a\u7684\u6d01\u51c0\u5ba4\u6e29\u5ea6\u672c\u8eab\u5c31\u662f\u4e00\u9879\u8bbe\u8ba1\u4f18\u52bf\uff1a\u5728\u6807\u51c6\u5de5\u4e1a\u5e94\u7528\u4e2d\u5907\u53d7\u5173\u6ce8\u7684\u9f7f\u8f6e\u7bb1\u70ed\u6f02\u79fb\uff0c\u5728\u63a7\u5236\u5f97\u5f53\u7684\u6676\u5706\u5382\u73af\u5883\u4e2d\u51e0\u4e4e\u53ef\u4ee5\u5ffd\u7565\u4e0d\u8ba1\u3002<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

FOUP\u8fd0\u8f93AGV\u2014\u2014\u5236\u9020\u8f66\u95f4\u64cd\u4f5c\u9a71\u52a8\u8f6e\u89c4\u683c<\/h2>\n

\u5728\u97e9\u56fd\u534a\u5bfc\u4f53\u5de5\u5382\u4e2d\uff0c\u524d\u5f00\u5f0f\u7edf\u4e00\u8231\uff08FOUP\uff09\u8fd0\u8f93\u4e3b\u8981\u91c7\u7528\u5929\u82b1\u677f\u8f68\u9053\u4e0a\u7684\u67b6\u7a7a\u5347\u964d\u8fd0\u8f93\uff08OHT\uff09\u7cfb\u7edf\uff0c\u5c06FOUP\u4ece\u5de5\u5382\u8fd0\u9001\u5230\u8bbe\u5907\u95f4\uff1b\u800c\u5728\u4eba\u6d41\u91cf\u8f83\u4f4e\u7684\u533a\u57df\uff0c\u5219\u4f7f\u7528\u5730\u9762AGV\u8fdb\u884c\u8bbe\u5907\u95f4\u8f6c\u79fb\u3002\u5730\u9762AGV\u7684\u9a71\u52a8\u8f6e\u9f7f\u8f6e\u7bb1\u4e0e\u5de5\u827a\u8bbe\u5907\u5728\u540c\u4e00\u6d01\u51c0\u5ba4\u73af\u5883\u4e2d\u8fd0\u884c\u3002<\/p>\n

FOUP \u8fd0\u8f93 AGV \u9f7f\u8f6e\u7bb1\u8981\u6c42\u7ed3\u5408\u4e86\u6a21\u5757 2-3 \u7684\u6d01\u51c0\u5ba4\u89c4\u8303\u548c\u7b2c 12 \u6761\u7684 AGV \u7279\u5b9a\u8981\u6c42\uff1a\u5dee\u901f\u9a71\u52a8\u901f\u5ea6\u540c\u6b65\uff08\u5339\u914d\u5bf9\uff0c\u22640.01% \u6bd4\u7387\u53d8\u5316\u8bc1\u4e66\uff09\u3001\u4f4e\u8fd0\u884c\u566a\u58f0\uff08\u53ef\u80fd\u5e72\u6270\u76f8\u90bb\u8231\u5ba4\u9644\u8fd1\u5149\u523b\u5bf9\u51c6\u7684\u58f0\u632f\u52a8\u5728\u8231\u5ba4\u8fb9\u754c\u5904\u5fc5\u987b\u4f4e\u4e8e 55 dB(A)\uff09\u548c\u96f6\u7ef4\u62a4\u5bc6\u5c01\u7ed3\u6784\u3002<\/p>\n

\u8fd9 EP-KF\/KH \u51c6\u53cc\u66f2\u9762\u7cfb\u5217<\/a> \u9002\u7528\u4e8e\u97e9\u56fd\u5de5\u5382\u7684AGV\u9a71\u52a8\u8f6e\u2014\u2014\u5de5\u5382\u73af\u5883\u5e38\u5e74\u4fdd\u630120\u00b0C\u6052\u6e29\uff0c\u8fdc\u9ad8\u4e8eKF\/KH\u89c4\u5b9a\u76840\u00b0C\u6700\u4f4e\u5de5\u4f5c\u6e29\u5ea6\u3002\u51c6\u53cc\u66f2\u9762\u9f7f\u8f6e\u7684\u63a5\u89e6\u51e0\u4f55\u5f62\u72b6\u5728\u76f8\u540c\u626d\u77e9\u4e0b\u6bd4\u6807\u51c6\u884c\u661f\u9f7f\u8f6e\u964d\u4f4e\u7ea66-8 dB(A)\u7684\u8fd0\u884c\u566a\u97f3\uff0c\u8fd9\u5728\u5bf9\u58f0\u5b66\u8981\u6c42\u4e25\u683c\u7684\u5de5\u5382\u73af\u5883\u4e2d\u610f\u4e49\u91cd\u5927\u3002\u5bf9\u4e8eFOUP\u8fd0\u8f93AGV\uff0c\u9664\u5339\u914d\u5bf9\u901f\u5ea6\u540c\u6b65\u8bc1\u4e66\u5916\uff0c\u8fd8\u9700\u6307\u5b9a\u6d01\u51c0\u5ba4\u6da6\u6ed1\u5242\uff08PFPE\uff09\u548cFFKM\u8f74\u5c01\u3002<\/p>\n

\"\u97e9\u56fd<\/p>\n

\n\n\n\n\n\n\n\n\n\n\n
\u534a\u5bfc\u4f53\u8bbe\u5907\u9a71\u52a8<\/th>\n\u53cd\u5f39\u8981\u6c42\u3002<\/th>\n\u6d01\u51c0\u5ba4\u89c4\u683c<\/th>\n\u97e9\u56fd\u6c38\u6052\u529b\u91cf\u7cfb\u5217<\/th>\n<\/tr>\n<\/thead>\n
\u6676\u5706\u5904\u7406\u5668 \u03b8 \u8f74 (ISO 4\u20135)<\/td>\n\u22641 \u5f27\u5206<\/td>\nPFPE + FFKM + \u9633\u6781\u6c27\u5316<\/td>\nEP-AFH<\/a> +\u6d01\u51c0\u5ba4\u89c4\u683c<\/td>\n<\/tr>\n
\u6676\u5706\u642c\u8fd0\u5668\u5ef6\u4f38\u8f74\uff08ISO 4\u20135\uff09<\/td>\n\u22643 \u5f27\u5206<\/td>\nPFPE + FFKM<\/td>\nEP-AB P0\/P1<\/a> +\u6d01\u51c0\u5ba4\u89c4\u683c<\/td>\n<\/tr>\n
FOUP AGV\u9a71\u52a8\u8f6e\uff08ISO 6\u20137\uff09<\/td>\n\u5339\u914d\u6bd4\u4f8b\u22640.01%<\/td>\nPFPE + FKM \u5bc6\u5c01<\/td>\nEP-KF\u914d\u5bf9<\/a> +\u6d01\u51c0\u5ba4\u89c4\u683c<\/td>\n<\/tr>\n
CMP \u5934\u90e8\u65cb\u8f6c\uff08ISO 6\uff09<\/td>\n\u22641 \u5f27\u5206<\/td>\nPFPE + FFKM + \u9633\u6781\u6c27\u5316<\/td>\nEP-AFH + \u6d01\u51c0\u5ba4\u89c4\u683c<\/td>\n<\/tr>\n
\u88c5\u8f7d\u7aef\u53e3\u5bf9\u51c6\u9636\u6bb5\uff08ISO 5\uff09<\/td>\n\u22641 \u5f27\u5206<\/td>\nPFPE + FFKM + \u9633\u6781\u6c27\u5316<\/td>\nEP-ABR P0<\/a> \u6216 EP-AFH + \u6d01\u51c0\u5ba4\u89c4\u8303<\/td>\n<\/tr>\n
\u6676\u5706\u5382\u652f\u6301\/\u5b9e\u7528\u9a71\u52a8\u5668\uff08ISO 8\uff09<\/td>\nP2 \u5145\u8db3<\/td>\n\u6807\u51c6\u5e93\u5b58<\/td>\nEP-AB P2 \u6807\u51c6\u578b\u2014\u2014\u65e0\u9700\u7279\u6b8a\u8ba2\u8d2d<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n

<\/p>\n

\n

MRAM\u5236\u9020\u548cEUV\u5149\u523b\u2014\u2014\u975e\u78c1\u6027\u7ed3\u6784\u89c4\u8303<\/h2>\n

\u78c1\u6027\u968f\u673a\u5b58\u53d6\u5b58\u50a8\u5668 (MRAM) \u548c\u81ea\u65cb\u8f6c\u79fb\u529b\u77e9\u968f\u673a\u5b58\u53d6\u5b58\u50a8\u5668 (STT-RAM) \u7684\u5236\u9020\u2014\u2014\u4e09\u661f\u548c SK \u6d77\u529b\u58eb\u6b63\u5728\u7814\u53d1\u7684\u65b0\u5174\u5148\u8fdb\u5de5\u827a\u6280\u672f\u2014\u2014\u9700\u8981\u5728\u5b9a\u4e49\u78c1\u96a7\u9053\u7ed3 (MTJ) \u5c42\u53e0\u7ed3\u6784\u7684\u6574\u4e2a\u6c89\u79ef\u6b65\u9aa4\u4e2d\u4fdd\u6301\u53d7\u63a7\u7684\u78c1\u573a\u73af\u5883\u3002\u8fd9\u4e9b\u5c42\u7684\u77eb\u987d\u529b\u5728 5 \u81f3 50 \u5965\u65af\u7279\u8303\u56f4\u5185\uff1b\u5373\u4f7f\u5728\u6c89\u79ef\u6b65\u9aa4\u4e2d\u9644\u8fd1\u8bbe\u5907\u4ea7\u751f\u7684 1 \u5965\u65af\u7279\u7684\u6742\u6563\u78c1\u573a\u4e5f\u4f1a\u6539\u53d8 MTJ \u5c42\u4e2d\u9884\u671f\u7684\u78c1\u77e9\u65b9\u5411\u3002<\/p>\n

\"\u5e73\u9762\u9f7f\u8f6e\u7bb1\u5256\u9762\u56fe\"<\/p>\n

\u81ea2019\u5e74\u8d77\uff0c\u4e09\u661f\u4f4d\u4e8e\u534e\u57ce\u548c\u5e73\u6cfd\u7684\u6676\u5706\u5382\u5f00\u59cb\u90e8\u7f72\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u7cfb\u7edf\u3002\u8be5\u7cfb\u7edf\u91c7\u7528\u7684\u7535\u5b50\u5149\u8f74\u5bf9\u4e9a\u7eb3\u7279\u65af\u62c9\u7ea7\u7684\u6742\u6563\u78c1\u573a\u975e\u5e38\u654f\u611f\u3002\u4e00\u4e2a\u4f4d\u4e8e\u8ddd\u7535\u5b50\u5149\u8f74500\u6beb\u7c73\u5904\u7684\u6807\u51c6\u94a2\u5236\u9f7f\u8f6e\u7bb1\u4f1a\u4ea7\u751f\u7ea6100-500\u7eb3\u7279\u65af\u62c9\u7684\u6742\u6563\u78c1\u573a\uff0c\u6bd4\u7cfb\u7edf\u6240\u9700\u7684\u78c1\u573a\u7a33\u5b9a\u6027\u9ad8\u51fa\u4e24\u5230\u56db\u4e2a\u6570\u91cf\u7ea7\u3002<\/p>\n

\n
\u78c1\u5bfc\u7387\u6bd4\u8f83\u2014\u2014\u53d8\u901f\u7bb1\u58f3\u4f53\u6750\u6599<\/div>\n
\n
\n
\u6807\u51c6\u78b3\u94a2\uff08\u94c1\u78c1\u6027\uff09<\/span>
\n\u03bc\u1d63 \u2248 100\u20131,000 \u2014 \u4e0d\u9002\u7528\u4e8e\u78c1\u654f\u611f\u533a\u57df<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
\u5408\u91d1\u94a2\uff08\u8f74\u627f\u94a2\uff09<\/span>
\n\u03bc\u1d63 \u2248 50\u2013200 \u2014 \u4e0d\u9002\u7528\u4e8e\u78c1\u654f\u611f\u533a\u57df<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
\u5965\u6c0f\u4f53SS316L\uff08\u975e\u78c1\u6027\u4e0d\u9508\u94a2\uff09<\/span>
\n\u03bc\u1d63 \u2248 1.003 \u2014 \u5bf9\u4e8e\u5927\u591a\u6570\u6676\u5706\u5382\u533a\u57df\u800c\u8a00\u662f\u53ef\u4ee5\u63a5\u53d7\u7684\u3002<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n
\n
6061-T6\u94dd\u5408\u91d1<\/span>
\n\u03bc\u1d63 \u2248 1.000006 \u2014 \u78c1\u4fe1\u53f7\u53ef\u5ffd\u7565\u4e0d\u8ba1<\/span><\/div>\n
\n
<\/div>\n<\/div>\n<\/div>\n<\/div>\n

\u76f8\u5bf9\u78c1\u5bfc\u7387\u03bc\u1d63\u3002\u6570\u503c\u8d8a\u4f4e\uff0c\u78c1\u4fe1\u53f7\u8d8a\u5f31\u3002\u5728\u76f8\u540c\u8ddd\u79bb\u4e0b\uff0c\u6807\u51c6\u94a2\u5236\u9f7f\u8f6e\u7bb1\u4ea7\u751f\u7684\u6742\u6563\u78c1\u573a\u6bd4\u94dd\u5236\u5916\u58f3\u7684\u540c\u7c7b\u4ea7\u54c1\u9ad8\u7ea61000\u500d\u3002<\/p>\n<\/div>\n

\u5bf9\u4e8e\u5728MRAM\u548cEUV\u9886\u57df\u5de5\u4f5c\u7684\u97e9\u56fd\u8bbe\u5907\u4f9b\u5e94\u5546\uff0c\u5305\u62ec\u90a3\u4e9b\u8bbe\u8ba1\u7d27\u51d1\u578b\u5e73\u53f0\u7cfb\u7edf\u7684\u4f9b\u5e94\u5546\u800c\u8a00\uff0c EP-ADS \u7d27\u51d1\u578b\u7cfb\u5217<\/a>\u97e9\u56fdEver-Power EP\u7cfb\u5217\u9f7f\u8f6e\u7bb1\u53ef\u9009\u914d\u94dd\u5408\u91d1\u5916\u58f3\uff0c\u5305\u62ec\u58f3\u4f53\u548c\u884c\u661f\u67b6\u90e8\u4ef6\u3002\u9700\u8981\u6ce8\u610f\u7684\u662f\uff0c\u5185\u90e8\u94a2\u5236\u9f7f\u8f6e\u5143\u4ef6\uff08\u884c\u661f\u9f7f\u8f6e\u3001\u73af\u5f62\u9f7f\u8f6e\u3001\u592a\u9633\u9f7f\u8f6e\uff09\u4ecd\u4e3a\u94a2\u5236\u2014\u2014\u8fd9\u662f\u7cbe\u5bc6\u9f7f\u8f6e\u5236\u9020\u7684\u5fc5\u7136\u8981\u6c42\u3002\u7531\u4e8e\u94a2\u5236\u9f7f\u8f6e\u5143\u4ef6\u9ad8\u901f\u65cb\u8f6c\uff08\u964d\u4f4e\u4e86\u51c0\u9759\u78c1\u573a\u8d21\u732e\uff09\uff0c\u4e14\u5916\u58f3\u5bf9\u5176\u8fdb\u884c\u4e86\u6709\u6548\u5c4f\u853d\uff0c\u56e0\u6b64\u5176\u4ea7\u751f\u7684\u78c1\u6027\u8fdc\u5c0f\u4e8e\u58f3\u4f53\u3002\u5b8c\u5168\u975e\u78c1\u6027\u7ed3\u6784\uff08\u5305\u62ec\u9676\u74f7\u6216\u949b\u5408\u91d1\u9f7f\u8f6e\u5143\u4ef6\uff09\u5c5e\u4e8e\u5b9a\u5236\u5de5\u7a0b\u9879\u76ee\uff0c\u8d85\u51fa\u4efb\u4f55\u5236\u9020\u5546\u7684\u6807\u51c6\u4ea7\u54c1\u8303\u56f4\u3002<\/p>\n<\/section>\n

<\/p>\n

\n

\u4e09\u661f\u548cSK\u6d77\u529b\u58eb\u4f9b\u5e94\u94fe\u2014\u2014\u8bbe\u5907\u8ba4\u8bc1\u7684\u6587\u4ef6\u8981\u6c42<\/h2>\n

\u53c2\u4e0e\u4e09\u661f\uff08\u5e73\u6cfd\u3001\u534e\u57ce\u3001\u5668\u5174\uff09\u548cSK\u6d77\u529b\u58eb\uff08\u6e05\u5dde\u3001\u5229\u5ddd\uff09\u9879\u76ee\u7ade\u6807\u7684\u97e9\u56fd\u534a\u5bfc\u4f53\u8bbe\u5907\u4f9b\u5e94\u5546\uff0c\u5fc5\u987b\u901a\u8fc7\u591a\u9636\u6bb5\u7684\u4f9b\u5e94\u5546\u9a8c\u6536\u6d41\u7a0b\u6765\u9a8c\u8bc1\u5176\u8bbe\u5907\u3002\u9a71\u52a8\u7ec4\u4ef6\uff08\u5305\u62ec\u9f7f\u8f6e\u7bb1\uff09\u7684\u7ec4\u4ef6\u7ea7\u6587\u6863\u901a\u5e38\u9700\u8981\u5728\u5b89\u88c5\u9a8c\u8bc1 (IQ) \u9636\u6bb5\u63d0\u4ea4\u3002\u6240\u9700\u6587\u6863\u5305\u56e0\u5de5\u827a\u533a\u57df\u6d01\u51c0\u5ba4\u7b49\u7ea7\u548c\u8bbe\u5907\u7c7b\u578b\u800c\u5f02\uff0c\u4f46ISO 4-5\u7ea7\u6d01\u51c0\u5ba4\u4e2d\u7cbe\u5bc6\u9a71\u52a8\u7ec4\u4ef6\u7684\u6807\u51c6\u6587\u6863\u5305\u901a\u5e38\u5305\u542b\u4ee5\u4e0b\u5185\u5bb9\u3002<\/p>\n

\n
\n
\u2460\u6d01\u51c0\u5ba4\u6750\u6599\u8ba4\u8bc1<\/div>\n

\u5236\u9020\u5546\u9700\u63d0\u4f9b\u4e66\u9762\u58f0\u660e\uff0c\u8bc1\u660e\u6240\u6709\u6750\u6599\uff08\u5916\u58f3\u3001\u5bc6\u5c01\u4ef6\u3001\u6da6\u6ed1\u5242\uff09\u5747\u7b26\u5408\u5de5\u5382\u7684\u6750\u6599\u89c4\u683c\u3002\u5bf9\u4e8e PFPE \u6da6\u6ed1\u5242\uff1a\u9700\u6ce8\u660e PFPE \u7b49\u7ea7\u548c\u4f9b\u5e94\u5546\u540d\u79f0\u3002\u5bf9\u4e8e FFKM \u5bc6\u5c01\u4ef6\uff1a\u9700\u786e\u8ba4\u6c1f\u78b3\u805a\u5408\u7269\u89c4\u683c\u3002\u97e9\u56fd Ever-Power \u516c\u53f8\u63d0\u4f9b\u97e9\u6587\u4e66\u9762\u58f0\u660e\u3002<\/p>\n<\/div>\n

\n
\u2461 \u8131\u6c14\u6d4b\u8bd5\u6570\u636e<\/div>\n

\u6da6\u6ed1\u5242\u548c\u5bc6\u5c01\u6750\u6599\u5728 20\u201325\u00b0C \u4e0b\u7684 ASTM E1603 \u6216\u540c\u7b49\u8131\u6c14\u6d4b\u8bd5\u7ed3\u679c\u3002\u7ed3\u679c\u663e\u793a\u603b\u8d28\u91cf\u635f\u5931 (TML) \u548c\u6536\u96c6\u5230\u7684\u6325\u53d1\u6027\u53ef\u51b7\u51dd\u7269\u8d28 (CVCM)\u3002\u5bf9\u4e8e PFPE \u6da6\u6ed1\u8102\uff0c\u8fd9\u4e9b\u503c\u901a\u5e38\u5c0f\u4e8e 0.01% TML \u548c 0.001% CVCM\uff0c\u8fdc\u4f4e\u4e8e\u6807\u51c6\u5236\u9020\u9650\u503c\u3002<\/p>\n<\/div>\n

\n
\u2462 \u95f4\u9699\u6d4b\u91cf\u8bc1\u4e66<\/div>\n

\u9488\u5bf9\u7279\u5b9a\u5355\u5143\u7684\u5b9e\u6d4b\u53cd\u51b2\u503c\uff08\u5e76\u975e\u4ec5\u6307\u7b49\u7ea7\u7b26\u5408\u6027\u58f0\u660e\uff09\u3002\u97e9\u56fd\u6c38\u529b\u7535\u529b\u516c\u53f8\u4e3a\u6240\u6709EP-AFH\u7cfb\u5217\u5355\u5143\u4ee5\u53caP0\u548cP1\u7b49\u7ea7\u7684EP-AB\/AF\u7cfb\u5217\u5355\u5143\u63d0\u4f9b\u6b64\u9879\u6570\u636e\u3002\u5b9a\u4f4d\u5173\u952e\u9a71\u52a8\u8f74\u7684\u5b89\u88c5\u8c03\u8bd5\u6587\u6863\u4e2d\u5fc5\u987b\u5305\u542b\u6b64\u9879\u6570\u636e\u3002<\/p>\n<\/div>\n

\n
\u2463 RoHS \u548c REACH \u5408\u89c4\u58f0\u660e<\/div>\n

\u9700\u63d0\u4f9b\u4e66\u9762\u786e\u8ba4\uff0c\u8bc1\u660e\u8be5\u53d8\u901f\u7bb1\u4e0d\u542b\u6b27\u76df RoHS 2\uff082011\/65\/EU \u4fee\u8ba2\u7248\uff09\u548c REACH\uff08EC 1907\/2006\uff09SVHC \u6e05\u5355\u4e2d\u5217\u660e\u7684\u7981\u7528\u7269\u8d28\u3002\u51fa\u552e\u7ed9\u8de8\u56fd\u6676\u5706\u5382\u8fd0\u8425\u5546\u7684\u8bbe\u5907\u5fc5\u987b\u63d0\u4f9b\u6b64\u6587\u4ef6\u3002\u97e9\u56fd Ever-Power \u516c\u53f8\u5c06\u6b64\u6587\u4ef6\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u8ba2\u5355\u7684\u6807\u51c6\u6587\u4ef6\u63d0\u4f9b\u3002<\/p>\n<\/div>\n

\n
\u2464 \u5c3a\u5bf8\u56fe\uff08PDF\uff0c\u97e9\u8bed+\u82f1\u8bed\uff09<\/div>\n

\u5305\u542b\u516c\u5dee\u7684\u5b8c\u6574\u5c3a\u5bf8\u56fe\uff0c\u7528\u4e8e\u5b89\u88c5\u9a8c\u8bc1\u3002\u6b64\u56fe\u7eb8\u4e3aIQ\/OQ\u534f\u8bae\u6587\u4ef6\u7684\u5fc5\u8981\u6587\u4ef6\u3002\u97e9\u56fdEver-Power\u516c\u53f8\u627f\u8bfa\uff0c\u6240\u6709EP\u7cfb\u5217\u578b\u53f7\u4ea7\u54c1\u4e0b\u5355\u540e3\u4e2a\u5de5\u4f5c\u65e5\u5185\u5747\u53ef\u63d0\u4f9b\u6b64\u56fe\u7eb8\u3002<\/p>\n<\/div>\n

\n
\u2465 \u914d\u5bf9\u6bd4\u4f8b\u8bc1\u4e66\uff08\u4ec5\u9650AGV\uff09<\/div>\n

\u5bf9\u4e8e\u5dee\u901f\u9a71\u52a8\u7684FOUP AGV\uff1a\u63d0\u4f9b\u4e24\u4e2a\u9a71\u52a8\u8f6e\u9f7f\u8f6e\u7bb1\u7684\u4f20\u52a8\u6bd4\u504f\u5dee\u8bc1\u660e\uff0c\u786e\u8ba4\u4e24\u7ec4\u9f7f\u8f6e\u7bb1\u7684\u4f20\u52a8\u6bd4\u5dee\u5f02\u22640.01%\u3002\u97e9\u56fdEver-Power\u516c\u53f8\u5728\u8ba2\u8d2d\u6210\u5bf9AGV\u65f6\uff0c\u5c06\u6b64\u4f5c\u4e3a\u6807\u51c6\u9009\u9879\u63d0\u4f9b\u3002<\/p>\n<\/div>\n<\/div>\n

\u97e9\u56fd\u6676\u5706\u5382\u8bbe\u5907\u9879\u76ee\u91c7\u8d2d\u65f6\u95f4\u5b89\u6392\uff1a <\/strong>
\n\u4e09\u661f\u548cSK\u6d77\u529b\u58eb\u7684\u8bbe\u5907\u8ba4\u8bc1\u5468\u671f\u901a\u5e38\u4e3a6-12\u4e2a\u6708\uff0c\u4ece\u8bbe\u5907\u8bbe\u8ba1\u5b9a\u7a3f\u5230\u5de5\u5382\u9a8c\u6536\u3002\u9f7f\u8f6e\u7bb1\u6587\u6863\u5305\u9700\u8981\u5728IQ\u9636\u6bb5\u63d0\u4ea4\uff0c\u901a\u5e38\u5728\u8ba4\u8bc1\u5468\u671f\u7684\u7b2c4-6\u4e2a\u6708\u3002\u5bf9\u4e8e\u6d01\u51c0\u5ba4\u4e13\u7528\u9f7f\u8f6e\u7bb1\uff08PFPE+FFKM\uff0c\u4ea4\u8d27\u5468\u671f2-4\u5468\uff09\uff0c\u8ba2\u5355\u63d0\u4ea4\u65f6\u95f4\u5e94\u4e0d\u665a\u4e8eIQ\u6587\u6863\u63d0\u4ea4\u622a\u6b62\u65e5\u671f\u524d10\u5468\u3002\u8bf7\u5728\u8bbe\u8ba1\u9636\u6bb5\uff08\u800c\u975e\u91c7\u8d2d\u9636\u6bb5\uff09\u8054\u7cfb\u97e9\u56fd\u6c38\u529b\u7535\u529b\u516c\u53f8\uff0c\u4ee5\u786e\u8ba4\u60a8\u7279\u5b9a\u5de5\u5382\u533a\u57df\u548c\u6d01\u51c0\u5ba4\u7b49\u7ea7\u6240\u9700\u7684\u6587\u6863\u53ef\u7528\u6027\u548c\u4ea4\u8d27\u5468\u671f\u3002<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\u6c14\u4f53\u91ca\u653e\u9884\u7b97\u8ba1\u7b97\u2014\u2014\u5982\u4f55\u786e\u5b9a\u9700\u8981\u6807\u51c6\u6da6\u6ed1\u8102\u8fd8\u662f PFPE \u6da6\u6ed1\u8102<\/h2>\n

\u9009\u62e9\u4f7f\u7528\u6807\u51c6\u5bc6\u5c01\u6da6\u6ed1\u8102\u8fd8\u662fPFPE\u6d01\u51c0\u5ba4\u6da6\u6ed1\u5242\uff0c\u53d6\u51b3\u4e8e\u9f7f\u8f6e\u7bb1\u5bf9\u6d01\u51c0\u5ba4\u7a7a\u6c14\u7684\u91ca\u6c14\u91cf\u53ca\u5176\u4e0e\u88f8\u9732\u6676\u5706\u8868\u9762\u7684\u8ddd\u79bb\u3002\u4ee5\u4e0b\u8ba1\u7b97\u65b9\u6cd5\u4f7f\u97e9\u56fd\u8bbe\u5907\u4f9b\u5e94\u5546\u80fd\u591f\u4ee5\u5b9a\u91cf\u7684\u65b9\u5f0f\u505a\u51fa\u9009\u62e9\uff0c\u800c\u4e0d\u662f\u91c7\u7528\u53ef\u80fd\u589e\u52a0\u4e0d\u5fc5\u8981\u6210\u672c\u7684\u4fdd\u5b88\u9ed8\u8ba4\u503c\u3002<\/p>\n

\n

\u6c14\u4f53\u6392\u653e\u6c61\u67d3\u9884\u7b97\u2014\u2014\u7b80\u5316\u6a21\u578b<\/p>\n

\u5355\u4e2a\u9f7f\u8f6e\u7bb1\u5728\u6676\u5706 D \u4e0a\u7684\u6c89\u79ef\u901f\u7387\uff08ng\/cm\u00b2\/hr\uff09\uff1a<\/p>\n

D \u2248 P_vap \u00d7 M_grease \u00d7 k_geom \/ (R \u00d7 T)<\/p>\n

\u5728\u54ea\u91cc\uff1a
\nP_vap = \u6da6\u6ed1\u6cb9\u57fa\u7840\u6cb9\u5728 20\u00b0C \u65f6\u7684\u84b8\u6c14\u538b (Pa)
\nM_grease = \u66b4\u9732\u7684\u6cb9\u8102\u8868\u9762\u79ef\uff08cm\u00b2\uff09
\nk_geom = \u51e0\u4f55\u56e0\u5b50\uff08\u53d6\u51b3\u4e8e\u8ddd\u79bb\u548c\u89d2\u5ea6\uff0c\u7ea6\u4e3a 10\u207b\u2075 \u81f3 10\u207b\u00b3\uff09
\nR\u3001T = \u6c14\u4f53\u5e38\u6570\u3001\u6e29\u5ea6<\/p>\n

\u77ff\u7269\u6cb9 PAO\uff08\u6807\u51c6\uff09\uff1aP_vap \u2248 10\u207b\u00b3 Pa
\n\u2192 D \u2248 0.05\u20130.5 ng\/cm\u00b2\/hr\uff08\u8ddd\u79bb 300 \u6beb\u7c73\uff09
\n\u2192 \u8d85\u8fc7 24 \u5c0f\u65f6\uff1a\u6676\u5706\u4e0a\u7d2f\u79ef\u91cf\u4e3a 1.2\u201312 ng\/cm\u00b2 \u2190 \u4e0d\u7b26\u5408 ISO 5 \u6807\u51c6<\/p>\n

PFPE\uff08\u6d01\u51c0\u5ba4\u7ea7\uff09\uff1aP_vap \u2248 10\u207b\u00b9\u2070 Pa
\n\u2192 D < 10\u207b\u2077 ng\/cm\u00b2\/hr \u2014 \u4f4e 7 \u4e2a\u6570\u91cf\u7ea7
\n\u2192 \u65e0\u6cd5\u7528\u6807\u51c6\u5206\u6790\u65b9\u6cd5\u6d4b\u91cf \u2713<\/p><\/div>\n<\/div>\n

\u8ba1\u7b97\u7ed3\u679c\u8868\u660e\uff0c\u5bf9\u4e8e\u4efb\u4f55\u4f4d\u4e8e\u88f8\u9732\u6676\u5706\u89c6\u7ebf\u8303\u56f4\u5185\u7684\u9f7f\u8f6e\u7bb1\uff0cPFPE \u6da6\u6ed1\u8102\u662f\u5fc5\u9700\u7684\uff0c\u800c\u4e0d\u4ec5\u4ec5\u662f\u4f18\u9009\uff1a\u6807\u51c6\u6da6\u6ed1\u8102\u7684\u84b8\u6c7d\u538b\u6bd4 PFPE \u9ad8\u4e03\u4e2a\u6570\u91cf\u7ea7\u3002\u4efb\u4f55\u51e0\u4f55\u56e0\u7d20\u6216\u8ddd\u79bb\u5e03\u7f6e\u90fd\u65e0\u6cd5\u5f25\u8865\u8fd9\u79cd\u6839\u672c\u5dee\u5f02\u3002\u5bf9\u4e8e ISO 3-6 \u7ea7\u533a\u57df\u5185\u4efb\u4f55\u53ef\u80fd\u5c06\u6676\u5706\u66b4\u9732\u4e8e\u5927\u6c14\u4e2d\u7684\u9f7f\u8f6e\u7bb1\uff0cPFPE \u6da6\u6ed1\u8102\u662f\u5f3a\u5236\u6027\u8981\u6c42\uff0c\u800c\u975e\u4f18\u9009\u3002<\/p>\n

\"\u884c\u661f\u9f7f\u8f6e\u7bb1\u52a0\u5de5\u7ec6\u8282\"<\/p>\n

\u5728\u534a\u5bfc\u4f53\u5de5\u5382\u4e2d\uff0c\u5982\u679c\u53ef\u4ee5\u4f7f\u7528\u6807\u51c6\u6da6\u6ed1\u8102\uff1a <\/strong>
\n\u5b89\u88c5\u5728 ISO 8 \u7ea7\u6216\u66f4\u4f4e\u7ea7\u522b\u6d01\u51c0\u533a\uff08\u4f8b\u5982\u6676\u5706\u5382\u8f85\u52a9\u8d70\u5eca\u3001\u516c\u7528\u8bbe\u65bd\u95f4\u3001\u8bbe\u5907\u5e95\u5c42\uff09\u4e14\u6676\u5706\u4e0d\u4f1a\u63a5\u89e6\u5230\u7684\u533a\u57df\u7684\u9f7f\u8f6e\u7bb1\u65e0\u9700\u4f7f\u7528 PFPE \u6da6\u6ed1\u5242\u3002\u5bf9\u4e8e\u8fd9\u4e9b\u533a\u57df\uff0c\u4f7f\u7528\u6807\u51c6 EP-AB \u6216 EP-BPG \u7cfb\u5217\u6da6\u6ed1\u5242\u642d\u914d\u6807\u51c6\u6da6\u6ed1\u8102\u662f\u6b63\u786e\u4e14\u6700\u5177\u6210\u672c\u6548\u76ca\u7684\u9009\u62e9\u3002\u53ea\u6709\u5f53\u9f7f\u8f6e\u7bb1\u4f4d\u4e8e\u53ef\u80fd\u63a5\u89e6\u5230\u6676\u5706\u7684\u533a\u57df\u65f6\uff0c\u4f7f\u7528 PFPE \u6da6\u6ed1\u5242\u7684\u989d\u5916\u6210\u672c\uff08\u901a\u5e38\u9ad8\u51fa 30-50%\uff09\u624d\u662f\u5408\u7406\u7684\u3002\u65e0\u8bba\u9f7f\u8f6e\u7bb1\u4f4d\u4e8e\u54ea\u4e2a\u533a\u57df\uff0c\u90fd\u5c06\u5176\u6d01\u51c0\u5ba4\u89c4\u683c\u5e94\u7528\u4e8e\u6676\u5706\u5382\u5185\u7684\u6240\u6709\u9f7f\u8f6e\u7bb1\uff0c\u4f1a\u4e0d\u5fc5\u8981\u5730\u589e\u52a0\u7269\u6599\u6e05\u5355\u6210\u672c\uff0c\u800c\u6ca1\u6709\u5b9e\u9645\u7684\u529f\u80fd\u4f18\u52bf\u3002<\/span><\/div>\n<\/section>\n

<\/p>\n

\n

\u5e38\u89c1\u95ee\u9898\u89e3\u7b54 \u2014 \u97e9\u56fd\u534a\u5bfc\u4f53\u8bbe\u5907\u4e2d\u7684\u884c\u661f\u9f7f\u8f6e\u7bb1<\/h2>\n
\n
\n

\u95ee<\/span>
\n\u6211\u4eec\u7684\u97e9\u56fd\u8bbe\u5907\u5ba2\u6237\uff08\u4e00\u5bb6\u4e3a\u4e09\u661f\u4f9b\u8d27\u7684\u6676\u5706\u5382\u8bbe\u5907OEM\u5382\u5546\uff09\u8981\u6c42\u53d8\u901f\u7bb1\u5fc5\u987b\u201c\u65e0\u9897\u7c92\u201d\u3002\u8fd9\u5728\u5b9e\u9645\u64cd\u4f5c\u4e2d\u7a76\u7adf\u610f\u5473\u7740\u4ec0\u4e48\uff1f<\/h3>\n

\u5728\u97e9\u56fd\u6676\u5706\u5382\u7684\u91c7\u8d2d\u672f\u8bed\u4e2d\uff0c\u201c\u65e0\u9897\u7c92\u201d\u901a\u5e38\u6307\u7684\u662f\u9f7f\u8f6e\u7bb1\u4e0d\u5f97\u5411\u6d01\u51c0\u5ba4\u5927\u6c14\u4e2d\u91ca\u653e\u8d85\u8fc7\u7279\u5b9a\u5c3a\u5bf8\u548c\u6570\u91cf\u9608\u503c\u7684\u9897\u7c92\u7269\uff0c\u800c\u975e\u6307\u5176\u9897\u7c92\u7269\u4ea7\u751f\u91cf\u4e3a\u96f6\u3002\u5b9e\u9645\u89c4\u683c\u901a\u5e38\u4ee5\u7279\u5b9a\u8ddd\u79bb\u548c\u6c14\u6d41\u6761\u4ef6\u4e0b\u7684\u6700\u5927\u9897\u7c92\u7269\u751f\u6210\u901f\u7387\u6765\u8868\u793a\uff0c\u6216\u8005\u4ee5\u6750\u6599\u517c\u5bb9\u6027\u58f0\u660e\u7684\u5f62\u5f0f\u8868\u660e\uff0c\u58f3\u4f53\u548c\u5bc6\u5c01\u4ef6\u91ca\u653e\u7684\u7c92\u5f84\u5927\u4e8e0.1\u5fae\u7c73\u7684\u9897\u7c92\u7269\u901f\u7387\u4e0d\u4f1a\u8d85\u8fc7\u6d01\u51c0\u5ba4\u9488\u5bf9\u8be5\u88c5\u7f6e\u7684\u9897\u7c92\u7269\u6d53\u5ea6\u9884\u7b97\u3002\u97e9\u56fdEver-Power\u516c\u53f8\u901a\u8fc7\u4ee5\u4e0b\u65b9\u5f0f\u89e3\u51b3\u4e86\u8fd9\u4e2a\u95ee\u9898\uff1a(1) \u4f7f\u7528\u5bc6\u5c01\u7ed3\u6784\u7684PFPE\u6da6\u6ed1\u5242\uff0c\u9632\u6b62\u6da6\u6ed1\u8102\u9897\u7c92\u8fc1\u79fb\uff1b(2) \u4f7f\u7528FFKM\u8f74\u5c01\uff0c\u5728\u6574\u4e2a\u5de5\u4f5c\u6e29\u5ea6\u8303\u56f4\u5185\u4fdd\u6301\u826f\u597d\u7684\u5bc6\u5c01\u6027\u80fd\uff1b(3) \u4f7f\u7528\u4e0d\u8131\u843d\u6cb9\u6f06\u9897\u7c92\u7684\u9633\u6781\u6c27\u5316\u94dd\u58f3\u4f53\u3002\u901a\u5e38\u60c5\u51b5\u4e0b\uff0c\u97e9\u56fd\u8bbe\u5907OEM\u5382\u5546\u800c\u975e\u9f7f\u8f6e\u7bb1\u4f9b\u5e94\u5546\u4f1a\u8fdb\u884c\u7cfb\u7edf\u7ea7\uff08\u9f7f\u8f6e\u7bb1\u5b89\u88c5\u5728\u8bbe\u5907\u4e2d\uff0c\u5728\u6d01\u51c0\u5ba4\u6761\u4ef6\u4e0b\u8fd0\u884c\uff09\u7684\u5b8c\u6574\u9897\u7c92\u7269\u751f\u6210\u6d4b\u8bd5\u3002<\/p>\n<\/div>\n

\n

\u95ee<\/span>
\n\u6211\u4eec\u6b63\u5728\u8bbe\u8ba1\u4e00\u6b3e\u97e9\u56fd\u6676\u5706\u5382\u7684CMP\uff08\u5316\u5b66\u673a\u68b0\u629b\u5149\uff09\u5934\u65cb\u8f6c\u9a71\u52a8\u88c5\u7f6e\u3002\u8bf7\u95ee\u5177\u4f53\u7684\u9f7f\u8f6e\u7bb1\u914d\u7f6e\u662f\u4ec0\u4e48\uff1f<\/h3>\n

CMP\u629b\u5149\u5934\u65cb\u8f6c\u9a71\u52a8\u88c5\u7f6e\u5c06\u629b\u5149\u5934\u5b9a\u4f4d\u5728\u5de5\u4f5c\u53f0\u4e0a\u65b9\uff0c\u5e76\u5728\u629b\u5149\u8fc7\u7a0b\u4e2d\u9a71\u52a8\u5176\u65cb\u8f6c\u3002\u9a71\u52a8\u88c5\u7f6e\u7684\u8981\u6c42\u5305\u62ec\uff1a\u4e2d\u7b49\u8f6c\u901f\uff0830\u2013150 rpm\uff09\u3001\u4e2d\u7b49\u626d\u77e9\uff0850\u2013300 N\u00b7m\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u629b\u5149\u5934\u5c3a\u5bf8\u548c\u629b\u5149\u6db2\u7c7b\u578b\uff09\u3001\u22641\u5f27\u5206\u7684\u5b9a\u4f4d\u7cbe\u5ea6\uff0c\u4ee5\u53ca\u6d01\u51c0\u5ba4\u517c\u5bb9\u6027\uff08\u629b\u5149\u5934\u5728\u629b\u5149\u8fc7\u7a0b\u4e2d\u4f1a\u5728\u88f8\u9732\u7684\u6676\u5706\u8868\u9762\u4e0a\u8fd0\u884c\uff09\u3002EP-AFH\u7cfb\u5217\u662f\u6807\u51c6\u63a8\u8350\u4ea7\u54c1\u2014\u2014\u22641\u5f27\u5206\u7684\u6807\u51c6\u89c4\u683c\u3001\u7d27\u51d1\u7684\u5bc6\u5c01\u7ed3\u6784\uff0c\u5e76\u53ef\u9009\u914dPFPE\u6da6\u6ed1\u8102\u548cFFKM\u5bc6\u5c01\u4ef6\uff0c\u4ee5\u6ee1\u8db3ISO 5\u20136\u7ea7CMP\u6d01\u51c0\u5ba4\u7684\u8981\u6c42\u3002\u5c31\u65cb\u8f6c\u8f74\u800c\u8a00\uff0cEP-AFH\u76f4\u5217\u5f0f\u7cfb\u5217\u4f18\u4e8e\u76f4\u89d2\u5f0f\u914d\u7f6e\uff0c\u56e0\u4e3a\u5176\u7d27\u51d1\u7684\u8f74\u5411\u957f\u5ea6\u53ef\u4ee5\u51cf\u5c0f\u629b\u5149\u5934\u91cd\u91cf\u5bf9\u9f7f\u8f6e\u7bb1\u8f93\u51fa\u8f74\u627f\u4ea7\u751f\u7684\u529b\u81c2\u3002<\/p>\n<\/div>\n

\n

\u95ee<\/span>
\n\u6211\u4eec\u76ee\u524d\u7684\u53d8\u901f\u7bb1\u4f7f\u7528\u6807\u51c6\u5bc6\u5c01\u6da6\u6ed1\u8102\uff0c\u5df2\u5728\u97e9\u56fd\u5de5\u5382\u751f\u4ea718\u4e2a\u6708\uff0c\u672a\u53d1\u751f\u4efb\u4f55\u6c61\u67d3\u4e8b\u4ef6\u3002\u6211\u4eec\u9700\u8981\u6539\u7528PFPE\u6da6\u6ed1\u8102\u5417\uff1f<\/h3>\n

\u672a\u68c0\u6d4b\u5230\u6c61\u67d3\u4e8b\u4ef6\u5e76\u4e0d\u4ee3\u8868\u4e0d\u5b58\u5728\u6c61\u67d3\u2014\u2014\u6d01\u51c0\u5ba4\u4e2d\u9f7f\u8f6e\u7bb1\u91ca\u653e\u7684\u6c14\u4f53\u9020\u6210\u7684\u5316\u5b66\u6c61\u67d3\u901a\u5e38\u662f\u5728\u6c61\u67d3\u4e8b\u4ef6\u53d1\u751f\u6570\u6708\u540e\u901a\u8fc7\u826f\u7387\u5206\u6790\u624d\u80fd\u68c0\u6d4b\u5230\uff0c\u800c\u975e\u5b9e\u65f6\u68c0\u6d4b\u3002\u4f8b\u5982\uff0c\u4e00\u5bb6\u6676\u5706\u5382\u5982\u679c\u5b9e\u73b0\u4e86 95% \u7684\u5149\u523b\u826f\u7387\uff0c\u5219\u53ef\u80fd\u56e0\u6709\u673a\u8868\u9762\u6c61\u67d3\u800c\u635f\u5931 2-3% \u7684\u826f\u7387\uff0c\u4f46\u5374\u65e0\u6cd5\u8ffd\u6eaf\u5230\u5177\u4f53\u7684\u6c61\u67d3\u6e90\u3002\u5982\u679c\u60a8\u7684\u9f7f\u8f6e\u7bb1\u4f4d\u4e8e ISO 5 \u7ea7\u6216\u66f4\u9ad8\u7ea7\u522b\u7684\u6d01\u51c0\u533a\u5185\uff0c\u4e14\u8ddd\u79bb\u88f8\u9732\u7684\u6676\u5706\u8868\u9762 1-2 \u7c73\u4ee5\u5185\uff0c\u5219\u6a21\u5757 8 \u4e2d\u7684\u6c14\u4f53\u91ca\u653e\u8ba1\u7b97\u65b9\u6cd5\u9002\u7528\u2014\u2014\u6807\u51c6\u77ff\u7269\u6cb9\u6da6\u6ed1\u8102\u7684\u6c89\u79ef\u901f\u7387\u662f\u53ef\u6d4b\u91cf\u7684\uff0c\u5e76\u4e14\u8d85\u8fc7\u4e86\u6d01\u51c0\u5ba4\u7684\u9650\u503c\u3002\u60a8\u7684\u5177\u4f53\u88c5\u7f6e\u4e2d\u662f\u5426\u5df2\u8ffd\u8e2a\u5230\u8fd9\u79cd\u6c89\u79ef\u901f\u7387\uff0c\u53d6\u51b3\u4e8e\u6676\u5706\u5382\u7684\u826f\u7387\u8ddf\u8e2a\u7cfb\u7edf\u3002\u97e9\u56fd\u6c38\u80fd\u516c\u53f8\u5f3a\u70c8\u5efa\u8bae\uff0c\u5bf9\u4e8e\u4f4d\u4e8e ISO 5 \u7ea7\u6216\u66f4\u9ad8\u7ea7\u522b\u6d01\u51c0\u533a\u5185\u3001\u9760\u8fd1\u88f8\u9732\u6676\u5706\u7684\u9f7f\u8f6e\u7bb1\uff0c\u65e0\u8bba\u662f\u5426\u5df2\u6b63\u5f0f\u786e\u8ba4\u53d1\u751f\u6c61\u67d3\u4e8b\u4ef6\uff0c\u90fd\u5e94\u4f7f\u7528 PFPE \u6da6\u6ed1\u5242\u3002<\/p>\n<\/div>\n

\n

\u95ee<\/span>
\n\u5bf9\u4e8e\u4e0e\u534a\u5bfc\u4f53\u914d\u5957\u8bbe\u65bd\u5171\u7528\u5382\u623f\u7684\u97e9\u56fd\u519c\u4e1a\u81ea\u52a8\u5316\u8bbe\u5907\uff0c\u6d01\u51c0\u5ba4\u9f7f\u8f6e\u7bb1\u89c4\u8303\u662f\u5426\u9002\u7528\uff1f<\/h3>\n

\u4e0d\u2014\u2014\u519c\u4e1a\u81ea\u52a8\u5316\u8bbe\u5907\u548c\u534a\u5bfc\u4f53\u5de5\u5382\u81ea\u52a8\u5316\u662f\u5b8c\u5168\u4e0d\u540c\u7684\u5e94\u7528\u7c7b\u522b\u3002\u97e9\u56fd\u7684\u519c\u4ea7\u54c1\u52a0\u5de5\u8bbe\u65bd\uff08\u7cae\u98df\u3001\u852c\u83dc\u3001\u98df\u54c1\u52a0\u5de5\uff09\u6ca1\u6709ISO 14644\u6d01\u51c0\u5ba4\u7684\u8981\u6c42\u3002\u97e9\u56fd\u519c\u4e1a\u81ea\u52a8\u5316\u7684\u9f7f\u8f6e\u7bb1\u89c4\u683c\u9075\u5faa\u7b2c9\u6761\u6240\u8ff0\u7684\u98df\u54c1\u52a0\u5de5\u536b\u751f\u8981\u6c42\uff08IP67\u9632\u62a4\u7b49\u7ea7\u3001\u7b26\u5408\u97e9\u56fd\u98df\u54c1\u836f\u54c1\u76d1\u7763\u7ba1\u7406\u5c40\uff08KFDA\uff09\u6807\u51c6\u3001\u5bc6\u5c01\u6da6\u6ed1\u8102\uff09\uff0c\u800c\u4e0d\u662f\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u7684\u89c4\u683c\u3002\u5982\u679c\u97e9\u56fd\u7684\u5de5\u5382\u540c\u65f6\u8fdb\u884c\u519c\u4ea7\u54c1\u52a0\u5de5\u548c\u534a\u5bfc\u4f53\u5c01\u88c5\uff08\u4f8b\u5982\uff0c\u4e3a\u534a\u5bfc\u4f53\u6676\u5706\u5382\u63d0\u4f9b\u7279\u79cd\u8584\u819c\u6216\u5305\u88c5\uff09\uff0c\u5219\u6bcf\u4e2a\u533a\u57df\u7684\u76f8\u5e94\u89c4\u683c\u5e94\u9075\u5faa\u8be5\u533a\u57df\u7684\u5b9e\u9645\u8981\u6c42\u2014\u2014\u519c\u4ea7\u54c1\u52a0\u5de5\u533a\u57df\u4f7f\u7528\u98df\u54c1\u7ea7\u9f7f\u8f6e\u7bb1\uff0c\u5982\u679c\u5de5\u5382\u5185\u7684\u4efb\u4f55\u533a\u57df\u88ab\u6307\u5b9a\u4e3a\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u6807\u51c6\uff0c\u5219\u8be5\u533a\u57df\u7684\u9f7f\u8f6e\u7bb1\u5e94\u9075\u5faaISO 14644\u7684\u8981\u6c42\u3002\u5bf9\u4e8e\u5411\u519c\u4ea7\u54c1\u52a0\u5de5\u5934\u7684\u591a\u8def\u8f93\u51fa\u914d\u7535\uff0c \u519c\u4e1a\u7528\u9525\u9f7f\u8f6e\u7bb1<\/a> \u5728\u6b64\u7c7b\u8bbe\u65bd\u7684\u975e\u6d01\u51c0\u5ba4\u533a\u57df\uff0c\u5c06 EP \u884c\u661f\u8f93\u51fa\u5206\u914d\u5230\u5404\u4e2a\u5904\u7406\u5934\u662f\u5408\u9002\u7684\u3002<\/p>\n<\/div>\n<\/div>\n<\/section>\n

<\/p>\n

\n

\u9009\u62e9\u97e9\u56fd\u6c38\u52a8\u529b\u534a\u5bfc\u4f53\u8bbe\u5907\u9f7f\u8f6e\u7bb1\uff0c\u6ee1\u8db3\u60a8\u7684\u9700\u6c42\u3002<\/h2>\n

\u97e9\u56fdEver-Power\u516c\u53f8\u63d0\u4f9b\u7b26\u5408\u6d01\u51c0\u5ba4\u6807\u51c6\u7684EP\u7cfb\u5217\u9f7f\u8f6e\u7bb1\uff0c\u91c7\u7528PFPE\u6da6\u6ed1\u5242\u3001FFKM\u5bc6\u5c01\u4ef6\u3001\u9633\u6781\u6c27\u5316\u5916\u58f3\uff0c\u5e76\u9644\u5e26\u5b8c\u6574\u7684\u4e09\u661f\/SK\u6d77\u529b\u58ebIQ\u6587\u6863\u5305\uff08\u97e9\u6587\u7248\uff09\uff0c\u4ea4\u8d27\u5468\u671f\u4e3a2-4\u5468\u3002\u5efa\u8bae\u5728\u8bbe\u8ba1\u9636\u6bb5\u5c31\u4e0e\u6211\u4eec\u5408\u4f5c\uff0c\u4ee5\u83b7\u5f97\u6700\u4f73\u6548\u679c\u3002<\/p>\n

EP-AFH \u8d85\u7cbe\u5bc6\uff08\u6676\u5706\u5904\u7406\u673a\uff09\u2192
\n<\/a>
\nEP-KF\/KH \u4f4e\u566a\u58f0\uff08Fab AGV\uff09\u2192
\n<\/a><\/div>\n<\/section>\n<\/div>","protected":false},"excerpt":{"rendered":"

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